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180results about How to "Reduce wind resistance" patented technology

Outdoor unit and air conditioning system

The application relates to an outdoor unit and an air conditioning system. The outdoor unit comprises a support, a heat exchanger assembly and a fan. The heat exchanger assembly is fixedly connected with the support. The heat exchanger assembly comprises a first heat exchanger and a second heat exchanger. The first heat exchanger and the second heat exchanger are oppositely arranged along a first direction. The fan is fixedly connected with the support and located at the top of the heat exchanger assembly. The first heat exchanger comprises a main body part and a first extension part. The first extension part is located at one end of the main body part along a second direction. The first extension part is connected with the main body part. The plane where the first extension part is located intersects the plane where the main body part is located. The outdoor unit in the application has more than two air return surfaces. Thus, the heat exchanger assembly can have a larger heat exchange area, thereby improving the heat exchange efficiency of the outdoor unit. In the case of improving the heat exchange efficiency of a single outdoor unit, the number of outdoor units in the air conditioning system can be appropriately reduced. Thus, the cost of the air conditioning system can be reduced.
Owner:GD MIDEA HEATING & VENTILATING EQUIP CO LTD +1

Micro-perforated noise-reducing air outlet structure and its application in hair dryers

ActiveCN115778076Bplay a sound-absorbing effectreduce wind resistanceHair dryingAir velocityNoise
This invention discloses a micro-perforated noise-reducing air outlet structure and a hair dryer with the micro-perforated noise-reducing air outlet structure. The micro-perforated noise-reducing air outlet structure includes a shell with an air outlet; a fan assembly installed inside the shell and axially distributing air towards the air outlet; and a micro-perforated component, which is a box-shaped structure with an inner cavity. The micro-perforated component is installed inside the shell and connected to the air outlet. The circumferential sidewall of the micro-perforated component and the inner sidewall of the air outlet are spaced apart to form an air outlet channel. Several micro-holes are opened on the sidewall of the micro-perforated component facing the fan assembly. The inner cavity is connected to the inside of the shell through the micro-holes, and a sound-absorbing component is placed in the inner cavity. The inner cavity of the micro-perforated component constitutes a sound-absorbing cavity that is not air-permeable, achieving a sound-absorbing effect without increasing wind resistance or reducing the air velocity and air pressure.
Owner:GUANGDONG WUYE TECH CO LTD

An integrated transition yaw connection system for wind turbines

This utility model discloses an integrated transition yaw connection system for wind turbines, belonging to the technical field of wind power generation equipment. The system includes a wind turbine tower, a slewing bearing, a short-section cylinder, and a lower platform. The wind turbine tower has a truss-type hollow structure. The short-section cylinder is vertically arranged and its top is welded to the lower platform as a whole. Its bottom is connected to the top of the tower through the slewing bearing. This utility model uses a hierarchical structure of truss tower-slewing bearing-short-section cylinder-platform. It utilizes the short-section cylinder to distribute the nacelle load and compensate for installation errors. Combined with the slewing bearing, it achieves low-friction and stable yaw. This structure effectively solves the problems of heavy self-weight, obvious yaw vibration, complex assembly, and easy wear of connection parts of traditional wind turbine towers. It has the advantages of lightweight, stable yaw, convenient installation, and long service life.
Owner:CHENGFENG ENERGY (TAIYUAN) CO LTD

Control method of low-temperature cold water indirect evaporative cooling air conditioning system

The invention relates to the technical field of air conditioners, in particular to a control method of a low-temperature cold water indirect evaporative cooling air conditioning system which comprises a heat exchange core, a mechanical refrigeration assembly, a water tank, a spraying pipe, a heat exchanger and a three-way valve. The heat exchange core body comprises a dry channel and a wet channel. The system has a sensible heat cooling mode and an evaporation heat absorption mode, when water needs to be supplemented to the system, the sensible heat cooling mode is operated, moisture in outdoor inlet air can be separated out, and therefore water is supplemented to the system; when an evaporation heat absorption mode is operated, different states can be operated according to the outdoor environment dry-bulb temperature and the outdoor environment wet-bulb temperature, so that different working conditions can be adapted; in addition, the mechanical refrigeration assembly directly supplies cold to cooling liquid between the water tank and the spraying pipe through the heat exchanger, an evaporator does not need to be arranged at a dry channel outlet of the heat exchange core body to supply cold to indoor return air, air resistance is reduced, and annual energy consumption of an indoor fan is reduced.
Owner:GUANGDONG HIWAVE TECH

