According to a first aspect, this disclosure provides a method for reducing charge on a contaminated surface of an
ion optical
system, the contaminated surface having a layer of charged contaminants. The method includes: generating charged particles by exciting a
radiation source different from the contaminated surface of the
ion optical
system; and neutralizing at least a portion of the charged contaminant layer by causing the charged particles to interact with the charged contaminant layer, wherein (i) the
radiation source includes an
electromagnetic radiation source, wherein exciting the
radiation source includes causing the
electromagnetic radiation source to emit
electromagnetic radiation, and wherein generating charged particles includes causing the electromagnetic radiation to interact with the charged contaminant layer and / or the
ion optical
system to generate charged particles; and / or (ii) the radiation source includes an
electron source, wherein exciting the radiation source includes causing the
electron source to emit free electrons. In a second aspect, an ion optical system is provided, the ion optical system being configured to reduce charge on a contaminated surface of the ion optical system.