684 results about "Gas transfer" patented technology

A method and apparatus for a gas delivery system to deliver a precursor from a vessel to a process chamber via a process gas produced by flowing a first carrier gas into the vessel and combining with a second carrier gas flowing through a bypass around the vessel and a precursor monitoring apparatus disposed between the process chamber and the vessel. The precursor monitoring apparatus has a gas analyzer to generate a first signal indicative of a concentration of the precursor in the process gas or to a signal indicative of a flow rate of the process gas.

An atomic deposition (ALD) thin film deposition apparatus includes a deposition chamber configured to deposit a thin film on a wafer mounted within a space defined therein. The deposition chamber comprises a gas inlet that is in communication with the space. A gas system is configured to deliver gas to the gas inlet of the deposition chamber. At least a portion of the gas system is positioned above the deposition chamber. The gas system includes a mixer configured to mix a plurality of gas streams. A transfer member is in fluid communication with the mixer and the gas inlet. The transfer member comprising a pair of horizontally divergent walls configured to spread the gas in a horizontal direction before entering the gas inlet.

A method and apparatus for gas control is provided. The apparatus may be used for controlling gases delivered to a chamber, controlling the chamber pressure, controlling the delivery of backside gas between a substrate and substrate support and the like. In one embodiment, an apparatus for controlling gas control includes at least a first flow sensor having a control valve, a first pressure sensor and at least a second pressure sensor. An inlet of the first flow sensor is adapted for coupling to a gas supply. A control valve is coupled to an outlet of the flow sensor. The first pressure sensor is adapted to sense a metric indicative of the pressure upstream of the first flow sensor. The second pressure sensor is adapted to sense a metric indicative of the pressure downstream of the control valve.

A method and apparatus for processing a substrate is provided. In one aspect, the chamber comprises a chamber body and a support assembly at least partially disposed within the chamber body adapted to support a substrate thereon. The chamber further comprises a lid assembly disposed on an upper surface of the chamber body. The lid assembly includes a top plate and a gas delivery assembly which define a plasma cavity therebetween, wherein the gas delivery assembly is adapted to heat the substrate. A remote plasma source having a U-shaped plasma region is connected to the gas delivery assembly.

A flexible endoscope for ophthalmic orbital surgery includes a flexible probe housing having a proximal end, a distal end and a lumen extending between the proximal end and the distal end. The endoscope also includes an image fiber disposed in the lumen that communicates image information from the distal end of the flexible probe, a purge fluid/gas port disposed at the proximal end of the flexible probe that accepts purge fluid/gas and a purge fluid/gas conduit disposed in the lumen and in fluid communication with the purge fluid/gas port. The fluid/gas conduit delivers purge fluid/gas to the distal end of the endoscope. The endoscope also includes an access conduit disposed in the lumen that receives one of an ablation instrument, a coagulating instrument and a medication delivery instrument.

An apparatus and method for supporting a substantial center portion of a gas distribution plate is disclosed. At least one support member is capable of engaging and disengaging the diffuser with a mating connection without prohibiting flow of a gas or gasses through the diffuser and is designed to provide vertical suspension to a diffuser that is supported at its perimeter, or capable of supporting the diffuser without a perimeter support. In one aspect, the at least one support member is a portion of a gas delivery conduit and in another embodiment is a plurality of support members separated from the gas delivery conduit. The at least one support member is capable of translating vertical lift, or vertical compression to a center area of the diffuser. A method and apparatus for controlling gas flow from the gas delivery conduit to the gas distribution plate is also disclosed.

A semiconductor processing apparatus is disclosed. The apparatus may include, a reaction chamber and a susceptor dispose in the reaction chamber configured for supporting a substrate thereon, the susceptor comprising a plurality of through-holes in an axial direction of the susceptor. The apparatus may also include, a plurality of lift pins, each of the lift pins being disposed within a respective through-hole, and at least one gas transmitting channel comprising one or more gas channel outlets, the one or more gas channel outlets being disposed proximate to the through-holes. Methods for processing a substrate within a reaction chamber are also disclosed.

