72 results about "Vacuum flange" patented technology

The utility model discloses an automatic vacuum degree regulating system for high-vacuum coating equipment, which comprises a vacuum cavity, an automatic vacuum regulating valve, a high-vacuum gate valve and a high-vacuum molecular pump, the high-vacuum molecular pump is fixed with the high-vacuum gate valve, the high-vacuum gate valve is fixed with the automatic vacuum regulating valve through a vacuum flange, and the high-vacuum molecular pump is fixed with the automatic vacuum regulating valve through a vacuum flange. The vacuum automatic regulating valve is connected with the vacuum cavity; and the flow fine adjustment assembly is composed of a plurality of sets of flow components and a driving component, and the multiple sets of flow components are symmetrically arranged on the vacuum automatic adjusting valve. According to the high-vacuum molecular pump, through the design of the automatic vacuum regulating valve, the opening and closing angle of the regulating baffle inside the regulating valve body is regulated, so that the pumping speed of the high-vacuum molecular pump is reduced, the vacuum degree is accurately controlled, and meanwhile, through the design of the flow fine-tuning assembly, the automatic vacuum regulating valve can be assisted; and the precise control of the vacuum degree is further improved.

The invention relates to the technical field of vacuum cavity machining, in particular to a thin-wall vacuum chamber machining method and an arc-shaped forked thin-wall vacuum chamber. The thin-wall vacuum chamber machining method comprises the steps that a thin-wall pipe is machined; the thin-walled pipe is fixed to the mold; the thin-walled tube is subjected to empty burning treatment and then put into a vacuum brazing furnace to be subjected to vacuum brazing; and the thin-walled pipe and the ultrahigh vacuum flange are installed and welded. The arc-shaped forked thin-wall vacuum chamber comprises a vacuum chamber main body, the vacuum chamber main body comprises a first vacuum chamber forming a part of the vacuum chamber main body in the length direction, and the head end of the first vacuum chamber serves as one end of the vacuum chamber main body and is provided with one ultrahigh vacuum flange; the second vacuum chamber and the third vacuum chamber are respectively connected to the tail end of the first vacuum chamber, the second vacuum chamber and the third vacuum chamber jointly form the rest part of the vacuum chamber main body in the length direction, and the tail end of the second vacuum chamber and the tail end of the third vacuum chamber are jointly provided with another ultrahigh vacuum flange.

The invention relates to a movable vacuum transfer cavity based on linear sliding rail positioning and a using method, the movable vacuum transfer cavity comprises an ultrahigh vacuum multi-way cavity body, the cavity body is provided with a plurality of through holes, each through hole is provided with a vacuum flange, and the through hole above the ultrahigh vacuum multi-way cavity body is connected with a storage table sample transfer rod; a sample target sample transfer rod is connected to a horizontal front through hole of the ultrahigh vacuum multi-way cavity, the ultrahigh vacuum multi-way cavity is integrated in a regular-shaped accommodating box body, and at least one-dimensional sliding module in the direction of the sample target sample transfer rod in a working state is arranged at the bottom of the accommodating box body. Through the cooperation of the linear slide rail and the magnetic slide block, the movement of the sample transfer rod can be completed through one-hand operation, and the complexity of multi-step coordination is reduced. The containing box body is combined with the supporting section bar support through the linear sliding rail and can flexibly move and be fixed in the experiment platform. Meanwhile, under the working state and the non-working state, installation and fixation can be achieved, and neatness and neatness in arrangement and arrangement after experiments can be achieved.

This utility model relates to a sliding-rail type tubular Joule furnace, including a furnace box, a tube cavity, a three-way bracket, a sample stage, an infrared temperature probe, and a data control system. The furnace box houses a power supply control system; vacuum flange two and vacuum flange one are respectively installed at the left and right ends of the tube cavity. The design, where two power output wires are connected to the sample stage via vacuum electrodes without passing through the right side of the tube cavity, allows the tube cavity to slide freely left and right as needed, maximizing the exposure of the sample stage and facilitating sample installation and replacement. The tube cavity is constructed from commonly used tube furnace materials such as quartz tubes, corundum tubes, and composite structures, allowing for quick and low-cost replacement as needed while ensuring system sealing. Employing a flange structure common in tube furnaces, with pre-installed inlet and outlet ports, it facilitates various operations such as heating, gas collection, and distillation without requiring additional devices.

