39 results about "Plasma heating" patented technology

The invention provides a method for improving the film thickness stability of semiconductor process equipment. The method comprises the following steps: judging whether the accumulated film thickness of a spray header reaches a preset threshold value or not, and if so, executing cleaning; the step of plasma heating is executed after cleaning is finished, the temperature of a spray header is increased through the bombardment effect of non-reactive gas plasma, and the problem that the film thickness jumps in the initial stage of cleaning is solved; when the deposition process is executed, the film thickness compensation step is executed according to the current accumulated film thickness data, the deposition time is adjusted by establishing a deposition rate attenuation model, and the problem that the film thickness is reduced under the high accumulated film thickness is solved. According to the invention, the defect of no active temperature control machine can be made up, and the film thickness fluctuation between wafers is controlled within 1%.

The embodiment of the invention provides a pole piece processing device and method, a pole piece, a battery monomer, a secondary battery and an electric device, in the pole piece processing device, the pole piece comprises a current collector and a film layer arranged on the surface of at least one side of the current collector, and the device comprises a plasma heating module used for applying a plasma beam to the film layer, the power P of the plasma heating module is greater than or equal to 1kW and less than or equal to 25kW; and the conveying module is used for conveying the rolled pole piece to the plasma heating module along the feeding direction. The treatment device can improve the wettability of the pole piece and reduce the expansion rate of the pole piece.

The invention discloses a furnace top gas cyclic reforming process and system, and the reforming process comprises the following steps: S1, heating furnace top gas generated by a blast furnace to 1000-1200 DEG C to obtain high-temperature gas; s2, mixing the high-temperature coal gas with coal, and carrying out electromagnetic induction heating coal gas reforming reaction to generate reduced coal gas which is 900-1000 DEG C and contains CO and H2; s3, performing plasma heating on the reduced gas to 1400-1800 DEG C to obtain high-temperature reduced gas; s4, recycling the high-temperature reduction coal gas to the lower part of the blast furnace for circular treatment; according to the method, a carbon capture device of a conventional oxygen blast furnace and a top combustion type gas heating furnace and a CO2 removal device of a carbon circulation blast furnace are replaced by circular reforming of the furnace top gas, so that the energy consumption and the equipment investment of the technological process are reduced.

The invention discloses a double-flow slab tundish with a double-electrode plasma heating function. The double-flow slab tundish comprises a tundish body and a tundish cover arranged at the top of the tundish body, and a turbulence controller is arranged at the bottom of the tundish body; a barrage structure is arranged at one end of the interior of the tundish, and a uniflow control wall structure is arranged at the other end of the interior of the tundish. And a dual-electrode plasma heating device is arranged on the ladle cover. Single-flow pouring of the double-flow tundish is achieved, the size of a low-temperature area and the size of a dead area are reduced, slag entrapment is prevented, the temperature in the tundish is uniform, and the plasma heating efficiency is improved. And meanwhile, the tundish casting allowance is reduced.

The invention discloses an aerosol generating device. The aerosol generating device comprises a heating body and a control circuit. The control circuit is configured to heat the heating element by a plasma pulse heating method. According to the aerosol generating device, the control circuit adopts a plasma pulse heating mode to heat the heating body. The plasma heating has the characteristic of rapid heating and cooling, so that the time delay between the heating curve and the heating power is relatively small, the temperature of the heating body can be accurately controlled, the phenomenon that the aerosol generating substrate is burnt is avoided, and the taste is ensured. And by adopting a pulse heating mode in plasma heating, the temperature fluctuation of the heating body can be controlled, the kinetic reaction in the heating process is enriched, and the taste is further improved.

The application relates to the technical field of semiconductor equipment, in particular to a chuck and a semiconductor equipment, which comprises a chuck body, a flow channel is arranged in the chuck body, a plurality of convex parts are arranged on the surface of the chuck body for carrying a wafer, and the plurality of convex parts are arranged at intervals, a plurality of blocking parts are arranged in the chuck body, the blocking parts are arranged between the flow channel and the convex parts, and the blocking parts are arranged along the axial direction of the chuck body, the projection of each blocking part at least partially coincides with the projection of the corresponding convex part, and the thermal conductivity of the blocking parts is lower than that of the chuck body. By arranging the blocking parts below the high-thermal-conductivity regions, i.e. the convex parts, of the chuck, the blocking parts can reduce the thermal conductivity from the wafer to the chuck cooling in the corresponding local regions, thereby targetedly compensating the heat conduction difference caused by the structural difference between the direct contact area and the non-direct contact area, so that the temperature change trend under the plasma heating condition is consistent in each region of the wafer, and the uniformity of the wafer temperature is improved.

