3results about How to "Fully ionized" patented technology

This invention discloses a method for enhancing and controlling the radiation of an LPP-EUV light source based on dual-pulse spatiotemporal co-constraint, belonging to the field of semiconductor manufacturing technology. This invention obtains a spatiotemporal reference by real-time monitoring of a liquid metal droplet, uses a pre-pulse laser to induce target material deformation into a fogged target cloud, and combines high-speed imaging and a hydrodynamic model to predict the time and coordinates of the target cloud's energy absorption peak. It dynamically adjusts the delay time and optical axis direction of the main pulse laser to achieve dual-pulse spatiotemporal co-constraint, and constructs a closed-loop control system through a recursive least squares algorithm with a dynamic forgetting factor. This invention effectively improves the extreme ultraviolet light conversion efficiency, controls the power fluctuation of the light source within ±0.5%, and extends the maintenance cycle of optical components by 2 times. It can be widely applied to next-generation high-power extreme ultraviolet lithography light source systems, meeting the application requirements of semiconductor miniaturization processes.

The utility model provides an ion migration tube to solve the problem of how to improve the ionization effect of an ion migration tube using an ultraviolet lamp type ionization source on substances. The ion migration tube provided by the utility model comprises a sample introduction piece, an ionization assembly, an ion gate assembly, a migration assembly and an ion receiver, the sample introduction piece is provided with a sample introduction port; the ionization assembly comprises a base body and at least two ultraviolet lamps connected to the base body, the base body is provided with an ionization area, the sample inlet is communicated with the ionization area, and the at least two ultraviolet lamps are circumferentially distributed on the periphery of the ionization area; the migration assembly is provided with a migration area, the ion gate assembly is arranged between the ionization area and the migration area, and the ion receiver is arranged on the side, away from the ion gate assembly, of the migration area.

This invention provides a proton transfer reaction device with high ion transport efficiency, which can improve the ionization effect of the ion source and the focusing degree of the ion transport process. It includes an ion source, a drift region, and an ion funnel. The ion source is composed of multiple coaxial annular inlet electrode plates, with a discharge ring connected to the inlet electrode plate at the inlet end. The drift region is formed by stacking multiple drift rings along the ion transport axis, with the same voltage difference between adjacent drift rings. The ion funnel is composed of multiple coaxial annular outlet electrode plates, with concentric annular electrode plates on both sides of the outlet electrode plates. The inner diameters of the multiple outlet electrode plates and the annular electrode plates gradually decrease along the axial direction to form a funnel-shaped ion focusing transport channel. Radio frequency voltage and DC gradient voltage are applied to adjacent annular electrode plates, and the radio frequency voltage applied to the annular electrode plates on the same side of the outlet electrode plates has the same amplitude and phase.