A user interface for a portable continuous positive airway pressure (CPAP) device comprises a gas delivery member releasably mountable to a manifold member. The CPAP device comprises a motor blower unit contained in a wearable vest which is connectable by a patient hose to the user interface. Alternative embodiments of the gas delivery member include a nasal mask or a pair of nasal prongs which are interchangeably mountable to the manifold member. Ball joints on opposing ends of the patient hose swivelably interconnect the patient hose to the user interface and to the motor blower unit. Cheek pads extend from opposing ends of the manifold member and are freely orientatable relative thereto. Six-way adjustable head gear stabilizes the user interface on the patient's face and comprises side straps and head straps which are pivotably joined to one another and which are adjustable lengthwise to fit a wide range of patient

A system and method for delivering a flow of breathing gas to an airway of a patient. The system monitors a characteristic that varies based on variations of the flow of the breathing gas and determines a Target Flow for the gas to be delivered to the patient based on the monitored characteristic. The Target Flow is set to a level sufficient to treat Cheyne-Stokes respiration or a sleep disordered breathing event. The system also alters the Target Flow based on a determination that the patient is experiencing a sleep disordered breathing event. In a further embodiment, the system determines an apnea detection time (T_apnea) as T_insp plus a constant, and delivers a machine triggered breath if an amount since the start of inspiration reaches T_apnea. Yet another embodiment, monitors the characteristic during an inspiratory phase of a respiratory cycle, and controls the flow of gas during the inspiratory phase of the respiratory cycle based on a result of this comparison.

A unitary humidity exchange cell (HUX) is dislosed that includes at least one composite membrane, disposed between at least one first chamber for flow of the first fluid therethrough and at least one second chamber for flow of the second fluid therethrough. The composite membrane include an at least partially sulfonated humidity-conducting polymer comprising residues derived from at least one arylvinyl monomer; and a reinforcing substrate bonded thereto. The product finds utility in a variety of physical and chemical processes and products whereby moisture or other highly polar liquid or gas transfer, exchange removal or delivery is important. A notable application is the Membrane Energy Recovery Ventilator (MERV) in which both heat, ions and moisture is transferred between two air streams, one intake and one exhaust, from an air-conditioned building.

A method of passivating the interior surface of a gas storage vessel to protect the surface against corrosion. The interior surface of the vessel is first dehydrated and then evacuated. A silicon hydride gas is introduced into the vessel. The vessel and silicon hydride gas contained therein are heated and pressurized to decompose the gase. A layer of silicon is deposited on the interior surface of the vessel. The duration of the silicon depositing step is controlled to prevent the formation of silicon dust in the vessel. The vessel is then purged with an inert gas to remove the silicon hydride gas. The vessel is cycled through the silicon depositing step until the entire interior surface of the vessel is covered with a layer of silicon. The vessel is then evacuated and cooled to room temperature.

A system for reducing airway obstructions of a patient may include a ventilator, a control unit, a gas delivery circuit with a proximal end in fluid communication with the ventilator and a distal end in fluid communication with a nasal interface, and a nasal interface. The nasal interface may include at least one jet nozzle, and at least one spontaneous respiration sensor in communication with the control unit for detecting a respiration effort pattern and a need for supporting airway patency. The system may be open to ambient. The control unit may determine more than one gas output velocities. The more than one gas output velocities may be synchronized with different parts of a spontaneous breath effort cycle, and a gas output velocity may be determined by a need for supporting airway patency.