Air purifier

The utility model provides an air purifier which comprises a shell provided with an airflow channel, and the airflow channel penetrates through the two opposite sides of the shell; the condensation filter screen is arranged at the air inlet end of the airflow channel and is used for uniformly distributing and condensing the inlet airflow; the composite filter element is arranged in the airflow channel, located between the air inlet end and the air outlet end of the airflow channel and used for filtering liquid pollutants, aerosol particles and gas pollutants in the condensed airflow; the fan is arranged at the air outlet end of the airflow channel, and the fan is used for guiding airflow to flow in from the air inlet end of the airflow channel and to be discharged from the air outlet end of the airflow channel; wherein the airflow channel is linear. According to the air purifier, the airflow backflow probability can be effectively reduced, the turbulent flow energy generation rate is greatly reduced, and airflow flows more smoothly in the airflow channel, so that airflow around the air purifier smoothly flows into the airflow channel, the smoke escape amount can be effectively reduced, and the oil smoke purification efficiency is improved.
Owner:FOSHAN XINYAO ENVIRONMENTAL PROTECTION TECHNOLOGY CO LTD

Automobile a column reinforcing part based on light weight design

ActiveCN224392749UReduce the effectiveness of security protectionAvoid Strength DecaySuperstructure subunitsShock waveLiving space
The utility model discloses a kind of automobile A column reinforcing member based on lightweight design, it is related to the technical field of automobile parts, including external steel body, the inside of external steel body is equipped with main body reinforcing component, the inside of main body reinforcing component is equipped with energy-absorbing member, the side of external steel body away from the surface of main body reinforcing component is equipped with sound insulation cotton.The utility model can make the internal structure of automobile A column more stable by main body reinforcing component, reduce the deformation due to collision, protect front compartment safety, by energy-absorbing member, local shock wave can be offset, ensure that front compartment living space is not deformed, while the material density of energy-absorbing member is smaller, the overall weight of A column can be reduced, so as to reduce the weight of entire vehicle body, reach the effect of reducing fuel consumption, while external steel body is fixed together by hinge hole bolt and angle steel bolt, compared with general welding mode, when maintaining, avoid cutting A column, cause stress concentration of A column, affect the safety of overall A column structure.
Owner:ENYONG (YANGZHOU) AUTOMOBILE TECH CO LTD

Outdoor side seam skirt flare panel

ActiveCN224597607Uless restraintavoid tearing
The utility model discloses outdoor side seam skirt expansion piece belongs to the related technical field of clothing, outdoor side seam skirt expansion piece, including wind clothes, the top of wind clothes is connected with hat through slide fastener, and the edge position of hat is provided with the collection of rope, the inside lower hem position of wind clothes is provided with the leg bandage, and the setting number of leg bandage is two, and two leg bandage are located respectively in the inside of wind clothes and close to the position of both ends, and the inside lower hem center position of wind clothes is provided with the slit, and the reflective skirt is sewed on the slit, and the reflective skirt extends from the inside of slit to the outside of slit, and the outside of wind clothes is provided with the air -permeable bag mouth. It can reduce the clothes to the restraint of leg action, reduce the wind resistance when riding, solve the problem that the lower hem is tight when straddling, avoid wind clothes fabric tearing or seam open, simultaneously, can form effective rain -shelter, and the unfolded reflective skirt can prevent rainwater accumulation or splash wet trousers, improve the practicality of wind clothes in rainy day environment.
Owner:FUZHOU SENLANGDI TECHNOLOGY CO LTD

A solar power generation device

The application provides a solar power generation device, which comprises a control box, a horizontal rotating mechanism located at the top of the control box, a pitching rotating mechanism located at the top of the horizontal rotating mechanism and a solar panel, wherein the solar panel is rotationally connected with the pitching rotating mechanism through a pitching connecting piece; the horizontal rotating mechanism is provided with a first limiting mechanism; and the pitching rotating mechanism is provided with a second limiting mechanism. Through the horizontal rotation and the pitching rotation, the solar panel can be kept at a high-efficiency power generation angle with the sunlight, and when encountering strong wind, the solar panel can be adjusted to a horizontal state to reduce the wind resistance; at night, the solar panel can be adjusted to a vertical state to make the dew, rain and snow fall; the setting of the pitching connecting piece lowers the gravity center of the solar panel and concentrates the gravity center in the box body, so that the whole device is relatively stable.
Owner:SHENZHEN TIANJING YUHONG TECHNOLOGY CO LTD