The invention discloses a control method of an aerosol generating device. The control method comprises the steps that the current heating time of the plasma heating assembly is obtained; inquiring the current set output power of the plasma power supply corresponding to the current heating time of the plasma heating assembly according to a preset curve graph, wherein the preset curve graph is a corresponding relation curve graph of the heating time and the set output power; querying the set frequency of the switch corresponding to the current set output power according to a mapping relation table, wherein the mapping relation table is a mapping relation table of the set output power and the frequency of the switch; and controlling the switch to work according to the set frequency of the switch. Thus, the current set output power of the plasma power supply can be determined according to the current heating time of the plasma heating assembly, the frequency of the switch is flexibly adjusted according to the set output power determined in real time, and then the purposes of optimizing performance and reducing loss are achieved.

The application discloses a feeding and heating remote control system for manufacturing nano metal powder, which comprises internet, a switch, and a server computer, and is characterized in that the system further comprises a metal material feeding device, a client APP, a single-chip microcomputer controller, a radar liquid level meter, an infrared thermometer, a high-frequency generator, a plasma power supply, and a high-temperature evaporation device; the server computer comprises CPU programming software and nano metal powder feeding and heating automatic control software; the client APP is a nano metal powder production feeding and heating remote control software, and a control interface of the client APP comprises plasma heating control, inductance heating control, furnace temperature setting, and feeding setting; the feeding setting comprises automatic feeding and manual feeding, and the automatic feeding comprises feeding amount setting and feeding frequency setting; due to the adoption of the internet and the client APP, feeding and heating intelligentization of nano metal powder production can be realized through remote control, production personnel can be saved, occupational hazards of operating personnel under high temperature can be avoided, production cost can be reduced, and the production efficiency of the nano metal powder can be improved.

The invention discloses a plasma hot blast stove consolidation reduction material system using CO as a medium. The plasma hot blast stove consolidation reduction material system comprises a plasma heating device, a consolidation reduction material device, a preheating air supply device and a cooling device. The material consolidation and reduction device comprises a preheating section, a consolidation and reduction section and a cooling section and is used for sequentially preheating, consolidating and reducing and cooling the materials, so that the materials in the form of powder pellets form target materials; the preheating gas supply device is used for conveying preheating gas generated by flue gas waste heat and material sensible heat in the consolidation reduction section according to a preset first temperature range into the preheating section and preheating the materials; the plasma heating device adopts CO as a medium to generate high-temperature CO plasma gas, and the materials in the consolidation reduction section are consolidated and reduced through the high-temperature CO plasma gas according to a preset second temperature range; and the cooling device adopts CO as a medium to generate low-temperature gas in a preset third temperature range, and conveys the low-temperature gas to the cooling section, so that a target material can be formed when the material is cooled to be less than or equal to 100 DEG C.

A long-pulse, high-power electron beam using a plasma emitter for plasma heating includes an arc plasma source, an electron optical system consisting of a system of accelerating grids, a beamline including a magnetic system for providing effective electron beam shaping, transport, and ultimately injection into a plasma confinement device of interest, a plasma generator coil, a plasma emitter coil, a lens coil, and a beam transport coil. In one embodiment, the electron beam source further comprises a beam emitter configured to provide an annular beam.

