122 results about "Vacuum flange" patented technology

Mass spectrometer systems for measuring mass / charge ratios of analytes are described. A mass spectrometer system includes a vacuum flange, a PCB base plate coupled to the vacuum flange, and an ion optic assembly coupled to the PCB base plate. The PCB base plate may include signal-processing electronics. The system may include an electrical cable coupled to the PCB base plate for supplying power, control, and I / O to the ion optic assembly and the signal processing electronics. Alternatively, a mass spectrometer system includes a PCB base plate and an ion optic assembly. The PCB base plate has a sealant portion and an electrical portion. The ion optic assembly is coupled to the electrical portion. The system may include a vacuum housing for enclosing the ion optic assembly. The vacuum housing is coupled to the sealant portion of the PCB base plate for sustaining a vacuum while the system is in operation.

The invention provides a high-power non-contact type rapid laser heating device which comprises an adjustment bracket, a camera lens, an optical fiber, a CaF2 window, a first cooling circulating water pipe, a semiconductor laser, a programmable logic controller (PLC) subsystem, a thermoelectric couple temperature sensor, a resistance vacuum gauge, an electromagnetic valve, a refrigerator, a vacuum solenoid valve, a vacuum pump, a thermocouple probe, a second cooling circulating water pipe, a sample, a water-cooling bracket, an air inlet valve, an environmental chamber and a vacuum flange. The rapid laser heating device is in non-contact type, adjustable in output power linearity and low in cost. The high-power semiconductor laser enters the optical fiber by coupling and then generates high heating flux load by a converging combination lens, and heat prevention / insulation material in the environmental chamber can be heated, so that the service performances such as thermal shock, oxidation, ablation and the like can be tested.

The invention provides a detection method and a test device for catalytic properties of a heatproof material based on an emission spectrum. The test device comprises a plasma power supply, an air inlet valve, an infrared temperature measurement window, a double-colorimetric thermodetector, an emission piston, an induction heating power supply, a reaction cavity, a resistance vacuum gauge, a vacuum flange, an induction coil, a zirconium oxide support frame, a single-shaft electric stepping machine, a long-focus focusing lens and a short-focus focusing lens. According to an 'atom-dissipation' laboratory representation method based on emission spectrum diagnosis disclosed by the invention, the disturbance of the surface of the material to gas-phase atoms is quantitatively analyzed by an actinic ray strength method, and the recombination coefficient of the gas-phase atoms at the surface of the material is calculated according to mathematic models of gas-phase diffusion and object surface atomic mass conservation conditions. The test device has the advantages that the operation is simple; based on a catalytic mechanism and by virtue of an emission spectrum diagnosis technique, the surface catalysis coefficients of conductive heatproof materials in a temperature range of 600-3000 DEG C can be obtained through measuring the concentration change of oxygen atoms at the surfaces of the materials to represent the surface catalytic properties of the materials based on catalysis principles and diffusion equations.

Mass spectrometer systems for measuring mass / charge ratios of analytes are described. A mass spectrometer system includes a vacuum flange, a PCB base plate coupled to the vacuum flange, and an ion optic assembly coupled to the PCB base plate. The PCB base plate may include signal-processing electronics. The system may include an electrical cable coupled to the PCB base plate for supplying power, control, and I / O to the ion optic assembly and the signal processing electronics. Alternatively, a mass spectrometer system includes a PCB base plate and an ion optic assembly. The PCB base plate has a sealant portion and an electrical portion. The ion optic assembly is coupled to the electrical portion. The system may include a vacuum housing for enclosing the ion optic assembly. The vacuum housing is coupled to the sealant portion of the PCB base plate for sustaining a vacuum while the system is in operation.