The application discloses a strip type NEG (Non Evaporable Getter) pump for a particle accelerator and a use method thereof. The pump comprises a getter assembly, a fixing part, a vacuum flange and an electrode. One end of the getter assembly is provided with the fixing part, the fixing part is fixedly connected with one side of the vacuum flange, the other side of the vacuum flange is provided with the electrode, and the getter assembly is electrically connected with the electrode. The getter assembly comprises two or more getter strips, each getter strip is arranged side by side and fixedly connected with the fixing part at one end, and a gap is reserved between two adjacent getter strips. The use method is that the strip type NEG pump is inserted into a vacuum chamber along the axial direction of the vacuum chamber and then fixedly installed, each getter strip is parallel to the axis of the vacuum chamber, the vacuum flange is fixedly installed with the side wall of the vacuum chamber, and the electrode is externally connected with a power supply device. The application can effectively improve the uniformity of vacuum distribution, maintain a high vacuum degree, avoid misfiring of a beam, has a simple structure, is convenient to install, and can be adapted to the installation requirements of the accelerator vacuum chamber in a large range.

The utility model discloses a chemical vapor deposition device. The chemical vapor deposition device comprises a high-temperature furnace, a sample tube, a vacuum flange, a lead electrode flange, an electrode and an electrode bracket, the high-temperature furnace is provided with a cavity for accommodating a sample tube; the sample tube is provided with a cavity for accommodating a sample; two ends of the sample tube are respectively sealed by a vacuum flange and a lead electrode flange; a connector connected with a power supply is arranged on the outer side of the lead electrode flange; the electrode is mounted on the electrode bracket; the electrode bracket is arranged in the sample tube and is connected with the joint through a lead; during use, the connector of the lead electrode flange is connected with a power supply, so that the electrode generates an electric field in the sample tube. An electric field is introduced into the sample tube, distribution and migration of gaseous reactants in a reaction area can be effectively regulated and controlled, the deposition process is optimized, and the material performance and the preparation efficiency are improved; in addition, the chemical vapor deposition device is simple and convenient in structure, convenient to operate, good in compatibility and suitable for chemical vapor deposition preparation and scientific research of various materials.

The invention discloses a continuous cleavage knife which comprises a rotary feed-in mechanism arranged on the outer side of an ultrahigh vacuum flange, the rotary feed-in mechanism comprises a plurality of rotary feed-in pieces, and each rotary feed-in piece penetrates through the ultrahigh vacuum flange and then is connected with a cutting mechanism, a stacking structure and a bearing mechanism in the ultrahigh vacuum flange; the cutting mechanism comprises a front cutter assembly, a middle cutter assembly and a rear cutter assembly which are arranged in sequence, the rear cutter assembly is used for clamping a wafer to be cleaved and driving the wafer to move, the middle cutter assembly is used for positioning the wafer, and the front cutter assembly is used for cleaving the wafer into Bar strips with preset sizes; the stacking structure is located between the front cutter assembly and the bearing mechanism and used for collecting the Bar strips and transferring the Bar strips to the bearing mechanism. And the bearing mechanism is used for caching Bars so as to realize continuous cleavage of the wafer. The device has the advantages of being compact in structure, easy to operate, stable in operation, beneficial to improving the wafer cleavage efficiency and the like.

The utility model provides a pressing sleeve type water-cooling loop vacuum flange for a vacuum high-temperature furnace, and belongs to the technical field of vacuum flanges. The problems that a sealing ring is damaged due to high-temperature gas of an existing loop vacuum flange and a steel ring is deformed and lost when the steel ring is used for positioning are solved. Comprising a lap joint flange pipe, a step water-cooling flange, a step lap joint flange, a fixed flange and a fixed flange pipe, the step water-cooling flange is welded to the lap joint flange pipe, the step lap joint flange is arranged in the lap joint flange pipe in a sleeved mode, and the step lap joint flange and the step water-cooling flange are positioned through a step; a fixed flange is welded on the fixed flange pipe, and the top surface of the fixed flange is hermetically connected with the bottom surface of the step water-cooling flange; the utility model is applied to the vacuum high-temperature furnace.

