The invention discloses a
detector radiation resistance reinforcement design method based on
electric field distribution regulation and control, and the method comprises the steps: building an
electric field distribution model through optimizing a groove structure, and regulating and controlling the
electric field intensity E; calculating Vd through a carrier drift speed Vd calculation formula based on E; a bottom angle with the curvature
radius being R is arranged at the bottom of the groove, and Epeak is calculated through an initial peak electric field Epeak calculation formula of the bottom corner point of the groove; p + ions are injected into the P +
ion injection layer from the side wall of the groove, R is optimized by changing the
doping concentration of the P + ions injected into the side wall of the groove, and Epeak is calculated in combination with a peak electric field Epeak calculation formula of corner points at the bottom of the groove after optimization; constructing an
irradiation resistance evaluation model based on the Epeak and the Epeak to calculate an
irradiation resistance factor RHF; regulating and controlling Vbr through a
breakdown voltage Vbr lifting model constructed by changing the thickness of the N
layers and combining Epeak; and representing the
radiation resistance characteristic of the
detector based on Vd, RHF and Vbr. According to the method, electric field regulation and control are combined with structure optimization, so that the reliability and the stability of the
detector in an
irradiation environment are improved.