The invention relates to an ECR plasma source comprising a coaxial microwave supply line (1) with an internal conductor (2) and an external conductor (3), wherein the internal conductor (2) with one end as the antenna (7) passes through a vacuum flange (5) in insulated fashion, which vacuum flange (5) closes off an opening in the wall to the plasma space (6). A multipole magnet arrangement (8) is provided coaxially with respect to the microwave supply line (1) and its magnetic fields pass through the vacuum flange (5) and form an annular-gap magnetic field (12) in the plasma space (6) coaxially with respect to the antenna (7). The antenna (7) protrudes directly into the plasma space (6) and, in comparison with the internal conductor (2), it has a radially larger antenna head (14) at which an underside (15) is provided parallel to the vacuum flange (5) in such a way that an annular gap (16) is formed between the vacuum flange (5) and the underside (15) and that the plasma space (6) is delimited coaxially with respect to the antenna (7) and radially outside the annular-gap magnetic field (12) by means of a shield (13), whose end side facing away from the vacuum flange defines the plasma outlet opening (25).

The invention relates to an ECR plasma source comprising a coaxial microwave supply line with an internal conductor and an external conductor, wherein the internal conductor with one end as the antenna passes through a vacuum flange in insulated fashion, which vacuum flange closes off an opening in the wall to the plasma space. A multipole magnet arrangement is provided coaxially with respect to the microwave supply line and its magnetic fields pass through the vacuum flange and form an annular-gap magnetic field in the plasma space coaxially with respect to the antenna. The antenna protrudes directly into the plasma space and, in comparison with the internal conductor, it has a radially larger antenna head at which an underside is provided parallel to the vacuum flange in such a way that an annular gap is formed between the vacuum flange and the underside and that the plasma space is delimited coaxially with respect to the antenna and radially outside the annular-gap magnetic field by means of a shield, whose end side facing away from the vacuum flange defines the plasma outlet opening.

The invention discloses a testing device for testing creeping property of a high-temperature integral flanged joint, which includes a flanged joint, a heating and temperature control system, a worm gear transmission mechanism, a deformation measurement system, a supporting structure, a medium given system, a computer image processing system and a medium sealing system. The testing device for testing the creeping property of the high-temperature integral flanged joint provided by the invention has the advantages of compact structure, simplicity in operation, small occupied area and low cost, and solves the problem that the creeping properties of all the elements in the vacuum flanged joint cannot be measured at present.

A clamp is provided that incorporates a plurality of flexible links with V flexures between the links to maintain even spacing of the links before and during installation. Each link has multiple segments joined around at least one flexure point, and a floating band surrounding the links to distribute clamping pressure that is produced along a circumference of contact points. The clamp provides evenly distributed clamping pressure by increasing the number of clamping contact points between the clamp and articles being joined. The clamp has non-limiting applications for clamping target tubes or as a vacuum flange for ISO fittings. A clamp can produce a vacuum tight seal between a target tube and end block or end support flange of a rotary magnetron without resort to tools, and as such is rapidly secured in place.

A cold atom all-optical state selection device comprises vacuum flange, an optical state-selecting region, a magneto-optical trap, and a cavity base connected in sequence from top to bottom; when thecold atomic fountain clock starts to work, based on the magneto-optical trap cooling, trapping to get cold atomic groups and simultaneously preparing the clock state during the throwing of the cold atomic groups. The invention not only greatly increases the number density of the clock state atoms, but also shortens the height of the whole clock, thereby greatly shortening the dead time of the intermittent clock, thereby achieving the purpose of shortening the cycle and improving the short-term stability of the cold atomic clock. The device has a simple structure and is easy to implement, and can be used as a core device of a laser cold atomic clock.

The invention discloses a movable temperature measuring device for hot forming of sheets. The device comprises a motor, a reducer, a motor bracket, a thermocouple, a coupler, bearings, a nut, a bolt, a connecting plate, a compressed sealing ring, a ball screw, a quick-release flange, a corrugated pipe, a welded high-vacuum flange, a travel switch and a stopper, wherein the ball screw is connected with the reducer through the coupler; the bearings are arranged at two ends of the ball screw and are fixed on the motor bracket; the nut is connected with the ball screw; the connecting plate is fixed on the nut; the welded high-vacuum flange is arranged at one end of the corrugated pipe and is connected with the connecting plate through the compressed sealing ring; the quick-release flange is arranged at the other end of the corrugated pipe and is connected with hot forming equipment; the thermocouple is arranged in the corrugated pipe; the upper end of the thermocouple is sealed through the bolt and the compressed sealing ring. The nut is in bolted connection with the connecting plate, the travel switch is arranged on the motor bracket, and the stopper is fixed on the connecting plate and is used for starting the travel switch. The temperature measuring device is high in measurement accuracy, easy to control and wide in application range.

