56 results about "Vacuum flange" patented technology

The utility model discloses an automatic vacuum degree regulating system for high-vacuum coating equipment, which comprises a vacuum cavity, an automatic vacuum regulating valve, a high-vacuum gate valve and a high-vacuum molecular pump, the high-vacuum molecular pump is fixed with the high-vacuum gate valve, the high-vacuum gate valve is fixed with the automatic vacuum regulating valve through a vacuum flange, and the high-vacuum molecular pump is fixed with the automatic vacuum regulating valve through a vacuum flange. The vacuum automatic regulating valve is connected with the vacuum cavity; and the flow fine adjustment assembly is composed of a plurality of sets of flow components and a driving component, and the multiple sets of flow components are symmetrically arranged on the vacuum automatic adjusting valve. According to the high-vacuum molecular pump, through the design of the automatic vacuum regulating valve, the opening and closing angle of the regulating baffle inside the regulating valve body is regulated, so that the pumping speed of the high-vacuum molecular pump is reduced, the vacuum degree is accurately controlled, and meanwhile, through the design of the flow fine-tuning assembly, the automatic vacuum regulating valve can be assisted; and the precise control of the vacuum degree is further improved.

This utility model relates to a sliding-rail type tubular Joule furnace, including a furnace box, a tube cavity, a three-way bracket, a sample stage, an infrared temperature probe, and a data control system. The furnace box houses a power supply control system; vacuum flange two and vacuum flange one are respectively installed at the left and right ends of the tube cavity. The design, where two power output wires are connected to the sample stage via vacuum electrodes without passing through the right side of the tube cavity, allows the tube cavity to slide freely left and right as needed, maximizing the exposure of the sample stage and facilitating sample installation and replacement. The tube cavity is constructed from commonly used tube furnace materials such as quartz tubes, corundum tubes, and composite structures, allowing for quick and low-cost replacement as needed while ensuring system sealing. Employing a flange structure common in tube furnaces, with pre-installed inlet and outlet ports, it facilitates various operations such as heating, gas collection, and distillation without requiring additional devices.

The application discloses a strip type NEG (Non Evaporable Getter) pump for a particle accelerator and a use method thereof. The pump comprises a getter assembly, a fixing part, a vacuum flange and an electrode. One end of the getter assembly is provided with the fixing part, the fixing part is fixedly connected with one side of the vacuum flange, the other side of the vacuum flange is provided with the electrode, and the getter assembly is electrically connected with the electrode. The getter assembly comprises two or more getter strips, each getter strip is arranged side by side and fixedly connected with the fixing part at one end, and a gap is reserved between two adjacent getter strips. The use method is that the strip type NEG pump is inserted into a vacuum chamber along the axial direction of the vacuum chamber and then fixedly installed, each getter strip is parallel to the axis of the vacuum chamber, the vacuum flange is fixedly installed with the side wall of the vacuum chamber, and the electrode is externally connected with a power supply device. The application can effectively improve the uniformity of vacuum distribution, maintain a high vacuum degree, avoid misfiring of a beam, has a simple structure, is convenient to install, and can be adapted to the installation requirements of the accelerator vacuum chamber in a large range.

The utility model discloses a chemical vapor deposition device. The chemical vapor deposition device comprises a high-temperature furnace, a sample tube, a vacuum flange, a lead electrode flange, an electrode and an electrode bracket, the high-temperature furnace is provided with a cavity for accommodating a sample tube; the sample tube is provided with a cavity for accommodating a sample; two ends of the sample tube are respectively sealed by a vacuum flange and a lead electrode flange; a connector connected with a power supply is arranged on the outer side of the lead electrode flange; the electrode is mounted on the electrode bracket; the electrode bracket is arranged in the sample tube and is connected with the joint through a lead; during use, the connector of the lead electrode flange is connected with a power supply, so that the electrode generates an electric field in the sample tube. An electric field is introduced into the sample tube, distribution and migration of gaseous reactants in a reaction area can be effectively regulated and controlled, the deposition process is optimized, and the material performance and the preparation efficiency are improved; in addition, the chemical vapor deposition device is simple and convenient in structure, convenient to operate, good in compatibility and suitable for chemical vapor deposition preparation and scientific research of various materials.