According to various embodiments, a vacuum assembly comprises: a first vacuum flange (102) and a second vacuum flange (112), which are designed to be vacuum-tightly joined together along a coupling direction (101); a fluid coupling having a fluid coupling plug (106) coupled to the first vacuum flange (102) and a fluid coupling socket (116) coupled to the second vacuum flange (112), said fluid coupling socket (116) having a recess (116v), which tapers in the coupling direction (101), for receiving the fluid coupling plug (106); and one or more fluid connections, a first fluid connection (206) of which is fluid-conductively coupled to the recess (116v) for example and / or a second fluid connection (216) of which is fluid-conductively coupled to the fluid coupling plug (106) for example.

The utility model belongs to the technical field of semiconductor process, and particularly relates to a vacuum furnace door for semiconductor process equipment, which comprises a furnace door body, the furnace door body is connected with a quartz tube through a vacuum flange, one side of the furnace door body far away from the quartz tube is connected with one end of a corrugated pipe, and the other end of the corrugated pipe is connected with a fixing plate. A fixing plate is arranged on the furnace door body, a pressing screw rod is installed on the fixing plate, and the fixing plate moves towards the direction close to the furnace door to enable the pressing screw rod to abut against the furnace door body. The corrugated pipe is arranged, and the fixing plate moves towards the direction close to the quartz tube, so that the furnace door body is driven to make contact with a vacuum flange on the quartz tube; and the furnace door body continuously and slowly moves towards the quartz tube, the corrugated pipe is compressed until the pressing screw presses the furnace door body, and the corrugated pipe also applies pressure towards the quartz tube to the furnace door body at the moment, so that the sealing performance between the quartz tube and the furnace door body is further improved.

The present application relates to the technical field of vacuum chamber processing, and particularly relates to a thin-wall vacuum chamber processing method and an arc-shaped bifurcated thin-wall vacuum chamber. The thin-wall vacuum chamber processing method comprises the following steps: processing and treating a thin-wall pipe; fixing the thin-wall pipe and a mold; firstly performing air burning treatment on the thin-wall pipe, and then placing the thin-wall pipe into a vacuum brazing furnace to perform vacuum brazing; and assembling and welding the thin-wall pipe and an ultrahigh vacuum flange. The arc-shaped bifurcated thin-wall vacuum chamber comprises a vacuum chamber main body, and the vacuum chamber main body comprises: a first vacuum chamber, which constitutes a part of the length direction of the vacuum chamber main body, and the first end of the first vacuum chamber is used as one end of the vacuum chamber main body and is provided with one ultrahigh vacuum flange; a second vacuum chamber and a third vacuum chamber, which are connected to the end of the first vacuum chamber, and the second vacuum chamber and the third vacuum chamber jointly constitute the remaining part of the length direction of the vacuum chamber main body, and the ends of the second vacuum chamber and the third vacuum chamber are jointly provided with another ultrahigh vacuum flange.

The utility model relates to the technical field of tuning agent sampling devices, in particular to a tuning agent sampling device with a flow control function, which comprises an electromagnetic valve, a sample valve seat is fixedly connected to the bottom of the electromagnetic valve, a micro-flow regulating valve for regulating flow is arranged on one side of the sample valve seat, and the sample valve seat is fixedly connected with a vacuum flange. A micro-flow regulating valve sample inlet pipe and a micro-flow regulating valve sample outlet pipe are arranged on the sample valve seat, a compression nut is arranged in the sample valve seat, a capillary tube is connected to the lower end of the compression nut, a connector is arranged at the lower end of the capillary tube, and a reagent bottle used for containing a tuning agent is arranged at the lower end of the connector. The micro-flow regulating valve is added before the sample outlet pipe enters the ion source cavity, and the micro-flow control unit is introduced, so that the flow of the tuning agent is more stable and accurate, the correct mass distribution of the tuning agent is ensured, the flow difference is reduced, the stability of the response intensity of a mass spectrum tuning signal is improved, the structure is simple, and the regulation is convenient.