This invention proposes a plasma-heated direct reduction vertical shaft furnace and a method for reduction ironmaking. The vertical shaft furnace has a furnace body and a hopper. The furnace body includes an independent cylinder and a furnace cooling section. The independent cylinder is connected to the hopper, and hollow graphite electrodes are installed on the independent cylinder. The hollow graphite electrodes are connected to a reducing gas source device to ionize a first portion of the reducing gas supplied by the reducing gas source device and generate high-temperature ionized gas. The furnace cooling section is located below the independent cylinder and is connected to the reducing gas source device. A second portion of the reducing gas supplied by the reducing gas source device enters the furnace cooling section and is preheated by the high-temperature reduced iron therein. The preheated second portion of the reducing gas enters the independent cylinder and, together with the high-temperature ionized gas, reduces the green pellets that have entered the independent cylinder. This invention avoids the safety hazards associated with heating outside the vertical shaft furnace and the transportation of high-temperature reducing gas.

This invention discloses a multi-element alloy catalyst for hydrogen production via water electrolysis in an alkaline electrolyzer, its preparation method, and its application, relating to the field of catalyst technology for hydrogen production via water electrolysis. The catalyst comprises a multi-element alloy component and a rare earth metal oxide component; based on the total mass of the multi-element alloy catalyst, the mass fraction of the multi-element alloy component is 70%–99.9%, and the mass fraction of the rare earth metal oxide component is 0.1%–30%. The multi-element alloy component contains Fe, Ni, Cr, and Mn. In preparation, the above metals are first mixed in proportion, then evaporated by plasma heating and condensed with an inert gas to obtain alloy powder, which is then mixed with rare earth oxide powder. This method is simple and easily scalable. The resulting catalyst exhibits high activity and long-term operational stability in the alkaline oxygen evolution reaction, while effectively reducing material costs by utilizing inexpensive metal elements, providing a feasible technical solution for efficient and low-cost hydrogen production via water electrolysis.

The invention discloses a control method of an aerosol generating device and the aerosol generating device. The control method of the aerosol generating device comprises the following steps: acquiring a corresponding relation between heating power and output voltage of a plasma heating body; judging the heating stage of the plasma heating body; when the plasma heating body is in the first heating stage, first target output voltage of the plasma heating body is determined according to first target heating power of the first heating stage and the corresponding relation; when the plasma heating body is in a second heating stage, second target output voltage of the plasma heating body is adjusted and controlled through PID based on second target heating power of the second heating stage; wherein the first target heating power is greater than or equal to the second target heating power. Therefore, in the arcing stage, the output voltage can quickly reach the breakdown voltage, and after arcing, continuous discharge can be realized, so that the risk that the insulating material is broken down is reduced, and the reliability of the plasma heating body is improved.

The utility model discloses a plasma coking device, which comprises: a coking main body, which comprises a carbonization chamber and a combustion chamber which are mutually independent, the carbonization chamber is internally provided with a first plasma heating assembly, and the first plasma heating assembly is used for heating blended coal in the carbonization chamber to generate raw coke oven gas; the coal gas condensation and purification assembly is communicated with the carbonization chamber through a first pipeline and is used for cooling tar in the raw coke oven gas to form purified coal gas. Plasma heating is adopted, the heating efficiency is high, temperature control is accurate, and the coking quality and the production efficiency can be improved. And meanwhile, the raw gas is treated through the gas condensation purification and plasma desulfurization assembly, so that the emission of pollutants is reduced, and better environmental protection benefits are achieved. Moreover, the desulfurized coal gas is combusted in the combustion chamber, so that the cyclic utilization of energy is realized, and the energy utilization rate is improved.

The application discloses a three-section composite kiln for preparing spherical alumina, which comprises an infrared preheating section, a microwave medium-high temperature phase conversion section and a plasma heating section which are sequentially and tightly connected; the microwave medium-high temperature phase conversion section is connected with the infrared preheating section and the plasma heating section through a first microwave energy suppressor, and the microwave medium-high temperature phase conversion section is connected with the plasma heating section through a second microwave energy suppressor, so as to protect the safety of the operators of the equipment; the infrared preheating section, the microwave medium-high temperature phase conversion section and the plasma heating section are sequentially connected to form the main body of the three-section composite kiln for preparing spherical alumina; the infrared preheating section is used as a pretreatment section and is used for drying and dehydrating alumina raw materials; the microwave medium-high temperature phase conversion section is used as a crystal phase conversion section and is used for converting alumina from a gamma phase to an alpha phase through microwave radiation; and the plasma heating section is used as a spherical shaping section and is used for spherical shaping of molten alumina particles through gas suspension turbulent flow.