The utility model provides a pressing sleeve type water-cooling loop vacuum flange for a vacuum high-temperature furnace, and belongs to the technical field of vacuum flanges. The problems that a sealing ring is damaged due to high-temperature gas of an existing loop vacuum flange and a steel ring is deformed and lost when the steel ring is used for positioning are solved. Comprising a lap joint flange pipe, a step water-cooling flange, a step lap joint flange, a fixed flange and a fixed flange pipe, the step water-cooling flange is welded to the lap joint flange pipe, the step lap joint flange is arranged in the lap joint flange pipe in a sleeved mode, and the step lap joint flange and the step water-cooling flange are positioned through a step; a fixed flange is welded on the fixed flange pipe, and the top surface of the fixed flange is hermetically connected with the bottom surface of the step water-cooling flange; the utility model is applied to the vacuum high-temperature furnace.

According to various embodiments, a vacuum assembly comprises: a first vacuum flange (102) and a second vacuum flange (112), which are designed to be vacuum-tightly joined together along a coupling direction (101); a fluid coupling having a fluid coupling plug (106) coupled to the first vacuum flange (102) and a fluid coupling socket (116) coupled to the second vacuum flange (112), said fluid coupling socket (116) having a recess (116v), which tapers in the coupling direction (101), for receiving the fluid coupling plug (106); and one or more fluid connections, a first fluid connection (206) of which is fluid-conductively coupled to the recess (116v) for example and / or a second fluid connection (216) of which is fluid-conductively coupled to the fluid coupling plug (106) for example.

The utility model belongs to the technical field of semiconductor process, and particularly relates to a vacuum furnace door for semiconductor process equipment, which comprises a furnace door body, the furnace door body is connected with a quartz tube through a vacuum flange, one side of the furnace door body far away from the quartz tube is connected with one end of a corrugated pipe, and the other end of the corrugated pipe is connected with a fixing plate. A fixing plate is arranged on the furnace door body, a pressing screw rod is installed on the fixing plate, and the fixing plate moves towards the direction close to the furnace door to enable the pressing screw rod to abut against the furnace door body. The corrugated pipe is arranged, and the fixing plate moves towards the direction close to the quartz tube, so that the furnace door body is driven to make contact with a vacuum flange on the quartz tube; and the furnace door body continuously and slowly moves towards the quartz tube, the corrugated pipe is compressed until the pressing screw presses the furnace door body, and the corrugated pipe also applies pressure towards the quartz tube to the furnace door body at the moment, so that the sealing performance between the quartz tube and the furnace door body is further improved.

The present application relates to the technical field of vacuum chamber processing, and particularly relates to a thin-wall vacuum chamber processing method and an arc-shaped bifurcated thin-wall vacuum chamber. The thin-wall vacuum chamber processing method comprises the following steps: processing and treating a thin-wall pipe; fixing the thin-wall pipe and a mold; firstly performing air burning treatment on the thin-wall pipe, and then placing the thin-wall pipe into a vacuum brazing furnace to perform vacuum brazing; and assembling and welding the thin-wall pipe and an ultrahigh vacuum flange. The arc-shaped bifurcated thin-wall vacuum chamber comprises a vacuum chamber main body, and the vacuum chamber main body comprises: a first vacuum chamber, which constitutes a part of the length direction of the vacuum chamber main body, and the first end of the first vacuum chamber is used as one end of the vacuum chamber main body and is provided with one ultrahigh vacuum flange; a second vacuum chamber and a third vacuum chamber, which are connected to the end of the first vacuum chamber, and the second vacuum chamber and the third vacuum chamber jointly constitute the remaining part of the length direction of the vacuum chamber main body, and the ends of the second vacuum chamber and the third vacuum chamber are jointly provided with another ultrahigh vacuum flange.

This invention provides an in-situ heating and electrical testing apparatus and method for scanning electron microscopy (SEM). The apparatus includes a T-shaped sample stage, an in-situ heating and electrical testing chip, a probe card, wires, a vacuum flange with a BNC interface, a signal source meter, pins, and fixing studs. The in-situ heating and electrical testing chip is placed on the T-shaped sample. The probe card presses into contact with the heating and testing electrodes on the in-situ heating and electrical testing chip and leads out wires, simultaneously fixing the chip. The fixing studs secure the probe card to the T-shaped sample stage. The vacuum flange with the BNC interface connects the probe card and the signal source meter via wires. This invention provides in-situ heating, electrical testing, and microstructure observation functions for SEM, offering advantages such as rapid heating and cooling, low thermal drift, and low electromagnetic interference. It provides a platform for testing the performance of micro and nanomaterials and an experimental platform for preliminary screening of transmission electron microscopy (TEM) samples.