A quick-assembly and disassembly filter structure and cabinet

This utility model discloses a cabinet-type quick-release filter structure and cabinet. The cabinet has an air inlet. The filter structure includes: a protective cover adapted to be fixed to the cabinet, which has a first opening facing downwards, forming an air inlet channel adapted to connect the first opening and the air inlet; the air inlet channel has a slot extending from the side near the cabinet to the side away from the cabinet, and the protective cover has an insertion port communicating with the slot at the corresponding position; and a filter element adapted to be inserted into or removed from the slot through the insertion port, and covering the air passage section in the corresponding air inlet channel after being inserted into place. This filter structure allows for convenient installation and removal of the filter element.
Owner:XIAMEN KEHUA DIGITAL ENERGY TECH CO LTD

Compact lens antenna

A compact lens antenna includes: a lens dielectric body with a feed cavity thereon and a feed source at least partially disposed within the feed cavity; the lens dielectric body includes multiple nested bodies; the lens dielectric body is configured to achieve electromagnetic wave phase compensation and optimize antenna performance by adjusting the size, thickness, and dielectric material of the multiple nested bodies. The compact lens antenna is smaller, lighter, and has reduced wind resistance, improving the reliability and ease of installation on towers. Furthermore, by changing the shape of the lens dielectric body, adding a compensation medium, or increasing the dielectric constant, the phase of the electromagnetic wave is compensated, thus optimizing antenna performance.
Owner:COMBA TELECOM TECH (GUANGZHOU) CO LTD +1

Cross-flow air conditioner

The invention relates to the technical field of air conditioners, in particular to a cross-flow air conditioner which comprises a machine shell, a cross-flow fan and an evaporator. An air inlet is formed in the middle of the front face of the machine shell, and an air outlet is formed in the left side and / or the right side of the front face of the machine shell. An air duct is arranged in the machine shell and used for distributing airflow entering from the air inlet to the air outlet; the cross-flow fan is arranged on the left side and / or the right side of the machine shell and is close to the air outlet. The cross-flow fan provides driving force for airflow to enter the machine shell from the air inlet and then flow out of the air outlet. The evaporator is arranged in the machine shell and close to the air inlet, and the evaporator is used for conducting temperature exchange on airflow flowing through the air channel. The air inlet and the air outlet are formed in the front face of the air conditioner, the back of the air conditioner can be directly attached to a wall or integrated with the wall, it can be guaranteed that the air inlet and the air outlet are not blocked, and smooth airflow circulation is guaranteed; the air inlet resistance is obviously reduced, and the air inlet efficiency is improved.
Owner:GUANGDONG SUNWILL PRECISING PLASITC CO LTD

Silvered glass with integrated antenna structure and automotive component

ActiveCN224610119UBreak signal shieldingGuaranteed stability
The utility model relates to the field of automobile parts and vehicle communication technology, especially to a kind of silver-plated glass with integrated antenna structure and automobile parts, including glass substrate, silver-plated heat insulation layer, black ink area, local silver-removing area and conductive antenna unit, silver-plated heat insulation layer is arranged on the surface of glass substrate;Black ink area is arranged at the edge of glass substrate;Local silver-removing area is arranged in the projection range of black ink area;Conductive antenna unit is arranged in local silver-removing area, and equal net space gap is formed between the two side edges of conductive antenna unit and the boundary of local silver-removing area respectively, the utility model is by setting special "radio frequency window" on silver-plated layer, and local silver-removing area, effectively breaks the signal shielding of metal film, provides sufficient electromagnetic clearance for antenna, ensures the stability of radio signal.
Owner:TAIZHOU SUZHONG ANTENNA GROUP

