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Z-direction magnetic field sensor with magnetic orbit structure

A z-direction magnetic field sensor with a magnetic orbit structure comprises a basement, two pairs of input electrodes and output electrodes, two pairs of giant magneto resistive (GMR) sensitive elements and GMR reference elements and an accumulator of magnetic line of force arranged in a symmetrical mode. The two pairs of the input electrodes and the output electrodes are plated on the surface of the basement, and each pair of the GMR sensitive element and the GMR reference element and each pair of the input electrode and the output electrode form a Wheatstone bridge. A first pit and a second pit are arranged on the basement in a symmetrical mode, the Wheatstone bridge is arranged between the first pit and the second pit, edges of the inner planes of the first pit and the second pit and slopes of the first pit and the second pit and the pits are all provided with soft magnetic films in a plating mode to form an inner accumulator of the pit, the slope accumulator of the pit, and the edge accumulator of the pit in sequence, due to the fact that a central accumulator is arranged in the middle area between the first pit and the second pit, the accumulator of the magnetic line of force is formed. The z-direction magnetic field sensor with the magnetic orbit structure has the advantages of being simple and compact in structure, small in size, low in cost, convenient to manufacture, and high in resolution capability and the like.
Owner:NAT UNIV OF DEFENSE TECH
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