The invention adopts a radio frequency gas discharge manner to excite the inert gas plasmas and provides a device for generating a vacuum ultraviolet light source. The device comprises four parts: a central cylindrical shaped interaction cavity, a coaxial circular power charge light source cavity, a radio frequency spiral resonance excitation cavity and an ultrahigh vacuum flange connection component. The device uses a circular tube made of magnesium fluoride crystal materials as its optical window; the vacuum ultraviolet light is generated in the coaxial circular power charge light source cavity on the outer wall of magnesium fluoride circular tube, then penetrates and is radiated into the central cylindrical shaped interaction cavity so that the light could act on a target material directly. In this manner, the travel distance of the light rays is shortened; the effective size of the light source is increased; the beam-divergence angle is reduced; and the utilization efficiency of the light source is increased. According to the invention, the device adopts an electrodeless radio frequency charge manner to excite the gas plasmas, and produces vacuum ultraviolent photons with specific wavelengths by filling different inert gases. Through the adjustment of the parameters of the gases like gas pressure, radio frequency and power, it is possible to adjust the output power of the vacuum ultraviolet light so as to meet the requirements of various applications on the light source.

The invention belongs to the technical field of low-temperature and superconducting application and particularly relates to a low-temperature insulating structure of a gas-cooled lead. The structure provided by the invention comprises a vacuum flange and a three-layer insulating structure which is arranged on the outer surface of the gas-cooled lead, wherein the three-layer insulating structure comprises a lead inner protective layer, a low-temperature insulating layer and an outer protective layer which are sequentially arranged from interior to exterior; and the vacuum flange is connected with the gas-cooled lead which is arranged at the inner core of the three-layer insulating structure through bolts. The low-temperature insulating structure provided by the invention can stand a 5min power frequency voltage test of a more than 35kV voltage class, a thunder impulse voltage test, a partial discharge test, a 15min alternating current withstand voltage test, a direct current withstand voltage test and the like, has the advantages of excellent electric property parameters, reasonable electric field and magnetic field distribution, low heat leakage and integral vacuum tightness withstand voltage properties with a stainless steel liquid nitrogen container, and can be used for improving the stability of a system and greatly lowering the investment cost.

The invention discloses a beam diagnosis high-precision linear transmission device which comprises a probe, a transmission rod, a bellows, a dynamic seal, an electric cylinder and a grating ruler. Thetransmission rod and the probe are connected through a screw. The transmission rod passes through the bellows, a dynamic seal. The bellows and the dynamic seal are connected through a CF ultra-high vacuum flange. The transmission rod and the dynamic seal are sealed through an O-shaped seal ring. The reading head of the grating ruler is connected with the slider of the electric cylinder. The electric cylinder is connected with the tail end of the transmission rod. The transmission rod is driven by the electric cylinder to carry out reciprocating linear motion along a guide sleeve. According tothe invention, different types of detection targets can be arranged on the front end of the transmission rod, and the measurement range can be adjusted according to use needs; the probe on the frontend of the transmission rod can measure the beam current intensity and position information to provide beam reference information for beam debugging personnel; stable and efficient operation of an accelerator is realized; and the device has the advantages of high repeated positioning accuracy and simple measurement.

The invention relates to a scattering-low dosage-rotary energetic ion irradiation device which is mainly applied to a low dosage energetic ion irradiation material experiment in a normal temperature environment and is particularly suitable for the irradiation experiment of batch small samples. The scattering-low dosage-rotary energetic ion irradiation device is mainly characterized by comprising a stepping motor support which is fixedly connected on a vacuum flange. A stepping motor is fixedly connected with the stepping motor support. The stepping motor drives a rotating target disc. A fan-shaped baffle plate is arranged in front of the rotating target disc. The fan-shaped baffle plate is connected on the stepping motor support. A beam detection device support is arranged in front of the fan-shaped baffle plate, and a beam detection device is arranged on the beam detection device support. Advantages of the scattering-low dosage-rotary energetic ion irradiation device are that large area of scattered beams are acquired so that efficiency of the irradiation experiment is greatly enhanced.