A gas delivery system comprising a pressure generator, a pressure sensor, a control valve, and a processor. The pressure generator pressurizes breathable gas for delivery to a patient. The pressure sensor measures a pressure difference between the pressurized breathable gas and atmospheric pressure. The control valve is disposed downstream from the pressure generator and is constructed and arranged to control a flow rate of the pressurized breathable gas. The processor controls the control valve to bring the flow rate of the pressurized breathable gas to substantially zero while the pressure generator is operating and, when the flow rate is substantially zero, determines at least one of atmospheric pressure, an atmospheric air density, or a density correction factor based at least in part on the pressure difference between the pressurized breathable gas and the atmospheric pressure.

Ventilator systems include: (a) a mass flow controller; (b) a gas delivery valve in communication with the mass flow controller and configured to selectively dispense a plurality of different gases to a subject; (c) a first gas source in fluid communication with the gas delivery valve; (d) a second gas source in fluid communication with the gas delivery valve; (e) a first pressure sensor located upstream of the gas delivery valve; (f) a second pressure sensor located downstream of the gas delivery valve; and (g) a controller operatively associated with the first and second pressure sensors and the mass flow controller, the controller comprising computer program code that monitors the pressures measured by the first and second pressure sensors and automatically dynamically adjusts the flow rate of the mass flow controller.

HVPE reactor for simultaneously fabricating multiple Group III nitride semiconductor structures during a single reactor run. The HVPE reactor includes a reactor chamber, a growth zone, a heating element and a gas supply system that can include a plurality of gas blocks. A substrate holder holds multiple substrates and can be a single or multi-level substrate holder. Gas flows from gas delivery blocks are independently controllable and are mixed to provide a substantially uniform gas environment within the growth zone. The substrate holder can be controlled, e.g., rotated and/or tilted, for uniform material growth. Multiple Group III nitride semiconductor structures can be grown on each substrate during a single fabrication run of the HVPE reactor. Growth on different substrates is substantially uniform and can be performed simultaneously on multiple larger area substrates, such as 3-12″ substrates.

A respiratory mask assembly for delivering breathable gas to a patient includes a gas delivery path defining at least one vent outlet and a connection flange surrounding the vent outlet. A vent cover is removably connected to the connection flange such that the vent cover is positioned in covering relation with respect to the vent outlet. The vent cover includes a cap portion providing at least one vent aperture for gas washout and a ring-shaped retaining portion defining an aperture into which the connection flange is inserted. The cap portion is movably connected to the retaining portion to allow the cap portion to be attached to and detached from the connection flange while the retaining portion remains connected to the connection flange.

The present invention includes a molten metal pump and associated components that enable gas to be released into a stream of molten metal. The gas may be released into the molten metal stream (preferably into the bottom of the stream) flowing through a passage. Such a stream may be within the pump discharge and/or within a metal-transfer conduit extending from the pump discharge. The gas is released by using a gas-transfer foot that is positioned next to and is preferably attachable to the pump base or to the metal-transfer conduit. Preferably, the conduit (and/or discharge) in which the gas is released comprises two sections: a first section having a first cross-sectional area and a second section downstream of the first section and having a second cross-sectional area, wherein the second cross sectional area is larger than the first cross-sectional area. Preferably, the gas is released into or near the second section so that the gas is released into an area of relatively lower pressure.

A gas delivery assembly for uniform gas flow within a processing system is provided. In one aspect, a gas delivery assembly includes sidewalls at least partially disposed about a gas delivery component disposed within the processing system. The gas delivery shield also includes a bottom wall having a varied profile that extends beyond the gas delivery component to define a varied spacing above the substrate. The bottom wall of the gas delivery also includes a plurality of gas passageways formed therethrough to deliver a uniform gas distribution to a substrate being processed.

Systems and methods may include a gas source, a gas delivery circuit, and a nasal interface allowing breathing ambient air through the nasal interface. A gas flow path through the nasal interface may have a distal gas flow path opening. A nozzle may be associated with a proximal end of the nasal interface a distance from the distal end gas flow path opening. At least a portion of an entrainment port may be between the nozzle and the distal end gas flow opening. The nozzle may deliver gas into the nasal interface to create a negative pressure area in the gas flow path at the entrainment port. The nasal interface and the nozzle may create a positive pressure area between the entrainment port and the distal end gas flow path opening. Gas from the gas delivery source and air entrained through the entrainment port may increase airway pressure or lung pressure or provide ventilatory support.

