The invention relates to a device (1) for characterising a surface (SE) of a sample (E), comprising: − a chamber (C) comprising a medium (PE) for said sample, said chamber being connected to a pump, referred to as the primary pump (PP), suitable for maintaining a pressure below 10−2 mbar within said chamber; − a source (SN) for generating an
incident beam (NB) of neutral atoms or molecules having an energy of between 50 eV and 5 keV, with a
divergence less than or equal to 0.05°, said source being arranged to direct said
incident beam (NB) within said chamber through an inlet (EF) to said surface (SE) to be characterised with an
angle of incidence (θ i n ) less than or equal to 10° relative to the plane of said surface, the neutral atoms or molecules of said
incident beam (NB), forwardly scattered by said surface (SE), forming a diffracted beam (DB); and − a detection
enclosure (ZDU) connected to said chamber and connected to a pump, referred to as UHVP pump, comprising: − an
assembly of concentric tubes (Ens), each tube (T1, T2) having one end, referred to as the inlet end, with an opening (O1, O2), said
assembly comprising a tube having a smallest
radius (T1) and a length L; − a position-sensitive
detector (Det) suitable for detecting a
diffraction pattern (FD) of the neutral atoms or molecules of said diffracted beam; said length L and said openings (O1, O2) being suitable for transporting said diffracted beam to the
detector without losing spatial information regarding said surface (SE), said openings and said UHVP pump being suitable for maintaining a pressure below 10−5 mbar within the detection
enclosure.