A mass spectrometer that allows easy replacement of an MCP (microchannel plate) and is enabled to secure orthogonality between an incident surface of the MCP and an ion track at high accuracy is provided. A flight tube 2 where ions fly is arranged in a vacuum vessel composed of a vacuum flange 6 and a body 1, and an MCP group 4 is attached to a tail end of the flight tube 2 via an MCP-IN electrode 3. A vacuum flange 6 is attachably and detachably attached to the body 1, and the MCP group 4, by a spring 710 provided on a circuit board 7 for detection attached to the vacuum flange 6, is urged toward an end portion of the flight tube 2 so that its orthogonality with respect to an ion flight track is secured.

The invention discloses a novel flange connecting structure which comprises an upper flange neck and a lower flange neck coaxial with the upper flange neck. An upper ISO-K vacuum flange is arranged on the outer wall of the lower end of the upper flange neck. A lower ISO-K vacuum flange is arranged on the outer wall of the lower end of the lower flange neck. The outer wall of the upper flange neck is sleeved with an upper elastic collar, and the outer wall of the lower flange neck is sleeved with a lower elastic collar. An upper loose quick-opening flange plate is arranged on the outer wall of the upper ISO-K vacuum flange, and a lower loose quick-opening flange plate is arranged on the outer wall of the lower ISO-K vacuum flange. A first semicircular clamp and a second semicircular clamp used for locking are arranged on the outer wall of the upper loose quick-opening flange plate and the outer wall of the lower loose quick-opening flange plate correspondingly. One ends of the first clamp and the second clamp are connected through a hinge, and the other ends of the first clamp and the second lamp are clamped though a connecting rod and a nut. According to the novel flange connecting structure, the ISO-K vacuum flanges can be converted into KF flanges without additional arrangement of a transitional tube, the connecting structure is compact in structure, small in occupied space, and capable of facilitating rapid mounting and dismounting of flange connectors.

The invention adopts a radio frequency gas discharge manner and provides an integrated inert-gas frequency standard device for laser frequency locking. Integrated design of a sample gas container and a radio frequency discharge system is adopted, a structure of a vacuum chamber is fully used, and the system miniaturization and integration are achieved. According to the scheme, the device comprises an outer-layer high vacuum chamber and an inner-layer radio frequency gas discharge assembly, and glass or a ceramic tube is adopted as the separation part to achieve electrical insulation; an inner-layer radio frequency discharge system is located and fixed by sleeving the glass or the ceramic tube with a spiral discharge coil; a signal input end and a grounding end of the spiral coil are connected to a vacuum flange; an optical window is fixed to the flange surface in a welded manner; the system vacuum degree is improved and the service life is prolonged by means of an adsorption pump; a detachable interface is adopted, and other samples can be injected to be used as the frequency locking standard of various lasers. With the adoption of the design of a stainless steel vacuum chamber, the problem of fragility of a sample reference pond made of glass and the relatively high permeability of quartz crystals to helium and the like can be solved.

The invention relates to an in-situ morphology and optical performance monitoring evaporation source. The in-situ morphology and optical performance monitoring evaporation source comprises a vacuum flange, a heat shielding assembly supported on any one side face of the vacuum flange, a heating assembly which is embedded at one end, which is far away from the vacuum flange, of the heat shielding assembly, a material container which is arranged in the heating assembly, a temperature measuring assembly which is mounted adjacently to the material container and is used for measuring the temperature, a vacuum electric connector which is respectively electrically connected with the heating assembly and the temperature measuring assembly and is mounted on the vacuum flange, and a control power source which is connected with the vacuum electric connector; the evaporation source further comprises a microscope mounted in the heat shielding assembly; and the vacuum flange is provided with an observation window which is opposite to the position of the microscope. The heat shielding assembly is internally provided with the microscope and the vacuum flange is provided with the observation window which is opposite to the position of the microscope, so that the morphology and the optical performance of a deposited material on the surface of a substrate can be monitored in real time when the evaporation material is deposited.

