Method and device for cleaning tokamak first mirror by vacuum ultraviolet laser
A vacuum ultraviolet and laser cleaning technology, applied in cleaning methods and utensils, chemical instruments and methods, etc., can solve the problems of unsatisfactory cleaning efficiency, affecting the operation of the device, difficult optical analysis, etc., to facilitate the operation of automated equipment, easy to collect, Mechanistically obvious effect
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[0050] Specific examples: such as figure 1 As shown, the system involved in this method consists of a cleaning laser system, a sample feeding system, an air blowing system, a detection system, a control system and a rack.
[0051] The method is as follows: the laser light output by the argon fluoride excimer laser 3 enters the sealed optical cavity 4 filled with nitrogen through the quartz window 5 to propagate, so as to avoid the energy dissipation of the excimer laser beam, and then transmits it from the quartz window 6 on the other side of the sealed optical cavity. Emitted, through the adjustable diaphragm 7, the quartz window 8 of the vacuum chamber enters the vacuum chamber 1, and finally focuses through the focusing lens 9 and directly loads on the surface of the dust layer of the first mirror sample 11 installed on the workbench 12. A dust impurity layer with a thickness of about 1 micron has been deposited on the surface of the first mirror sample 11 during the operat...
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