The
linear array micro-nano focus X-
ray source for a micro-nano CT
system. The
linear array micro-nano focus X-
ray source for the micro-nano CT
system comprises cathodes 2, grids 3, anodes 4, focusing electrodes 5, magnetic solenoids 7, deflecting electrodes 8 and a target 9; the cathodes are used for producing electrons, the anodes are used for
electron acceleration, the grids are arranged between the anodes and the cathodes and used for adjusting beam intensity of
electron emitted by the cathodes, the focusing electrodes are used for completing first-time focusing of accelerated electrons, the magnetic solenoids are used for completing second-time focusing of the electrons, and the deflecting electrodes are used for controlling the position that the electrons hit on the target. By means of the
linear array micro-nano focus X-
ray source for the micro-nano CT
system, static CT scanning can be achieved, namely, a
radiation source, an object to be detected and a
detector are all in a static state,
electron beam scanning substitutes for mechanical scanning, thus error caused by mechanical scanning can be avoided, small external disturbance, small size, light weight and fast detection speed can be obtained, and linear array micro-nano focus X-ray source for the micro-nano CT system can be applied to CT systems of different types.