Compact type high precision multi-dimensional rotating mechanism under ultrahigh vacuum environment
An ultra-high vacuum, rotating mechanism technology, applied to supporting machines, mechanical equipment, machines/supports, etc., can solve the problems of insufficient compact structure and large vacuum chamber space occupation, and achieve compact structure, high precision and reasonable structure design. Effect
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[0025] See attached figure 1 , a compact high-precision multi-dimensional rotating mechanism in an ultra-high vacuum environment, including a compact high-precision multi-dimensional rotating mechanism in an ultra-high vacuum environment including a pan-tilt rotating assembly 1, a polar rotating assembly 2, a circumferential rotating assembly 3, and a vacuum Vessel wall or vacuum flange4. The left part of the vacuum flange 4 is located in a vacuum environment.
[0026] see figure 2 , The pan / tilt rotation assembly 1 includes a pan / tilt 101, a pan / tilt pushing block 102 is installed on the back, and a pan / tilt rotation shaft 103 is installed on both sides.
[0027] see image 3 The embodiment of the polar rotation assembly 2 is: the polar push link 201 is installed on the pan / tilt push block 102 to push the pan / tilt around the pan / tilt rotation axis 103 to perform polar rotation. The polar direction pushes the connecting rod 201 and the cloud platform pushing block 102 to ...
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