An unmanned aerial vehicle antenna support

ActiveCN224652699Ureduce occlusionReal-time posture compensation
The utility model relates to the field of antenna support discloses an unmanned aerial vehicle antenna support including low shelter bionical support structure, low shelter bionical support structure includes support frame, the inner wall fixedly connected with support rod of support frame, the inner wall fixedly connected with mounting rod of support frame, the bottom outer wall rotationally connected with gyroscope structure of mounting rod, the gyroscope structure includes first ring, the inner wall rotationally connected with second ring of first ring, the inner wall rotationally connected with third ring of second ring, the inner wall rotationally connected with signal receiver of third ring through pivot. In the utility model, through setting up low shelter bionical support structure, reduce the support to the signal shelter, and reduce the weight of self, through setting up gyroscope structure, realize antenna real -time attitude compensation, make signal receiver always steady point to target, solve the problem that the antenna is easy to disconnect with ground because of fuselage attitude change.
Owner:JIANGSU WEIHANG JINGYI TECH CO LTD

A wall-mounted air purifier

The utility model provides a kind of hanging air purifier, relate to air purifier technical field.A kind of hanging air purifier, comprising: shell, air inlet and air outlet are provided on shell;Support frame, support frame is set in shell, and first accommodating space is provided in support frame;Filter element, filter element is set in first accommodating space;Plasma generating device, plasma generating device is set in first accommodating space, and filter element is set between plasma generating device and air inlet;Wherein, plasma generating device includes first frame and multiple plasma generating modules set in first frame.By being provided with plasma generating device in hanging air purifier, air is further treated by sterilization, deodorization etc. after passing through physical filtration, improve purification efficiency, and plasma generating device uses modular design to use multiple plasma generating modules, facilitate flexible configuration.
Owner:NINGBO TALLER ELECTRICAL APPLIANCE CO LTD

Photocatalyst air purification and sterilization machine

The utility model relates to a kind of photocatalyst air purification disinfection machines, including machine body, the machine body is sequentially provided with primary filter, fan, high efficiency filter and photocatalyst component from below to above, the machine body side wall is equipped with air inlet corresponding primary filter, the air inlet side and the air outlet side of the photocatalyst component are equipped with light-shielding ventilation component, multiple photocatalyst modules are arranged in the mounting bracket of photocatalyst component, ultraviolet lamp is arranged in the center of photocatalyst module, and ultraviolet lamp is also arranged uniformly around photocatalyst module outer four quarters.The clean air after the grading filtration of primary filter and high efficiency filter enters the photocatalyst component, ultraviolet lamp is built-in in photocatalyst cylindrical base web, multiple ultraviolet lamps are externally arranged, compact structure, the inner and outer surfaces of photocatalyst module are irradiated, photocatalytic efficiency is greatly improved, it has dust removal clean purification, disinfection and sterilization, decomposition and degradation organic pollutant, generates negative oxygen ion, is beneficial to the health care of human body and other functions, and is widely applicable to multiple places.
Owner:JIANGYIN SUCHENG ENVIRONMENTAL TECHNOLOGY CO LTD

Top air outlet type air conditioner outdoor unit

The utility model discloses a top air outlet type air conditioner outdoor unit which comprises a machine shell comprising a base plate formed by splicing a first bottom plate and a second bottom plate. The outdoor heat exchanger is arranged on the base plate and defines a heat exchange space, and a notch is formed in the side wall of the outdoor heat exchanger and comprises a first notch section and a second notch section. The compressor is arranged in the heat exchange space, is arranged on the first bottom plate and is close to the first notch section; the gas-liquid separator is arranged on the second bottom plate and is close to the first bottom plate; the oil separator is arranged on the first bottom plate and located on the side, away from the first notch section, of the compressor. The stop valve is close to the first notch section relative to the gas-liquid separator, and the projection of the stop valve on the chassis is located on the second bottom plate; and the four-way valve is arranged on the side, away from the first notch section, of the stop valve, the height of the four-way valve is between the height of the stop valve and the height of the gas-liquid separator, reasonable layout of all parts of the outdoor unit in a limited space is achieved, and manufacturability and maintainability are both considered while the space utilization rate is increased.
Owner:QINGDAO HISENSE BOSCH AIR CONDITIONING SYSTEM CO LTD

An automatic inspection system suitable for offshore wind farms

ActiveCN117727106BEfficient and reasonable arrangementreduce friction
The present application relates to offshore wind farm wind turbine inspection technology field, more specifically, a kind of automatic inspection system suitable for offshore wind farm, set in the wind turbine equipped with data acquisition and monitoring control system inside or outside, the automatic inspection system includes at least one subsystem, the subsystem includes unmanned aerial vehicle, charging bin, the charging bin is built into the wind turbine or externally hung on wind turbine, the charging bin is connected with the data acquisition and monitoring control system, the unmanned aerial vehicle can be built into charging bin and electrically connected with charging bin, and the charging mode is contact charging.The automatic inspection system suitable for offshore wind farm provided by the present application does not need to be carried by operation and maintenance ship, which can realize unmanned aerial vehicle automatic patrol on offshore wind farm, and ensure the safe take-off and operation of unmanned aerial vehicle.
Owner:SANY ELECTRIC CO LTD

