To provide an accelerator and a
mass spectroscope, which can be miniaturized and manufactured in a low cost, and are available by anyone.SOLUTION: In each of a
mass spectroscope and an accelerator, which is structured by a plurality of substrates containing a first main substrate, a first upper substrate adhered onto an upper face of the first main substrate, and a first lower substrate adhered onto a
lower face of the first main substrate, a penetration chamber is formed in the first main substrate, and is penetrated to the
lower face of the first main substrate from the upper face of the first main substrate, a vertical direction (a Z direction) of the
substrate surface is surrounded by an upper substrate and a lower substrate, and both sides which are a right angle direction with the Z direction and of a
charged particle and a traveling direction (an X direction) of a
charged particle are surrounded by the first main substrate, and both side faces which have a right angle direction (a Y direction) to the Z direction and the X direction are surrounded by the first main substrate. A central hole of a first main substrate side board, which is incident to the
charged particle is opened, and the charged particle is incident to a
mass analysis chamber or an acceleration chamber from the central hole formed on the first main substrate side board.SELECTED DRAWING: Figure 1