A holed side wall type upper vacuum chamber system of a fountain atomic clock comprises a cold atom free flying area vacuum chamber wall, a microwave cavity, four rectangular protruding holes, seal covers of the rectangular protruding holes, a lower vacuum chamber wall, a vacuum flange and a seal glass window, wherein the lower vacuum chamber wall is connected with a lower vacuum chamber. The upper vacuum chamber system is characterized in that the positions, corresponding to four microwave coupling waveguides of the microwave cavity, on the side wall of an upper vacuum chamber, are provided with the four rectangular protruding holes respectively, the rectangular microwave coupling waveguides of the fountain clock are installed by forming the holes in the side wall of the vacuum chambers, the diameter of a cold atom free flying area vacuum chamber is greatly reduced, the total area of the vacuum wall and the size of the vacuum chambers are greatly reduced, the upper vacuum chamber system has the advantages that the size of the vacuum chambers is small, preparation is facilitated under the vacuum environment and a microwave system is easy to adjust, and the minimization of the fountain clock can be achieved.

The invention discloses a comprehensive treatment system for roll paper tailings. The comprehensive treatment system comprises a vacuum sorting and conveying unit, a tapered arranging and slitting unit and an airflow centrifugal separation system, wherein the vacuum sorting and conveying unit comprises a vacuum conveying belt, a vacuum box, a left distributor, a right distributor, a vacuum flange connector, a vacuum pump and a lifting platform, the tapered arranging and slitting unit comprises a chain type lifting device, a cone-shaped tube guiding unit, a circular knife slitting device and a collecting hopper, and the airflow centrifugal separation system comprises an airflow centrifugation unit, a material inlet, a high-speed airflow connector, a paper tube separation branch pipe, a conveying channel, a paper collector and a paper separation branch pipe. The comprehensive treatment system can achieve orderly arrangement, pretreatment and separation of paper and paper tubes of the roll paper tailings through the automatic process.

The invention discloses a compact type high precision multi-dimensional rotating mechanism under an ultrahigh vacuum environment. The compact type high precision multi-dimensional rotating mechanism comprises a holder rotating assembly, a polar rotating assembly and an annular rotating assembly which are mounted in a mutually matched manner, wherein a holder frame of the annular rotating assembly and a rotating holder of the holder rotating assembly are mounted in a matched manner; a polar pushing connecting rod of the polar rotating assembly penetrates through the interior of an annular rotating rod of the annular rotating assembly, and a vacuum container wall or a vacuum flange is mounted at the tail end, matched with the annular rotating rod, of the polar pushing connecting rod; a vacuum container flange enables the holder rotating assembly at the left end and partial polar rotating assembly and partial annular rotating assembly to be positioned in the vacuum environment. The high precision multi-dimensional rotating mechanism is reasonable in structural design, compact in structure, small in occupied space and high in precision, and is particularly suitable for diagnostic equipment, optical adjusting devices, target plates or sample tables at the interior of vacuum coating equipment in plasma physics experimental facility and various high precision multi-dimensional rotating mechanisms under vacuum and ultrahigh vacuum conditions.

The invention discloses an atom generator capable of improving the atomic beam flow density. The atom generator comprises a vacuum flange, an air circuit component, a heating device and a thermal insulation cooling device, wherein the air circuit component comprises an air supply source, a vacuum micrometering valve, a gas introducing flange, an air supply pipe, a ceramic sleeve and a tungsten capillary tube; the heating device comprises a direct current stabilized power supply, an electricity introducing flange and a tungsten heater element; the thermal insulation cooling device comprises a cooling water introducing flange, a copper sleeve, a molybdenum thermal insulation layer and a cooling block; a cooling water channel is formed in the copper sleeve; a first round hole as an atomic beam outlet is formed in the lower end of the molybdenum thermal insulation layer; a second round hole as an atomic beam outlet is formed in the copper sleeve; and the axes of the tungsten capillary tube, the first round hole and the second round hole overlap with one another. In atomic angular distribution at the outlet, the atomic flow density within a small polar angle range is increased; the work efficiency of the atom generator is improved; meanwhile, the atomic flow density with a large polar angle is inhibited; and the influence on surrounding components is reduced.