To provide a test system for a camera, a mask inspection system, and a method for testing a camera, which are able to be used to estimate the longevity of cameras in a photomask inspection system.SOLUTION: A test system for a camera comprises a camera (23) and a first capture plate (101). The camera (23) comprises a camera housing (25) and a vacuum flange (31) formed on the camera housing (25). The vacuum flange (31) is adapted for attaching the camera (23) to a vacuum chamber (41). The camera housing (25) supports an image sensor (24). The image sensor (24) comprises an image sensor surface layer (28). The first capture plate (101) comprises a first capture plate surface layer (102). The first capture plate surface layer (102) corresponds to the image sensor surface layer (28). The invention also relates to a mask inspection system and to a method for testing a camera, in particular, an extreme ultraviolet (EUV) camera.SELECTED DRAWING: Figure 3

This invention provides an in-situ heating and electrical testing apparatus and method for scanning electron microscopy (SEM). The apparatus includes a T-shaped sample stage, an in-situ heating and electrical testing chip, a probe card, wires, a vacuum flange with a BNC interface, a signal source meter, pins, and fixing studs. The in-situ heating and electrical testing chip is placed on the T-shaped sample. The probe card presses into contact with the heating and testing electrodes on the in-situ heating and electrical testing chip and leads out wires, simultaneously fixing the chip. The fixing studs secure the probe card to the T-shaped sample stage. The vacuum flange with the BNC interface connects the probe card and the signal source meter via wires. This invention provides in-situ heating, electrical testing, and microstructure observation functions for SEM, offering advantages such as rapid heating and cooling, low thermal drift, and low electromagnetic interference. It provides a platform for testing the performance of micro and nanomaterials and an experimental platform for preliminary screening of transmission electron microscopy (TEM) samples.

The present invention discloses an alkali metal Rydberg atom generation and detection device, comprising a beam source chamber and an action chamber, the two of which are connected via a vacuum flange; the beam source chamber comprises a sputtering laser for producing an alkali metal ultrasonic atomic beam, an alkali metal solid target, a high-pressure gas nozzle, and a conical colander; the action chamber comprises an excitation light, a repulsive electric field plate, a deceleration electric field plate, a grid, and a detector, with through holes left between the repulsive electric field plate and the grid for the atomic beam to pass through. The present invention, by combining ultrasonic atomic beams, laser sputtering, and gradient electric field deceleration technology, can generate a cold, concentrated alkali metal Rydberg atom beam, and by applying a pulsed voltage, achieves intermittent detection, i.e., detection is performed only within the time range of the ion collision detector. This can effectively overcome the shortcomings of excessively high alkali metal gas temperature caused by atomic furnace heating and the noise impact caused by continuous pressurized detection.

The present application belongs to the technical field of optical glass vacuum chamber, and relates to a non-magnetic vacuum flange connecting piece and a manufacturing method. A sapphire glass piece with holes is used to connect between a non-magnetic metal CF flange and a hollow quartz glass round tube, the metal CF flange and the sapphire glass piece are welded together through a vacuum brazing process, the sapphire glass piece and the hollow quartz glass round tube are connected together through a photo-cementing method, and then a deep photo-cementing process is used to make the connection of the two after photo-cementing more firm, almost becoming an integral whole, thus forming a vacuum seal. Since the sapphire glass piece and the metal flange are connected and sealed through a vacuum brazing process, they have good high-temperature resistance, and the maximum baking temperature can reach 450 DEG C. After the other end of the connecting piece glass tube is deep photo-cemented with a processed vacuum glass chamber and then connected to a vacuum pumping device through the CF flange, an ultrahigh vacuum glass chamber can be made for cold atom vacuum experiments.