Embodiments of the invention relate to systems and methods for cracking hydrocarbons into hydrogen gas and carbon using heating of a fluidized bed. The systems and methods utilize electrically conductive carbon or graphite particles as a fluidized bed material for heating hydrocarbon feedstock to at least a pyrolysis temperature. The electrically conductive carbon, graphite, or other particles may be heated by electrically powered sources that include induction heating, microwave heating, millimeter wave heating, joule heating and / or plasma heating. Combustion heating may also be employed in varying amounts with varying combinations of electrically powered heating sources.

The application provides a gyrotron fast voltage regulating method based on long pulse power forbidden zone prediction, belongs to the field of nuclear fusion plasma heating, and comprises the following steps: setting a target power, determining the adjustment range of the anode voltage of the gyrotron based on the target power; starting the gyrotron until the power of the gyrotron reaches a safe advance point, the safe advance point is located before the starting boundary of the power forbidden zone, and the anode voltage of the gyrotron is adjusted to the target voltage at one time according to the adjustment range; under the target voltage, the power of the gyrotron rapidly climbs to the target power after crossing the power forbidden zone and enters long pulse steady-state operation; and the system is also provided; the power forbidden zone and the safe advance point of long pulse operation are identified through statistical analysis, the anode voltage is adjusted at one time predictively when the starting process reaches the safe advance point, the power forbidden zone is quickly regulated after the voltage of the gyrotron is raised, and the gyrotron directly reaches the target power stable region, so that the long pulse starting success rate is significantly improved, the failure risk is reduced, and the starting time is shortened.

This invention discloses a laminar plasma in-situ atomization powder production device and method. The device includes a coaxially integrated laminar radio frequency plasma torch and a supersonic laminar gas atomizing nozzle. A metal wire is vertically fed into the core of the radio frequency plasma torch along its axial center. The end of the wire melts instantaneously without crucible constraint. The resulting melt is then sheared and broken by the supersonic laminar inert gas surrounding the outer ring of the plasma torch outlet, achieving in-situ powder production with simultaneous melting and atomization. This invention integrates plasma heating and melting with supersonic gas atomization within the same coaxial nozzle, eliminating the risk of crucible material contamination, avoiding component segregation problems during the smelting of refractory metals and refractory high-entropy alloys, significantly improving the yield of fine powder, and effectively suppressing the formation of satellite powder. It is suitable for the efficient and high-purity preparation of spherical powders of high-melting-point metals such as tungsten, molybdenum, tantalum, niobium, and rhenium, as well as their multi-component high-entropy alloys.

A control method for an aerosol-generating apparatus. The control method comprises: (01) acquiring the current heating time of a plasma heating assembly; (02) on the basis of a preset curve graph, creating a query for the current set output power of a plasma power source which corresponds to the current heating time of the plasma heating assembly, wherein the preset curve graph is a curve graph of correspondences between heating times and set output powers; (03) on the basis of a mapping relationship table, creating a query for a set frequency of a switch which corresponds to the current set output power, wherein the mapping relationship table is a table of mapping relationships between set output powers and frequencies of the switch; and (04) on the basis of the set frequency of the switch, controlling the switch to operate.

The plasma heat preservation device for the discharging section of the calcining kiln and the calcining kiln are protected. The plasma heat preservation device is provided with a heat insulation sleeve, a heating channel is formed in the bottom of the heat insulation sleeve, and a plasma heating spray gun is arranged to preserve heat of the discharging section. A guide wall is arranged at the lower end of the heat insulation block; and an axial driving mechanism is arranged. The calcining kiln provided by the invention is provided with the plasma heat preservation device. The spray gun is used for heating the discharging section, so that the molten material can be effectively prevented from being cooled and solidified in the discharging section. The heat insulation sleeve effectively inhibits hot air around the discharging section from diffusing outwards, the heat insulation block staggered with the position of the spray gun is blocked below the heating channel, and hot air escaping from the position can be effectively reduced. When the spray gun is driven by the axial driving mechanism to axially move front and back, the spray gun pushes the heat insulation block outwards to achieve avoidance, the heat insulation block originally corresponding to the spray gun in position is blocked below the corresponding position of the heating channel after the spray gun moves, and hot air escaping from the position is effectively reduced.

