Multi-stirring-shaft vacuum vapor deposition furnace special for powder

A multi-stirring, air-phase technology, applied in pressure vessels/vacuum vessels, gaseous chemical plating, pressure vessels used in chemical processes, etc., can solve the problem of low efficiency, insufficient contact with the converter, and low vacuum degree of the fluidized fluidized furnace, which is difficult to meet product quality Demand and other issues, to achieve the effect of easy operation, firm bonding, and quick response

Active Publication Date: 2021-07-16
株洲弗拉德科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the efficiency of the converter is low due to insufficient contact between the gas and the powder; the fluidized fluidized furnace cannot meet the product quality requirements due to the low degree of vacuum

Method used

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  • Multi-stirring-shaft vacuum vapor deposition furnace special for powder
  • Multi-stirring-shaft vacuum vapor deposition furnace special for powder

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] Such as figure 1 As shown, a multi-shaft vacuum vapor deposition furnace dedicated to powder includes a heating furnace body, a cooling furnace body 8, a load cell 9, and a vacuum channel and an exhaust channel 4 arranged on the furnace cover 11 of the heating furnace body. , upper electrode 5, feed pipe 6, temperature measuring component 7, including furnace body 1 and furnace cover 11. The heating furnace body is connected with the cooling furnace body 8 through a discharge pipe 104 .

[0037] Such as figure 1 As shown, the furnace shaft 1 is a container, and this embodiment is a trough-shaped container welded by a U-shaped trough and two end plates. Such as figure 2As shown, the heating furnace body is provided with a low-speed stirring shaft 101 and a high-speed stirring shaft 1011, both of which run through the end plates at both ends of the U-shaped groove and are connected with the driving devices 107 and 108 outside the end plates. A partition 105 and a par...

Embodiment 2

[0051] The difference between this embodiment and Embodiment 1 is that the heating element is electromagnetic heating, the outer side of the U-shaped groove housing is provided with an insulating layer, and the outer side of the insulating layer is provided with an electromagnetic induction heating device.

Embodiment 3

[0053] The difference between this embodiment and Embodiment 1 is that the upper electrode is arranged on the upper end of the furnace body, and the upper electrode plate is arranged corresponding to the upper and lower sides of the high-speed stirring shaft to form the working area of ​​the upper and lower electrodes.

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PUM

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Abstract

The invention provides a multi-stirring-shaft vacuum vapor deposition furnace special for powder. The vacuum vapor deposition furnace comprises a heating furnace body, a cooling furnace body, a weighing sensor, a vacuum channel, an upper electrode, a feeding pipe and a temperature measuring component; and a high-speed stirring shaft and a low-speed stirring shaft are arranged in the heating furnace body. The upper electrode and the high-speed stirring shaft are respectively connected with two output electrodes of a radio-frequency power supply or/and two output electrodes of a direct-current power supply. The vacuum vapor deposition process of a powder material is implemented by combined use of controlled air pressure, atmosphere, electric field, magnetic field and heating modes of each part.

Description

technical field [0001] The invention relates to the technical field of powder heat treatment, and more specifically, relates to a vacuum vapor deposition furnace with multi-stirring shafts for powder. Background technique [0002] The existing technology is relatively mature for surface vapor deposition of product materials, but the surface vapor deposition technology of powder materials needs to be improved. With the continuous advancement of science and technology, some high-end powder materials need to be uniformly and firmly deposited or coated on the surface of substrate particles A layer of nanomaterials. [0003] The existing powder vapor deposition technology generally adopts converter or fluidized fluidized furnace. However, the efficiency of the converter is low due to insufficient contact between the gas and the powder; the fluidized fluidized furnace cannot meet the product quality requirements due to the low degree of vacuum. Contents of the invention [000...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/505C23C16/24B01J3/03B01J4/00B01J19/00B01J19/20B82Y30/00B82Y40/00
CPCC23C16/505C23C16/24B01J19/20B01J3/03B01J4/001B01J4/008B01J19/0053B82Y30/00B82Y40/00Y02P10/25
Inventor 言伟雄
Owner 株洲弗拉德科技有限公司
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