The present invention discloses an alkali metal Rydberg atom generation and detection device, comprising a beam source chamber and an action chamber, the two of which are connected via a vacuum flange; the beam source chamber comprises a sputtering laser for producing an alkali metal ultrasonic atomic beam, an alkali metal solid target, a high-pressure gas nozzle, and a conical colander; the action chamber comprises an excitation light, a repulsive electric field plate, a deceleration electric field plate, a grid, and a detector, with through holes left between the repulsive electric field plate and the grid for the atomic beam to pass through. The present invention, by combining ultrasonic atomic beams, laser sputtering, and gradient electric field deceleration technology, can generate a cold, concentrated alkali metal Rydberg atom beam, and by applying a pulsed voltage, achieves intermittent detection, i.e., detection is performed only within the time range of the ion collision detector. This can effectively overcome the shortcomings of excessively high alkali metal gas temperature caused by atomic furnace heating and the noise impact caused by continuous pressurized detection.

The present application belongs to the technical field of optical glass vacuum chamber, and relates to a non-magnetic vacuum flange connecting piece and a manufacturing method. A sapphire glass piece with holes is used to connect between a non-magnetic metal CF flange and a hollow quartz glass round tube, the metal CF flange and the sapphire glass piece are welded together through a vacuum brazing process, the sapphire glass piece and the hollow quartz glass round tube are connected together through a photo-cementing method, and then a deep photo-cementing process is used to make the connection of the two after photo-cementing more firm, almost becoming an integral whole, thus forming a vacuum seal. Since the sapphire glass piece and the metal flange are connected and sealed through a vacuum brazing process, they have good high-temperature resistance, and the maximum baking temperature can reach 450 DEG C. After the other end of the connecting piece glass tube is deep photo-cemented with a processed vacuum glass chamber and then connected to a vacuum pumping device through the CF flange, an ultrahigh vacuum glass chamber can be made for cold atom vacuum experiments.

According to various embodiments, a vacuum arrangement comprises: a first vacuum flange (102) and a second vacuum flange (112), which are arranged to be brought into a vacuum-tight joined state along a coupling direction (101); a fluid coupling, which has a fluid coupling plug (106) coupled to the first vacuum flange (102) and a fluid coupling socket (116) coupled to the second vacuum flange (112); wherein the fluid coupling socket (116) has a recess (116v) tapering in the coupling direction (101) for receiving the fluid coupling plug (106); one or more than one fluid connection, of which a first fluid connection (206) is fluidly coupled to the recess (116v) and / or of which a second fluid connection (216) is fluidly coupled to the fluid coupling plug (106).

The invention relates to a device and method for researching microstructure evolution of a metal material under an electrothermal magnetic coupling field, the device comprises a vacuum chamber, a telescopic rod, a vacuum flange, a sample rod, an insulation connecting piece and a sample table, the sample rod is connected with the sample table through the insulation connecting piece, and the telescopic rod can be operated to move and send a sample; a magnetic field loading module formed by a superconducting magnet, a sample table integrated thermal field loading module and an electric field loading module with a clamping column and a binding post are arranged in the cavity, a ceramic insulating layer is arranged between the heating resistor element and the sample placing table to prevent current interference, and a sample is connected with the sample placing table through the clamping column; the measurement method comprises the following steps: preparing a sample by combining electrolytic polishing with three-step argon ion polishing, and pre-performing EBSD detection to obtain an initial grain size and a KAM value; a sample is placed in the device, single-field, double-field (electric heating / electromagnetic / thermomagnetic) or three-field coupling treatment is achieved, EBSD detection is conducted again after cooling, the geometric necessary dislocation density is calculated, and the device has the advantages of being reasonable in structure, convenient to operate, practical and efficient.

The utility model discloses a vacuum-pumping flange assembly and a mechanical equipment testing device, the vacuum-pumping flange assembly comprises a shell and a flange plate, the wall surface of the shell is provided with a plurality of vacuum interfaces, any vacuum interface penetrates through the wall surface of the shell, at least one vacuum interface is used for connecting a vacuum-pumping pump, the bottom wall of the shell is provided with an opening, and the opening is communicated with the vacuum-pumping pump. The flange plate is connected with the bottom wall of the shell, provided with a communicating port communicating with the opening and used for being connected with mechanical equipment. By arranging the plurality of vacuum interfaces, the number of the vacuumizing pumps connected with the shell can be adjusted, so that the force of the vacuumizing operation in a test is controlled, the number of the vacuumizing pumps is adjusted in time according to the vacuumizing degree of a test site, the reworking condition caused by insufficient vacuum degree during the test is prevented, the accuracy of the vacuumizing operation is improved, and the working efficiency is improved. And the test efficiency is improved. The vacuumizing flange assembly has universality and can be repeatedly used, and the test cost is saved.