Ultraviolet-biological coupling reactor

The utility model discloses an ultraviolet-biological coupling reactor which comprises an organic waste gas collecting device, the organic waste gas collecting device is connected with an air inlet pipe, an ultraviolet lamp tube is arranged in the air inlet pipe, the other end of the air inlet pipe is connected with a biological tower, a filler layer is arranged in the biological tower, and the top of the biological tower is connected with a centrifugal fan. A pH meter is arranged in the biological tower, a water drainage port of the biological tower is connected with a water drainage electric valve, a floating ball valve is arranged in the biological tower, and the floating ball valve is connected with a water replenishing tank; the biological tower is connected with a medicament storage tank, and the biological tower is also connected with a pressure difference transmitter. The device disclosed by the utility model has the advantages of higher economical efficiency, higher operation stability, high operation efficiency and good waste gas treatment effect.
Owner:上海吾励环境技术有限公司

A noise reduction type range hood

The application relates to the technical field of kitchen equipment, in particular to a noise reduction type range hood. The range hood comprises a hood and a grille assembly; a smoke collecting cavity is formed in the hood; the smoke collecting cavity is provided with an air inlet; the air inlet is provided with a grille mounting structure; the grille assembly comprises at least one inlet grille; the at least one inlet grille is detachably connected with the grille mounting structure; air inlet holes are arranged on the inlet grille at intervals; flow guide pieces are arranged in the air inlet holes; the flow guide pieces are provided with flow guide flange portions; the flow guide flange portions extend to the inside of the smoke collecting cavity along the edges of the air inlet holes; sound absorption pad mounting structures are arranged between adjacent flow guide flange portions; and sound absorption pads are arranged in the sound absorption pad mounting structures. The structure of the inlet grille is designed, the noise at the air inlet of the range hood is greatly reduced, and the air inlet resistance and the oil fume suction effect are not affected.
Owner:NINGBO FOTILE KITCHEN WARE CO LTD

Sugarcane disease and insect pest monitoring device based on unmanned aerial vehicle and system thereof

The invention discloses a sugarcane pest monitoring device based on an unmanned aerial vehicle and a system thereof, and relates to the technical field of pest monitoring. The problem of data collection comprehensiveness is solved. The supporting seat is carried on a bottom mounting platform of the unmanned aerial vehicle; the bottom of the supporting seat is in transmission fit with a bearing table through a lifting control mechanism, and a data acquisition module for acquiring sugarcane data is mounted at the bottom of the bearing table; the data acquisition module comprises an infrared acquisition module for acquiring sugarcane infrared images, a remote sensing module for acquiring sugarcane remote sensing data and an image acquisition module for acquiring sugarcane image data. According to the invention, the infrared acquisition module, the remote sensing module and the image acquisition module are arranged on the liftable bearing platform, and data acquisition of the sugarcane rhizome can be realized by using the lifting of the bearing platform and the flight of the unmanned aerial vehicle, so that the comprehensiveness of the whole disease and pest monitoring is further improved.
Owner:GUANGXI ZHUANG AUTONOMOUS REGION ACAD OF AGRI SCI

Folding-wing amphibious unmanned surface vessel

This utility model belongs to the field of amphibious unmanned surface vessels (USVs), specifically relating to a folding airfoil sail amphibious USV. It includes a base, with a hydraulic telescopic rod at the upper end of the base, a mast at the upper end of the hydraulic telescopic rod, an upper sail on the upper outer side of the mast, a lower sail on the lower outer side of the mast, and a stepper motor at the upper end of the mast. This utility model features a unique folding mechanism, allowing the sail to be folded and stored when not in use. This not only improves the portability and storage efficiency of the equipment but also reduces wind and water resistance in adverse weather conditions or when underwater operations are required, lowering the risk of equipment damage. Using a symmetrical airfoil sail maintains good aerodynamic performance under different wind directions and angles, providing stable and continuous aerodynamic propulsion. This design not only improves wind energy utilization efficiency but also enhances the USV's adaptability to complex and changing environmental conditions.
Owner:YANTAI UNIV