According to various embodiments, a vacuum arrangement comprises: a first vacuum flange (102) and a second vacuum flange (112), which are arranged to be brought into a vacuum-tight joined state along a coupling direction (101); a fluid coupling, which has a fluid coupling plug (106) coupled to the first vacuum flange (102) and a fluid coupling socket (116) coupled to the second vacuum flange (112); wherein the fluid coupling socket (116) has a recess (116v) tapering in the coupling direction (101) for receiving the fluid coupling plug (106); one or more than one fluid connection, of which a first fluid connection (206) is fluidly coupled to the recess (116v) and / or of which a second fluid connection (216) is fluidly coupled to the fluid coupling plug (106).

The utility model relates to the technical field of firefighting pipelines, in particular to a firefighting pipeline convenient to connect, which comprises a main body, and a connecting component, a valve component and a flow detection component are arranged in the main body. According to the kf vacuum flange clamping hoop composed of the first flange, the second flange, the first quick clamp, the second quick clamp, the sealing ring and the center positioning ring, connection can be loosened or compressed only by simply screwing the butterfly nut with hands, so that pipe body connection is kept in a sealed vacuum state, pipelines or pipe fittings with different diameters or materials can be connected, and the connecting structure is simple and convenient to use. The sealing device can provide highly reliable sealing performance, can be used under the conditions of high pressure and high vacuum, is easy to mount and dismount, and has the advantages of good sealing performance, convenience in mounting, wide application range and the like.

The invention discloses an ultrahigh vacuum optical fiber feed-through integrated with a light beam focusing function, which comprises a vacuum flange plate, a lens mounting cylinder and an optical fiber head mounting seat, and is characterized in that a light beam is guided into an ultrahigh vacuum cavity through an optical fiber, and is directly input through an optical fiber slot on the flange plate, so that the stability of an optical path can be well guaranteed; meanwhile, great convenience is brought to equipment movement; in addition, the required laser beam enters the cavity through the optical fiber port, so that excessive light exposure windows do not exist, and the background brought by spatial light can be greatly reduced. A collimating lens group is further arranged in the optical fiber head mounting seat, a focusing lens is arranged in the lens mounting barrel, a position adjusting mechanism is further arranged, and the diameter of a light spot can be changed by adjusting the distance between the collimating lens group and the focusing lens.

The invention relates to a device and method for researching microstructure evolution of a metal material under an electrothermal magnetic coupling field, the device comprises a vacuum chamber, a telescopic rod, a vacuum flange, a sample rod, an insulation connecting piece and a sample table, the sample rod is connected with the sample table through the insulation connecting piece, and the telescopic rod can be operated to move and send a sample; a magnetic field loading module formed by a superconducting magnet, a sample table integrated thermal field loading module and an electric field loading module with a clamping column and a binding post are arranged in the cavity, a ceramic insulating layer is arranged between the heating resistor element and the sample placing table to prevent current interference, and a sample is connected with the sample placing table through the clamping column; the measurement method comprises the following steps: preparing a sample by combining electrolytic polishing with three-step argon ion polishing, and pre-performing EBSD detection to obtain an initial grain size and a KAM value; a sample is placed in the device, single-field, double-field (electric heating / electromagnetic / thermomagnetic) or three-field coupling treatment is achieved, EBSD detection is conducted again after cooling, the geometric necessary dislocation density is calculated, and the device has the advantages of being reasonable in structure, convenient to operate, practical and efficient.

The utility model discloses a vacuum-pumping flange assembly and a mechanical equipment testing device, the vacuum-pumping flange assembly comprises a shell and a flange plate, the wall surface of the shell is provided with a plurality of vacuum interfaces, any vacuum interface penetrates through the wall surface of the shell, at least one vacuum interface is used for connecting a vacuum-pumping pump, the bottom wall of the shell is provided with an opening, and the opening is communicated with the vacuum-pumping pump. The flange plate is connected with the bottom wall of the shell, provided with a communicating port communicating with the opening and used for being connected with mechanical equipment. By arranging the plurality of vacuum interfaces, the number of the vacuumizing pumps connected with the shell can be adjusted, so that the force of the vacuumizing operation in a test is controlled, the number of the vacuumizing pumps is adjusted in time according to the vacuumizing degree of a test site, the reworking condition caused by insufficient vacuum degree during the test is prevented, the accuracy of the vacuumizing operation is improved, and the working efficiency is improved. And the test efficiency is improved. The vacuumizing flange assembly has universality and can be repeatedly used, and the test cost is saved.