Catheter device for insertion into a vessel of a human or animal body, comprising a guide catheter and, incorporated in same, an OCT catheter with an OCT imaging device, the guide catheter having a balloon inflatable via a supply line for occluding the vessel, as well as a device for delivering a liquid or gas to the vascular region to be recorded by means of the OCT imaging device, in particular the vascular region located distally to the balloon, wherein there is provided on the guide catheter a second inflatable balloon spaced apart from the first balloon for occluding the vessel, wherein the section of the guide catheter between the two balloons is transparent, at least in sections, to the OCT radiation emittable by the OCT imaging device disposed inside the guide catheter.

Disclosed is an improved method for the remineralization of process water in a desalination system. The method sequesters carbon dioxide gas (CO₂) from seawater or concentrate (brine) of desalination process via a gas transfer membrane. The sequestered carbon dioxide gas (CO₂) is thereafter used in the production of soluble calcium bicarbonate (Ca(HCO₃)₂). The calcium bicarbonate (Ca(HCO₃)₂) adds hardness and alkalinity to the resulting process water.

An apparatus for selectively pre-coating a plasma processing chamber, including a chamber wall is disclosed. The apparatus includes a first set of RF electrodes, the first set of RF electrodes configured to strike a first pre-coat plasma, the first set of RF electrodes defining a first plasma chamber zone. The apparatus also includes a first set of confinement rings disposed around the first set of RF electrodes; and a second set of confinement rings disposed between the first set of confinement rings and the chamber wall. The apparatus further includes a gas delivery system configured to apply a first pre-coat layer to the first plasma zone when a first pre-coat gas is delivered and the first set of RF electrodes is energized. The apparatus also includes the gas delivery system configured to apply a second pre-coat layer to the second plasma zone when a second pre-coat gas is delivered and the second set of RF electrodes is energized.

The present invention is of device, system, and method for cooling and heating an operating tip of a cryoprobe using a single source of compressed gas. Cooling of the operating tip is effected by Joule-Thomson expansion of a high-pressure cooling gas through a Joule-Thomson orifice into an expansion chamber. Heating of the operating tip is effected by electrical resistance heating. In preferred embodiments, heating of the operating tip is effected by electrical resistance heating of low-pressure gas flowing towards the operating tip. Preferably, gas from a single gas source is supplied to the probe during both cooling and heating phases, a cooling gas being supplied at high pressure when used for cooling and at low pressure when used for heating. Low-pressure gas supplied during the heating phase is heated as it flows towards the operating tip, preferably by electrical resistance heating within the body of the probe. A single gas input lumen is used during both cooling and heating phases to transport gas into the probe, and a single gas exhaust lumen is used during both cooling and heating phases to conduct gas out of the probe.

A device and method is disclosed for delivering NO to a patient. The device utilizes a single controller that controls two separate flow controllers to deliver an oxygen-containing gas and a NO-containing gas to the patient. The flow profiles of the oxygen-containing gas and the NO-containing gas are controlled by the controller. In one aspect of the invention, the flow profile of the NO-containing gas is proportional to the flow profile of the oxygen-containing gas throughout patient inspiration. In this regard, the patient receives a steady concentration of NO. In another aspect of the invention, the flow profile of the NO-containing gas is quasi-proportional to the flow profile of the oxygen-containing gas. In this regard, the NO-containing gas flow profile is altered to provide an increased concentration of NO either at the beginning or end of inspiration. In one aspect, the delivery device is used with mechanically-ventilated patients. In the other aspect of the delivery device, the device is used with spontaneously-breathing patients. The device and method, in a preferred embodiment, further contemplates using a gas purge or air flush feature to remove enriched-oxygen and/or NO from the device.