Air purification device and air conditioner

The invention relates to the technical field of air conditioning, and discloses an air purification device and an air conditioner. The air purification device comprises a shell defining a containing cavity with an air inlet and an air outlet, and the air outlet is located in the top of the containing cavity; the purification device is arranged in the accommodating cavity; the fan is movably located at the air outlet, and the fan is provided with a fan air inlet and a fan air outlet; wherein the fan can move between a first position and a second position relative to the air outlet, when the fan moves to the first position, the fan air inlet is communicated with the air outlet, and the fan drives airflow of the air inlet to flow through the purification device and the fan and then flow out of the fan air outlet; when the fan moves to the second position, the fan air inlet and the fan air outlet are staggered, and the fan drives external airflow to enter the fan air inlet and then flow out of the fan air outlet. Therefore, when the air purification device operates in a fan mode, external airflow can directly flow into the fan air inlet, the air inlet resistance is reduced, and the air outlet effect of the fan is improved.
Owner:QINGDAO HAIER AIR CONDITIONER GENERAL CORP LTD +1

Simple end face gear speed change chainless bicycle

A front wheel is connected with a rear wheel through a bicycle beam, a steering column connected with the bicycle beam is arranged below a handlebar, a steering arm is arranged at the tail end of the steering column, the bicycle beam is provided with a steering column connected with the rear wheel, and the steering arm is connected with the steering column above the rear wheel through a steering push-pull cable; a first shock absorber connected with a rear wheel is arranged below the steering column; the saddle is arranged in the middle of the beam; a plurality of circles of end face gears with different diameters are arranged on the front wheel, a cylindrical gear meshed with the end face gears is arranged on the bicycle beam, and the cylindrical gear is connected with the handlebar through a variable-speed push-pull cable. A simple end face gear speed change mechanism is adopted, and the transmission efficiency is high; due to rear steering and front driving, steering is flexible, and the turning radius is small; the saddle is low in gravity center, small in wind resistance, anti-falling and safe; the speed change range is wide and can be fast or slow; chain deviation resistance caused by different surfaces of the chain disc is avoided; a large-modulus gear is adopted, so that the strength is high and durability is realized; the failure rate is low and maintenance is easy.
Owner:孙本东

End frame and tank container

The invention relates to an end frame and a tank container. The end frame comprises two stand columns which are oppositely arranged in a spaced mode, bottom corner pieces connected to the bottoms of the stand columns, and an end lower beam arranged between the two bottom corner pieces. And the end part of the end lower beam is connected with the bottom corner piece in a manner of inclining upwards along the vertical direction or is simultaneously connected with the stand column and the bottom corner piece, and forms a height difference with the bottom corner piece, so that an avoiding groove is formed between the end lower beam and the bottom corner piece. The avoiding groove of the end frame is formed by directly inclining the end part of the end lower beam upwards, so that the manufacturing process of the avoiding groove part can be simplified, the manufacturing difficulty of the avoiding groove is reduced, the space accumulation of an external reinforcing structure can be reduced, and the operation space at the bottom end of the upright post is increased.
Owner:NANTONG CIMC TANK EQUIP CO LTD

A gas filtering system of a wafer processing process cavity and a glue coating and developing machine

PendingCN122506775AIncrease the effective air intake areaavoid forming
This invention discloses a gas filtration system and a coating and developing machine for a wafer fabrication process cavity, relating to the field of semiconductor manufacturing technology. Addressing the problems of existing technologies using independent curved air paths, such as long airflow paths, high wind resistance, space occupation, and numerous sealing points, this system integrates a crossbeam air supply structure into its main frame. An axially continuous air supply channel is opened inside, with one end sealed to the air supply unit and the other end sealed to the filtration unit. Each air supply channel is equipped with an independent airflow adjustment mechanism, and the filtration unit is fixed by a mounting structure integrated into the top shelf of the process cavity. This invention achieves integrated load-bearing and air supply, eliminates independent pipelines, reduces airflow pressure loss, increases the effective cavity volume, reduces leakage risk, allows for precise adjustment of the airflow in each cavity, ensures uniform and stable airflow, and improves the quality and yield of wafer coating and developing.
Owner:HEFEI KAIYUE SEMICON TECH CO LTD