Compact type high precision multi-dimensional rotating mechanism under ultrahigh vacuum environment

Abstract

The invention discloses a compact type high precision multi-dimensional rotating mechanism under an ultrahigh vacuum environment. The compact type high precision multi-dimensional rotating mechanism comprises a holder rotating assembly, a polar rotating assembly and an annular rotating assembly which are mounted in a mutually matched manner, wherein a holder frame of the annular rotating assembly and a rotating holder of the holder rotating assembly are mounted in a matched manner; a polar pushing connecting rod of the polar rotating assembly penetrates through the interior of an annular rotating rod of the annular rotating assembly, and a vacuum container wall or a vacuum flange is mounted at the tail end, matched with the annular rotating rod, of the polar pushing connecting rod; a vacuum container flange enables the holder rotating assembly at the left end and partial polar rotating assembly and partial annular rotating assembly to be positioned in the vacuum environment. The high precision multi-dimensional rotating mechanism is reasonable in structural design, compact in structure, small in occupied space and high in precision, and is particularly suitable for diagnostic equipment, optical adjusting devices, target plates or sample tables at the interior of vacuum coating equipment in plasma physics experimental facility and various high precision multi-dimensional rotating mechanisms under vacuum and ultrahigh vacuum conditions.

Description

[0001] technical field [0002] The invention relates to a compact high-precision multi-dimensional rotating mechanism that can be used under ultra-high vacuum conditions, and is mainly used in precision machinery, optical equipment, medical equipment, robots, motion simulation, machinery manufacturing, automatic assembly equipment, precision machining and measurement etc. It is especially suitable for diagnostic equipment, optical adjustment equipment, internal target plates or sample stages of vacuum coating machines, and high-precision multi-dimensional rotating mechanisms under various vacuum and ultra-high vacuum conditions in plasma physics experimental devices. Background technique [0003] The introduction of high-precision multi-dimensional rotational motion of devices inside high-vacuum and ultra-high-vacuum devices has always been a major problem in the fields of optics, vacuum equipment and plasma diagnostic equipment. Difficulties are mainly reflected in the co...

AI Technical Summary

Problems solved by technology

Difficulties are mainly reflected in the contradiction between the vacuum seal and the motion transmission of components, the servo control of free rotation in space, the accuracy of any specified angle, the limitation of ultra-high vacuum conditions on indoor materials and the requirement of "absolutely clean" without oil and fat, and the motion accuracy guarantee, and the structure is not compact enough to take up too much space inside the vacuum chamber, etc.

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