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SiC-based MOSFET (metal-oxide -semiconductor field effect transistor) oxysensible sensor for automobile engine

A technology of automobile engine and oxygen sensor, applied in the field of oxygen sensor, can solve the problems of inability to meet the requirements of sensor miniaturization, integration and network control, complicated device, troublesome use and maintenance, etc., to achieve long-term stable operation, Improve reliability and consistency, reduce weight and volume

Inactive Publication Date: 2011-08-31
CHONGQING UNIV OF POSTS & TELECOMM
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Problems solved by technology

[0005] The oxygen detection method of the above-mentioned traditional current-limiting oxygen sensor can accurately analyze the concentration of oxygen, but its cost is high, the device is complicated, the volume is large, and the use and maintenance are troublesome. and networked control requirements
Most optical oxygen sensors have low sensitivity, poor stability, and are not suitable for the harsh environment of automotive engines

Method used

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  • SiC-based MOSFET (metal-oxide -semiconductor field effect transistor) oxysensible sensor for automobile engine
  • SiC-based MOSFET (metal-oxide -semiconductor field effect transistor) oxysensible sensor for automobile engine
  • SiC-based MOSFET (metal-oxide -semiconductor field effect transistor) oxysensible sensor for automobile engine

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Embodiment Construction

[0022] The oxygen sensor of the automobile engine based on MOSFET of the present invention adopts silicon carbide SiC as the substrate material, and can realize the requirement of working under high temperature.

[0023] As shown in Table 1, compared with other semiconductor materials, silicon carbide has good characteristics such as large band gap, high breakdown electric field, high electron saturation drift velocity, and high thermal conductivity, so it can be used under high temperature, high pressure, high frequency and other conditions. normal work. In addition, silicon carbide high-temperature devices can work stably without cooling continuously at 300-600°C, eliminating the requirement for cooling systems (such as liquid cooling systems), greatly reducing weight and increasing work reliability. Increased fuel efficiency, reduced pollution, and weight savings bring enormous economic and environmental benefits.

[0024] Table 1 Comparison of relevant parameters of sever...

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Abstract

The invention discloses a SiC-based MOSFET (metal-oxide -semiconductor field effect transistor) oxysensible sensor for an automobile engine and a manufacturing method thereof. Silicon carbide material with the excellent characteristics of wide energy gap, high breakdown electric field, high electron saturated drifting velocity, high heat conductivity and the like is used as a P-type substrate of an N-type channel MOSFET, thereby meeting the requirement of high-temperature working. In the MOSFET structure, a layer of oxysensible film material (such as YSZ: yttria stabilized zirconia) grows on an original gate oxide layer, wherein metal Pt is adopted as a metal gate electrode, and the channel of a MOSFET type oxysensible sensor can be a surface channel and an embedded channel. In the sensor, the change of oxygen concentration can be converted into the change of capacitance of the gate oxide layer in unit area, thereby causing the change of a threshold voltage. Besides, the invention also discloses a method for manufacturing the MOSFET type oxysensible sensor.

Description

technical field [0001] The invention relates to a semiconductor gas sensor, in particular to an oxygen sensor for measuring the oxygen concentration in an automobile engine. technical background [0002] With the development of the automobile industry and the rapid increase in the number of automobiles, the emission of automobile exhaust is increasing day by day, which makes the air pollution of the urban environment more and more serious. Therefore, it is necessary to take measures to fully burn the fuel in the engine, Maximize the combustion efficiency to achieve the purpose of saving fuel and reducing the emission of harmful gases such as automobile exhaust. Therefore, the research of oxygen sensor has always been an important research field of automotive sensor research. The common oxygen sensors for automobiles that have been put into practical use are generally electrochemical type, which can be divided into oxygen concentration type, limiting current type and chemica...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/414F01N11/00
CPCY02T10/47Y02T10/40
Inventor 王巍彭能罗元王晓磊代作海唐政维冯世娟李银国徐洋
Owner CHONGQING UNIV OF POSTS & TELECOMM
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