The invention discloses an ultrahigh vacuum sample storage and transfer platform which comprises a sample storage and transfer cavity and a sample storage table. The sample storage and transfer cavity is formed by connecting nine vacuum pipelines with ends connected in parallel. The outer sides of the nine vacuum pipelines are provided with vacuum flanges capable of being in vacuum connection with other devices. An observation window is arranged to be in sealed connection with the first flange. A magnetic driving transmission rod is arranged to be in sealed connection with the second flange. A gate plate valve is arranged to be in sealed connection with the fourth flange. A molecular pump is arranged to be in sealed connection with the fifth flange. A two-dimensional adjusting mechanism is arranged to be in sealed connection with the ninth flange. The sample storage table is connected with the two-dimensional adjusting mechanism. The sample storage and shift cavity keeps an ultrahigh vacuum environment through an ultrahigh vacuum keeping device; the gate plate valve is connected with a cavity of an ultrahigh vacuum system through the corresponding flange, and connection or disconnection of the cavity of the ultrahigh vacuum system and the sample storage and transfer platform are achieved through on-off of the gate plate valve.

The invention relates to a product profiled surface air impermeability detection device and belongs to the field of air impermeability detection. The product profiled surface air impermeability detection device includes a connection chamber (1), a vacuum chamber (2), a vacuum pump (4), a control device (6) and a body frame (3). The connection chamber includes a sealed chamber (10), a working chamber (11), and a fixing clamp (12). The vacuum chamber includes a vacuum room (26), a measurement room (34), a monitoring room (24) that are provided with respective vacuum gauges. Values are provided in order to controls the on-off states of paths between respective rooms and the vacuum pump. The control device realizes a detection procedure by reading a vacuum gauge signal and controlling the on-off state of the valve. The vacuum pump provides a required vacuum environment. The vacuum chamber, the vacuum pump, the control device, the valves, and pipelines are placed in the body frame. The connection chamber is placed outside the body frame, tightly sleeves the to-be-tested position of the product, and is connected to the vacuum chamber via a vacuum flange. Compared with the prior art, theproduct profiled surface air impermeability detection device is compact in structure, easy to operate, and high in detection efficiency, and can detect the air impermeability of the product under thecondition where full-closed detection is difficult.

The invention discloses an open-type high-flux big-caliber optical focusing and frequency conversion device, which relates to an optical focusing and frequency conversion device. In order to solve the problems of big difficulty of assembling and disassembling an optical element on line, complex structure and high cost in the traditional inertial confinement fusion device, the open-type high-flux big-caliber optical focusing and frequency conversion device comprises a frequency multiplication module assembly, an optical transmission pipeline, a lens module, a vacuum sealing sampling module and a three frequency multiplication parameter diagnostics pack, wherein the frequency multiplication module assembly, the optical transmission pipeline, the lens module and the vacuum sealing sampling module are successively and coaxially connected in an optical path; the lens module comprises a lens module shell, a target practice lens and a driving mechanism; the vacuum sealing sampling module comprises a vacuum sealing shell, a main optical path vacuum window, a diagnostics pack vacuum window, a round flange, a square flange and a shielding sheet; and the round flange and the vacuum flange of a vacuum target chamber are in butt joint. The open-type high-flux big-caliber optical focusing and frequency conversion device disclosed by the invention is suitable for the high-flux big-caliber optical focusing and frequency conversion.

The invention discloses an atom generator comprising a vacuum flange, a gas introducing module, a heating module, a heat insulation module, a cooling module and an outlet module. The gas introducing module comprises a gas supply source, a vacuum micro-adjusting valve and a gas supply tube. The heating module comprises a power supply, a tungsten capillary and tungsten heating elements. The heat insulation module comprises a molybdenum heat insulation layer which is fixedly installed on the vacuum flange. The cooling module comprises a cooling sleeve which sleeves the molybdenum heat insulation layer. The outlet module comprises an outlet support which is arranged below the tungsten capillary. The outlet support is fixedly installed on the tungsten heat insulation layer and is provided with a conical internal hole. The center line of the conical internal hole and the center line of the tungsten capillary are collinear, and the diameter of the top end of the center line is less than that of the bottom end. The output support with the conical internal hole is additionally arranged at an atom outlet so that flux density of atoms at a small polar angle can be increased, flux density of the atoms at a large polar angle can be suppressed, angular distribution of atomic beams at the outlet can be improved and atom utilization rate can be enhanced.