According to the GIS electric field partial discharge fusion sensing device and method, in the device, the first end of a fluorescent optical fiber is embedded and fixed to the inner side of a flange plate and exposed to the internal environment of a GIS cavity so as to receive ultraviolet light and / or visible light signals generated by partial discharge; the second end is connected to the input end of the photomultiplier through a vacuum flange; the first end of the electric field optical fiber probe is fixed to the center of the flange plate and exposed in the internal environment of the GIS cavity, and the second end of the electric field optical fiber probe is connected to the input end of the photoelectric detector through the vacuum flange. The electric field optical fiber probe converts the electric field change in the GIS cavity into a modulation optical signal of the change of the refractive index of the optical signal based on the electro-optical effect; the photomultiplier is used for receiving an optical signal from the fluorescent optical fiber, amplifying the optical signal and converting the optical signal into a partial discharge pulse electric signal; and the photoelectric detector is used for receiving the modulation optical signal from the electric field optical fiber probe and demodulating the modulation optical signal into an electric field change electric signal.

A test system for a camera, comprising a camera and a first capture plate. The camera comprises a camera housing and a vacuum flange formed on the camera housing. The vacuum flange is adapted for attaching the camera to a vacuum chamber. The camera housing supports an image sensor. The image sensor comprises an image sensor surface layer. The first capture plate comprises a first capture plate surface layer. The first capture plate surface layer corresponds to the image sensor surface layer. The invention also relates to a mask inspection system and to a method for testing a camera, in particular, an EUV camera.

The present invention relates to a vacuum flange device for a strong radiation area, which comprises: a split all-metal vacuum flange structure, which includes an inner ring flange, an outer ring flange, a fixed flange and a corrugated pipe structure; the inner ring flange is movably connected to the inner side of the outer ring flange, and the outer ring flange is connected to one end of the fixed flange through the corrugated pipe structure; the other end of the fixed flange is connected to the target chamber; a vacuum beam pipeline flange, one end of which is connected to the vacuum beam pipeline, and the other end of which is connected to the inner ring flange and the outer ring flange together to form a vacuum sealing flange pair. The present invention solves the connection problem between the target chamber and the vacuum beam pipeline under high vacuum; and solves the key problem of remote maintenance of the target chamber equipment when the equipment needs to be maintained; it can be applied in the field of heavy ion accelerator radioactive engineering technology.

The present application provides a kind of vacuum flange structure, it includes flange pedestal, weak electric signal connector and cover plate, three are sequentially connected, wherein, weak electric signal connector includes PCB circuit board, and the isolation sealing of input and output end is realized by the space stagger of signal input and output end and groove sealing technology;At the same time, the voltage equalizing hole technology is used on the PCB structure of signal connector, the force problem of signal connection contact is solved, the tolerance accuracy of signal contact is guaranteed by combining mature PCB manufacturing process, and the wiring problem of high-density contact is solved.The device has the technical characteristics of simple structure, mature technology, stable and reliable signal connection, etc., and can be widely used in the internal and external structure signal communication measurement process of vacuum closed environment, has very high engineering practical value.

The invention relates to the technical field of metal film vacuum gauges, and provides a high-elasticity anti-fatigue capacitive metal film vacuum gauge which comprises a vacuum flange, a shell and a hollow block, a chromium-nickel alloy base layer, a gold plating layer and a ceramic substrate are arranged in the shell, the chromium-nickel alloy base layer is located above the gold plating layer, and the ceramic substrate is located above the gold plating layer. According to the embodiment of the invention, the hollow block is mounted on the inner wall of a detection position through the screw, then the mounting block is embedded into the hollow block, the hollow block is mounted on the inner wall of the detection position through the screw, the mounting block is mounted on the inner wall of the detection position through the screw, and the ceramic substrate is mounted on the mounting block. And then the round block is attached to the outer surface of the hollow block under elastic force limiting of a second spring, the upper surface of the clamping strip is in an arc shape, when the installation block moves downwards in the hollow block and then moves on the outer surface of the clamping strip, the clamping strip slides to the square groove and is embedded into the square groove under limiting of the second spring, and the installation block is installed in a limited mode.