According to the GIS electric field partial discharge fusion sensing device and method, in the device, the first end of a fluorescent optical fiber is embedded and fixed to the inner side of a flange plate and exposed to the internal environment of a GIS cavity so as to receive ultraviolet light and / or visible light signals generated by partial discharge; the second end is connected to the input end of the photomultiplier through a vacuum flange; the first end of the electric field optical fiber probe is fixed to the center of the flange plate and exposed in the internal environment of the GIS cavity, and the second end of the electric field optical fiber probe is connected to the input end of the photoelectric detector through the vacuum flange. The electric field optical fiber probe converts the electric field change in the GIS cavity into a modulation optical signal of the change of the refractive index of the optical signal based on the electro-optical effect; the photomultiplier is used for receiving an optical signal from the fluorescent optical fiber, amplifying the optical signal and converting the optical signal into a partial discharge pulse electric signal; and the photoelectric detector is used for receiving the modulation optical signal from the electric field optical fiber probe and demodulating the modulation optical signal into an electric field change electric signal.

The present application provides a kind of vacuum flange structure, it includes flange pedestal, weak electric signal connector and cover plate, three are sequentially connected, wherein, weak electric signal connector includes PCB circuit board, and the isolation sealing of input and output end is realized by the space stagger of signal input and output end and groove sealing technology;At the same time, the voltage equalizing hole technology is used on the PCB structure of signal connector, the force problem of signal connection contact is solved, the tolerance accuracy of signal contact is guaranteed by combining mature PCB manufacturing process, and the wiring problem of high-density contact is solved.The device has the technical characteristics of simple structure, mature technology, stable and reliable signal connection, etc., and can be widely used in the internal and external structure signal communication measurement process of vacuum closed environment, has very high engineering practical value.

The invention relates to the technical field of metal film vacuum gauges, and provides a high-elasticity anti-fatigue capacitive metal film vacuum gauge which comprises a vacuum flange, a shell and a hollow block, a chromium-nickel alloy base layer, a gold plating layer and a ceramic substrate are arranged in the shell, the chromium-nickel alloy base layer is located above the gold plating layer, and the ceramic substrate is located above the gold plating layer. According to the embodiment of the invention, the hollow block is mounted on the inner wall of a detection position through the screw, then the mounting block is embedded into the hollow block, the hollow block is mounted on the inner wall of the detection position through the screw, the mounting block is mounted on the inner wall of the detection position through the screw, and the ceramic substrate is mounted on the mounting block. And then the round block is attached to the outer surface of the hollow block under elastic force limiting of a second spring, the upper surface of the clamping strip is in an arc shape, when the installation block moves downwards in the hollow block and then moves on the outer surface of the clamping strip, the clamping strip slides to the square groove and is embedded into the square groove under limiting of the second spring, and the installation block is installed in a limited mode.

The utility model discloses a static CT scanning device based on a modularized X-ray emitter, which comprises a plurality of X-ray emitter modules, each X-ray emitter comprises a vacuum tube, a plurality of X-ray sources are arranged in the vacuum tube, the top of the vacuum tube is respectively provided with a controller and a turbo pump vacuum flange, and the controller is connected with the turbo pump vacuum flange. The plurality of X-ray emitter modules are distributed and combined in an annular array, an annular detector is arranged on the inner sides of the plurality of X-ray emitter modules, a getter box is arranged on the inner side of the vacuum tube, and a flat panel detector is arranged on the inner sides of the plurality of X-ray emitter modules. And the plurality of X-ray emitter modules are coupled with the adjacent annular detectors or flat panel detectors. Compared with a traditional CT system, a sliding ring, a rotating rack and a pipe cooling system are not needed, the CT system is lighter and cheaper, a single target does not need to be rotated for cooling, and therefore the complexity and maintenance problems caused by physical rotation are avoided.

