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Gas analyzer

A gas analysis and gas technology, which is applied in the fields of analyzing materials, measuring devices, and material analysis by electromagnetic means, and can solve the problem of simultaneous ionization of multiple gas molecular components.

Inactive Publication Date: 2009-04-08
RIGAKU CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Assuming that a gas containing a plurality of molecular components is generated from a sample, when trying to ionize these gases using the existing PI method, it is difficult to simultaneously ionize a plurality of gas molecular components. Simultaneously, that is, real-time analysis of multiple gas molecular components

Method used

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no. 1 approach

[0166] Next, the gas analysis device of the present invention will be described based on the embodiments. In addition, of course, this invention is not limited to this embodiment. In addition, although drawings are referred to in the following description, in order to show the characteristic part of this invention in an easy-to-understand form, in these drawings, the component of this invention may be shown with a scale different from an actual thing.

[0167] FIG. 1 shows an embodiment in the case where the present invention is applied to a gas analysis device that combines a temperature rising detachment device and a mass spectrometer. In FIG. 1 , a gas analysis device 1 includes a temperature-increasing detachment device 2 as a gas generating device, and an analysis device 3 for performing gas analysis. The temperature rising detachment device 2 and the analysis device 3 are connected through a gas delivery device 4 .

[0168] The temperature-rising detachment device 2 is...

Embodiment 1

[0286] In the gas analysis device 1 of Fig. 1,

[0287] (1) dispose the mixed solution of toluene and isopropanol as the sample S to the prescribed position in the sample chamber R0;

[0288] (2) import He (helium) gas as carrier gas;

[0289] (3) From the lamp 33A for PI in FIG. 2, vacuum ultraviolet light having an energy of 10.2 eV Figure 4 The diffuse ultraviolet light shown in (a) is supplied to the ionization region R3 in front of the gas discharge port of the gas delivery device 4;

[0290] (4) The filaments 37a and 33b of Fig. 2 are not energized (i.e. they do not generate electrons);

[0291] (5) Three voltages of -15V, 0V, and +15V are applied between the external electrode 38a and the internal electrode 38b as the electron acceleration voltage Vacc. Among them, the − (negative) potential of the electron acceleration voltage Vacc is the polarity that accelerates the secondary electrons generated by the irradiation of vacuum ultraviolet light in FIG. This is the ...

Embodiment 2

[0295] In the gas analysis device 1 of Fig. 1,

[0296] (1) Toluene as a volatile organic solvent is arranged as a sample S at a specified position in the sample chamber R0;

[0297] (2) import He (helium) gas as carrier gas;

[0298] (3) From the lamp 33A for PI in FIG. 2, vacuum ultraviolet light having an energy of 10.2 eV Figure 4 The diffuse ultraviolet light shown in (a) is supplied to the ionization region R3 in front of the gas discharge port of the gas delivery device 4;

[0299] (4) The filament 37a or 33b of Fig. 2 is not electrified (i.e. it does not generate electrons);

[0300] (5) An electron accelerating voltage (Vacc=0V) is not applied between the external electrode 38a and the internal electrode 38b.

[0301] Under the above conditions, the ionic strength of the gas generated by the sample S was measured without raising the temperature of the sample S (toluene generates gas even if the temperature is not raised). In the present embodiment, the light emit...

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Abstract

The invention relates to a plurality of molecule components included in a gas are to be ionized at the same time by PI method. For instance, a plurality of molecule components included in a gas generated at a certain instance are accurately analyzed in real time based on PI method. A gas analyzer is provided with a gas transfer apparatus for transferring a gas generated from a sample in a sample chamber to an analyzing chamber; an ionizer for ionizing the gas; a quadruple filter for separating ions by mass / charge ratio; and an ion detector for detecting the separated ions. The ionizer is provided with an ionizing region arranged in the vicinity of a gas exhaust of the gas transfer apparatus, and a lamp for applying light on the ionizing region. Since the lamp outputs light which has light directivity lower than that of a laser beam and travels by spreading, the gas entered the ionizing region in the ionizer receives light in a wide range, and the gas components inside are ionized at the same time.

Description

technical field [0001] The present invention relates to a gas analyzer for ionizing gas and analyzing it. Background technique [0002] In the past, various gas analysis devices are known. For example, a differential pressure gauge for detecting gas pressure, a gas density meter for detecting gas density, an infrared spectrometer for detecting vibration of gas molecules, a mass spectrometer for detecting gas mass number, and others are known. Various devices. [0003] Among the gas analysis devices, there is known a device that performs a predetermined analysis after ionizing a gas. This type of gas analysis device analyzes both the gas existing in the space and the gas generated from the sample. In a gas analysis device that analyzes gas generated from a sample, there is a sample chamber for accommodating the sample and a gas delivery device for transporting the gas generated from the sample at the front end of the ionization part that ionizes the gas. condition of the ...

Claims

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Application Information

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IPC IPC(8): G01N27/64G01N27/62
CPCG01N27/64H01J49/147H01J49/162H01J49/08H01J49/161G01N27/623
Inventor 有井忠高田义博大竹智士松浦惠树
Owner RIGAKU CORP
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