The invention discloses a sheet-shaped stacked structure getter pump, and belongs to the technical field of vacuum. The getter pump comprises a getter element, ceramic heating sheets, a central supporting rod, a heat shielding structure and a base, wherein the getter element comprises getter sheets and a central step gasket; the getter element and the ceramic heating sheets are alternately stackedon the central supporting rod through circular holes, and the gap between the getter element and the ceramic heating sheets is adjusted through the thickness of the central step gasket; the heat shielding structure comprises heat shielding layers and hollow thin housings which are arranged on the top, the bottom and the outer layer of a stacked body; and the base is a high-vacuum CF flange, and electrodes are welded through kovar alloy. An integrated structure that the getter sheets and the central step gasket are matched is adopted on the getter element, so that the problem of powder fallingcaused by friction of all parts of the getter element is effectively avoided. The face-to-face heat radiation of the ceramic heating sheets is adopted to heat and activate the getter, so that the getter pump has the characteristics of being high in heating efficiency and uniform in activation. The sheet-shaped stacked structure getter pump is reasonable in structural design, convenient to install, safe to use and suitable for vacuum obtaining and passive maintenance of various vacuum systems.

The invention discloses a high-vacuum flange sealing assembly. The high-vacuum flange sealing assembly comprises a sealing ring, wherein a first flange disc and a second flange disc are fixedly connected to the two sides of the sealing ring through fastening bolts; a fastening nut is connected to the tail end of each fastening bolt in a threaded manner, the outer side of the sealing ring is provided with a flanged edge, a contact ring is fixedly connected to the middle portion of the sealing ring, and an inner sealing ring is fixedly connected to the interior of the sealing ring; and a salient-point circular ring is bonded to the upper surface of the sealing ring, bolt holes are formed around the contact ring, and a through hole is formed in the middle portion of the inner sealing ring. According to the high-vacuum flange sealing assembly, a special structure is adopted for increasing the contact area between the flange discs, the sealing effect is improved, the sealing effect on the flange discs is improved by means of high elasticity of the natural rubber flanged edge, sealing failure caused by sealing surface separation due to overstretching can be effectively prevented throughthe salient-point circular ring, an internal medium can be adsorbed through the silicone inner sealing ring, and the service life of the sealing ring can be prolonged.

The invention relates to a vacuum evaporation source capable of being mounted at any angle for use. The vacuum evaporation source comprises a heat shield assembly, a vacuum flange, a container, a heating assembly which is fixed in the heat shield assembly and is built in the container, a temperature measurement assembly, and a vacuum electric connector which is mounted on the vacuum flange and is electrically connected with the heating assembly and the temperature measurement assembly, wherein the container is detachably embedded at one end, far away from the vacuum flange, of the heat shield assembly and is provided with an inner cavity; an opening communicated with the inner cavity is formed in one end, far away from the vacuum flange, of the container; a circumferential wall extending into the inner cavity is arranged at the opening; the end, extending into the inner cavity, of the circumferential wall is open; the area of the circumferential wall is smaller than that of the inner cavity in the same plane with the circumferential wall. Therefore, an evaporation material can be prevented from falling from the opening when the vacuum evaporation source is tilted or inverted.

The invention belongs to a glow discharge electrode and particularly discloses an embedded glow discharge electrode. The embedded glow discharge electrode comprises a hollow flange, a vacuum electrical lead, an electrode tip and a shielding case; the electrode tip and the shielding case are positioned on one end of a vacuum side of the vacuum electrical lead; the electrode tip is arranged within the shielding case; one side of the shielding case sleeves the vacuum side of the vacuum electrical lead; and the other side of the shielding case is an opening. The embedded glow discharge electrode can avoid direct irradiation of plasma of deuterium and tritium, has a low water leakage risk, and guarantees the safety and reliability of a thermonuclear fusion experiment.