The utility model discloses an ultrahigh vacuum flange sealing type assembly which comprises a first flange plate and a second flange plate, a first pipeline is fixedly installed on one side of the first flange plate, a second pipeline is fixedly installed on one side of the second flange plate, and a rubber ring is arranged between the first flange plate and the second flange plate. First sealing rings are arranged on the outer sides between the rubber ring and the first flange plate and between the rubber ring and the second flange plate, the first sealing rings are fixedly connected with the rubber ring, a liquid cavity is formed in the rubber ring, rigid foam material liquid is arranged in the liquid cavity, and outer side baffle rings are fixedly installed on the two sides of the rubber ring along the outer side of the liquid cavity; and inner side baffle rings are fixedly mounted on the two sides of the rubber ring along the inner side of the liquid cavity. According to the flange sealing assembly, the stable sealing effect of the flange is achieved, the sealing stability is improved, and therefore the problem that in the long-time using process of a traditional flange sealing assembly, the sealing performance is reduced due to the aging phenomenon of a sealing material is solved.

The utility model discloses a high-strength detachable vacuum flange which comprises a first flange connector and a second flange connector, a first flange plate is arranged at one end of the first flange connector, and the first flange plate and the second flange plate are correspondingly connected through bolts. A reinforcing rib plate is arranged at the joint of the first flange plate and the first flange connector, sealing chucks are arranged in the first flange connector and the second flange connector, and fixing shaft discs are connected to the surfaces of the front ends of the sealing chucks in a sealed mode through locking bolts. The two flange connectors can be quickly aligned, mounted and fixed through the flange structure convenient to assemble, meanwhile, the reinforcing rib plates are arranged to enhance the mounting firmness and stability of the exterior of the flange structure, the structural strength of the flange structure is further improved, components in the ends of the flange assembly are subjected to quick-release design protection, and the service life of the flange assembly is prolonged. The connecting structure has the advantages of convenience and quickness in assembly and disassembly and tightness and stability in connection.

A high-temperature and vacuum environment excitation device for testing dynamic characteristics of an MEMS microstructure comprises a closed cavity, and the closed cavity is provided with a through hole and is connected with a vacuum flange; an observation opening is formed in the center of the top face of the sealed cavity, and an observation unit is installed in the sealed cavity. The device is characterized in that a heating excitation unit is detachably installed in the sealed cavity and comprises an upper installation plate and a lower installation plate, a plurality of connecting columns are evenly distributed and connected between the upper installation plate and the lower installation plate, and a plurality of pressing rods are evenly distributed and connected to the upper installation plate in the circumferential direction; a steel ball is arranged at the lower end of each pressing rod, a vibration excitation unit is arranged on the lower mounting plate, and the vibration excitation unit is pressed on the lower mounting plate through the pressing rods and the steel balls; a plurality of light heating units are mounted on the lower surface of the upper mounting plate through a plurality of ball cups, and the light heating units are obliquely arranged and point to the MEMS microstructures below; the lower end of each light heating unit is provided with a convex lens. The device can load a vacuum and high-temperature environment to the MEMS microstructure, and is high in heating speed and high in efficiency.

The utility model discloses an ultrahigh vacuum anti-dazzling observation window baffle plate, and particularly relates to the technical field of vacuum observation windows, the observation window baffle plate comprises an optical filter shield, a magnetic coupling and a rotary baffle plate; the magnetic coupling comprises an isolation flange, an inner magnetic yoke rotating shaft and an outer magnetic yoke cylinder; the inner magnet yoke rotating shaft is connected with the outer magnet yoke cylinder through a magnetic pole; the external magnet yoke cylinder is connected to the isolation flange in a sleeving mode. The rotating baffle comprises an ultrahigh vacuum flange, a driven pin shaft and viewport glass. Viewport glass is fixed on the driven pin shaft; the isolation flange is fixed on the side surface of the ultrahigh vacuum flange; the optical filter shield is installed on the ultrahigh vacuum flange through the vacuum viewport. According to the utility model, the material state or the real state of a high-brightness object during film deposition can be observed through quick opening and closing, and the component interface and the transmission mode all adopt an ultrahigh vacuum sealing mode to be matched with the structure of an external adjustable optical filter, so that the requirements of a vacuum system on low leakage rate and convenient operation of an observation window baffle are met.