The utility model discloses a manual matcher structure for a cathode of a radio frequency ion source, belongs to the technical field of vacuum coating, and aims to provide the manual matcher structure for the cathode of the radio frequency ion source, so as to solve the problem that a traditional automatic matcher for the cathode of the radio frequency ion source is high in manufacturing cost, so that the manufacturing cost of the radio frequency ion source is too high. The device comprises a shell, an air adjustable capacitor bank is installed in the shell, the air adjustable capacitor bank comprises four adjustable capacitors, and a manual adjusting knob is connected with rotating rods of the adjustable capacitors. One end of the shell is provided with an electrical input base, the electrical input base is provided with a direct current power supply input socket, an argon input clamping sleeve joint and a radio frequency power supply lead-in socket, the shell is internally provided with an impedance pulsation switching assembly, and one end, far away from the electrical input base, of the shell is provided with a vacuum flange assembly. An argon penetrating capillary tube is further arranged in the shell. The utility model is suitable for the manual matcher structure for the cathode of the radio frequency ion source.

The utility model discloses a static CT scanning device based on a modularized X-ray emitter, which comprises a plurality of X-ray emitter modules, each X-ray emitter comprises a vacuum tube, a plurality of X-ray sources are arranged in the vacuum tube, the top of the vacuum tube is respectively provided with a controller and a turbo pump vacuum flange, and the controller is connected with the turbo pump vacuum flange. The plurality of X-ray emitter modules are distributed and combined in an annular array, an annular detector is arranged on the inner sides of the plurality of X-ray emitter modules, a getter box is arranged on the inner side of the vacuum tube, and a flat panel detector is arranged on the inner sides of the plurality of X-ray emitter modules. And the plurality of X-ray emitter modules are coupled with the adjacent annular detectors or flat panel detectors. Compared with a traditional CT system, a sliding ring, a rotating rack and a pipe cooling system are not needed, the CT system is lighter and cheaper, a single target does not need to be rotated for cooling, and therefore the complexity and maintenance problems caused by physical rotation are avoided.

The utility model discloses an ultrahigh vacuum flange sealing type assembly which comprises a first flange plate and a second flange plate, a first pipeline is fixedly installed on one side of the first flange plate, a second pipeline is fixedly installed on one side of the second flange plate, and a rubber ring is arranged between the first flange plate and the second flange plate. First sealing rings are arranged on the outer sides between the rubber ring and the first flange plate and between the rubber ring and the second flange plate, the first sealing rings are fixedly connected with the rubber ring, a liquid cavity is formed in the rubber ring, rigid foam material liquid is arranged in the liquid cavity, and outer side baffle rings are fixedly installed on the two sides of the rubber ring along the outer side of the liquid cavity; and inner side baffle rings are fixedly mounted on the two sides of the rubber ring along the inner side of the liquid cavity. According to the flange sealing assembly, the stable sealing effect of the flange is achieved, the sealing stability is improved, and therefore the problem that in the long-time using process of a traditional flange sealing assembly, the sealing performance is reduced due to the aging phenomenon of a sealing material is solved.

The utility model discloses a high-strength detachable vacuum flange which comprises a first flange connector and a second flange connector, a first flange plate is arranged at one end of the first flange connector, and the first flange plate and the second flange plate are correspondingly connected through bolts. A reinforcing rib plate is arranged at the joint of the first flange plate and the first flange connector, sealing chucks are arranged in the first flange connector and the second flange connector, and fixing shaft discs are connected to the surfaces of the front ends of the sealing chucks in a sealed mode through locking bolts. The two flange connectors can be quickly aligned, mounted and fixed through the flange structure convenient to assemble, meanwhile, the reinforcing rib plates are arranged to enhance the mounting firmness and stability of the exterior of the flange structure, the structural strength of the flange structure is further improved, components in the ends of the flange assembly are subjected to quick-release design protection, and the service life of the flange assembly is prolonged. The connecting structure has the advantages of convenience and quickness in assembly and disassembly and tightness and stability in connection.