The invention provides a disc-type laser-enhanced atomic layer deposition reactor and an implementation method. The disc-type laser-enhanced atomic layer deposition reactor comprises an atomic layer deposition reactor body and a laser, the atomic layer deposition reactor body comprises a sample cavity, the top of the sample cavity is provided with a sample cavity upper cover, the top of the sample cavity upper cover is provided with a gate valve, and the top of the gate valve is provided with a gate valve vacuum flange interface; and the gate valve vacuum flange interface is provided with a laser high-perspective window assembly. And laser generated by the laser enters the sample cavity through the high-perspective window sheet and the gate valve. The implementation method comprises two laser enhancement modes of layer-by-layer laser annealing enhancement and laser-assisted deposition. The reactor provides hardware support for a precise preparation mode of layer-by-layer deposition-layer-by-layer annealing and a surface reaction strengthening thought of laser enhanced deposition, in-situ layer-by-layer annealing can be executed in the film atomic layer deposition process, it is effectively avoided that impurities are introduced to pollute a sample and defects are introduced in the sample transfer process, and preparation of a high-quality crystalline film is achieved.

The invention relates to the field of accelerators, in particular to an inflation vacuum flange device for a radioactive target area. The inflation vacuum flange device for the radioactive target area comprises a middle flange, two inner flanges and two outer flanges, the middle flange is provided with an inflation nozzle, the inflation nozzle is used for inflating the inflation space, and the two inner flanges are arranged on the two sides of the middle flange in the axial direction at intervals respectively. The inner corrugated pipe, the outer corrugated pipe, the inner flange and the middle flange are matched to define the inflation space, the inflation space is inflated through the inflation nozzle, the inflation space can extend in the axial direction, and then the length of the inflation vacuum flange device is changed; the problem that flanges of different sizes and different shapes are adopted for connection along with different beam enveloping positions in a radioactive target area is effectively solved. When the inflation pressure of the inflation air nozzle is increased, the inflation pressure directly acts on the sealing face of the inner flange generating main sealing, and the problem that the leakage rate is increased due to the fact that the elastic performance of a spring is reduced after long-term use is solved.

The invention discloses a deuterium tritium fusion experiment-oriented self-calibration loss fast ion detector system, and relates to the technical field of magnetic confinement fusion plasma diagnosis, the deuterium tritium fusion experiment-oriented self-calibration loss fast ion detector system comprises a vacuum flange mounted on a magnetic confinement fusion device, and also comprises a vacuum pipeline mounted at a corresponding window on the vacuum flange, a vacuum window is mounted at one end of the vacuum pipeline away from the window; the probe shaft pipeline is arranged in the vacuum pipeline; the detector is mounted at one end, extending into the vacuum chamber of the magnetic confinement fusion device, of the probe shaft pipeline and is used for generating an optical signal, and a scintillator plate, a calibration lamp and a calibration step are mounted in the detector; according to the deuterium and tritium fusion experiment-oriented self-calibration loss fast ion detector system, the calibration lamp is installed in the detector, and the calibration lamp is of a patch LED type and is small in size, so that imaging of an image transmission system on a scintillator in the detector cannot be shielded.

The invention discloses a vacuum electrode, a vacuum electrode system and an assembly method thereof, and relates to the field of vacuum electrodes. The vacuum electrode comprises a baffle and a vacuum electrode module. The vacuum electrode module comprises a flexible adapter plate, an atmosphere end fixing piece, a vacuum end fixing piece, an atmosphere adapter assembly, a vacuum adapter assembly and a vacuum flange. The baffle atmospheric end is located in the atmospheric environment, the baffle vacuum end is located in the vacuum environment, and the vacuum flange is arranged at the baffle atmospheric end. One end of the atmosphere end fixing piece is connected with the vacuum flange, and the other end is located in the atmosphere environment. One end of the vacuum end fixing piece is connected with the baffle vacuum end, and the other end is located in a vacuum environment. The flexible adapter plate penetrates through the baffle and the vacuum flange, and the two ends of the flexible adapter plate are arranged on the atmosphere end fixing piece and the vacuum end fixing piece respectively. The atmosphere switching assembly is arranged on the flexible switching plate and connected with the atmosphere end fixing piece. The vacuum switching assembly is arranged on the flexible switching plate and connected with the vacuum fixing piece. According to the invention, a high-density and high-speed signal cable in a vacuum environment can be switched to an atmospheric environment, so that the signal cable is effectively prevented from possibly damaging the vacuum environment when penetrating out of the vacuum environment. The vacuum electrode provided by the invention is designed in a modularized vacuum penetration scheme, can realize multi-set and high-density deployment, and can realize convenient and independent replacement of modules. According to the vacuum electrode provided by the invention, simple and convenient insertion and replacement of the high-density signal cable at the atmosphere end are also realized, and the beside vacuum electrode does not need to be integrally disassembled.

This invention relates to the field of particle acceleration technology, and provides a radio frequency quadrupole accelerator for multiple vacuum scenarios. The accelerator includes a radio frequency cavity and a vacuum cover. The cavity wall of the radio frequency cavity has grid holes for evacuation. The vacuum cover is detachably installed at the grid hole location. When the vacuum cover is installed at the grid hole location, it maintains a vacuum environment within the radio frequency cavity in independent vacuum applications. When the vacuum cover is detached from the grid hole location, it places the radio frequency cavity within a vacuum chamber in integrated vacuum applications. This invention, by providing evacuation channels through grid holes in the cavity wall of the radio frequency cavity, eliminates the need for the welded vacuum flange structure of existing radio frequency cavity walls, effectively reducing the lateral dimensions of the radio frequency cavity and thus its volume, enabling miniaturized accelerator design. Furthermore, the grid hole structure effectively reduces the impact of the vacuum channels on the radio frequency performance of the radio frequency cavity.

The application discloses a self-calibration loss fast ion probe system for deuterium-tritium fusion experiment, and relates to the technical field of magnetic confinement fusion plasma diagnosis, which comprises a vacuum flange for being installed on a magnetic confinement fusion device, and further comprises: a vacuum pipeline installed at a corresponding window of the vacuum flange, wherein one end of the vacuum pipeline away from the window is provided with a vacuum window; a probe shaft pipeline installed in the vacuum pipeline; a probe installed at one end of the probe shaft pipeline extending into a vacuum chamber of the magnetic confinement fusion device and used for generating an optical signal, wherein a scintillator plate, a calibration lamp and a calibration step are installed in the probe; the self-calibration loss fast ion probe system for deuterium-tritium fusion experiment is characterized in that the calibration lamp is installed in the probe, and the calibration lamp is a patch LED type, so that the volume is small, and the imaging of an image transmission system on the scintillator in the probe is not blocked.

Imaging system comprising a vacuum chamber (18) and a control unit (28), wherein a plurality of optical elements defining a beam path (15) are arranged in the vacuum chamber (18). A transducer (30, 31, 32) is arranged in the vacuum chamber (18). A vacuum flange (33) is arranged in a wall of the vacuum chamber (18). An electrical conductor (34, 35, 36, 37) designed for transmitting electrical signals is formed between the control unit (28) and the transducer (30, 31, 32), wherein the electrical conductor (34, 35, 36, 37) extends through the vacuum flange (33). In the electrical conductor section (34, 35, 36, 37) a plug connection (34) is formed with a plug receptacle (39) and with a plug (40) inserted into the plug receptacle (39), wherein the plug receptacle (39) is arranged on an outside of the vacuum flange (33).An electronic component (44) is arranged in a connector housing (41) of the connector (40), which is designed for signal shaping of electrical signals transmitted between the control unit (28) and the transducer (30, 31, 32). The invention also relates to a method for repairing an imaging system.

A shock wave excitation device for exciting an MEMS microstructure in a high-temperature vacuum environment comprises a closed cavity, and the outer edge of the closed cavity is connected with a vacuum flange; an elastic support frame is arranged in the closed cavity; the device is characterized in that an outer ring mounting seat and an inner ring mounting seat are arranged in the center of the bottom plate in the closed cavity, the elastic supporting frame comprises a mass block and a plurality of S-shaped supporting arms which are circumferentially and uniformly distributed on the periphery, and the elastic supporting frame is supported on the inner ring mounting seat through the supporting arms; the center of the bottom surface of the mass block is provided with a discharge excitation module through a sealing sleeve, and the sealing sleeve and the elastic supporting frame form a closed cavity; automatic feeding modules are evenly distributed on the outer ring installation base in the circumferential direction, electric heating modules are arranged at the inner ends of the automatic feeding modules respectively, and the electric heating modules can stretch out and draw back in the radial direction of the outer ring installation base under driving of the automatic feeding modules and abut against the outer edge of the mass block. The device can simultaneously realize shock wave impact excitation on the microstructure in high-temperature and vacuum environments, and the excitation effect is good.