The invention discloses a safe insulating lifting translation adjusting support frame, and relates to the technical field of plasma heaters, the safe insulating lifting translation adjusting support frame comprises a first mounting fixing plate, a plurality of second mounting fixing plates are arranged on the outer side edge of the first mounting fixing plate, and four first dovetail groove guide rails are arranged at the top of the first mounting fixing plate; when the electric arc is ignited between the cathode and the anode, the electric arc is blown into the tube by rotating air flow tangentially entering the air inlet chamber, the main part of the arc column is compressed and stabilized on the axis by means of the pressure gradient of the rotating air, and the arc column is communicated with the tube wall of the anode through a radial electric arc column with a very short tail end; the potential difference between the arc column with the potential changing along with the length and the metal electrode tube with the fixed potential is a quantity changing along with the length.

This invention relates to the field of metal powder preparation technology, specifically a method for producing stainless steel powder using a combination of AOD refining and induction furnace atomization. This method eliminates the traditional LF furnace temperature and composition adjustment process after AOD deep decarburization, and also eliminates the tundish graphite electrode plasma heating or double graphite electrode electroslag heating process. Instead, a large and a small induction furnace handle the receiving, heating, holding, precise temperature control, and stable flow supply of molten steel, which is then atomized through nozzles to produce powder. This method avoids the 0.03%–0.05% carbon increase in the LF process and the 0.01%–0.03% carbon increase in the tundish graphite electrode / electroslag heating process. It solves the problem that traditional processes cannot stably produce ultra-low carbon duplex stainless steel powder with a carbon content ≤0.03%, and has the advantages of a short process, no carbon increase, and suitability for continuous industrial production.

The invention discloses an air-breathing type electromagnetic propulsion device for an ultra-low orbit satellite, and relates to the technical field of electromagnetic acceleration propulsion. In the device, an air-breathing type gas collecting assembly collects and compresses mixed gas of an ultra-low orbit; the radio frequency plasma ionization assembly ionizes the composite working medium gas to form plasma; the plasma heating acceleration assembly injects energy of a high-power radio frequency power supply into plasma through electromagnetic wave coupling, and heating and acceleration of the plasma are achieved. The vector thrust control assembly restrains and controls the heated and accelerated plasma to form a directional ion beam; the electric propulsion main control assembly collects key state parameters of the air suction type gas collection assembly, the radio frequency plasma ionization assembly, the plasma heating acceleration assembly and the vector thrust control assembly through sensors, and closed-loop control is conducted on the four assemblies according to received or preset control instructions and in combination with the key state parameters. Efficient ionization can be achieved under low working medium pressure, and wide-load efficient and stable operation can be achieved.

The application provides a solid waste treatment device, which comprises a solid waste receiving chamber and a melting chamber. The solid waste receiving chamber is used for receiving solid waste. The melting chamber is in communication with the solid waste receiving chamber, and the melting chamber comprises a plasma heating device and a containing part. The plasma heating device is used for melting treatment of the solid waste to form gas and molten slag. The containing part is in communication with the outside through a first slag discharge pipeline and a second slag discharge pipeline. The molten slag has an overflow liquid level and a minimum liquid level, the inlet of the first slag discharge pipeline is arranged at the overflow liquid level, the inlet of the second slag discharge pipeline is below the minimum liquid level, and the second slag discharge pipeline can be switched between an open state and a closed state, so that the molten slag can be discharged from the above two slag discharge pipelines simultaneously or separately. The solid waste treatment device has the characteristics of high melting efficiency, fast reaction rate of organic matter, more thorough decomposition, better decomposition effect and the like. Moreover, the double-pipeline slag discharge mode can realize automatic slag discharge of the molten slag.

The invention provides a gyrotron rapid voltage regulation method based on long pulse power forbidden zone prejudgment, and belongs to the field of nuclear fusion plasma heating, and the method comprises the steps: setting target power, and determining the adjustment amplitude of the gyrotron anode voltage based on the target power; starting the gyrotron until the power of the gyrotron reaches a safety advance point which is located before the starting boundary of the power forbidden zone, and adjusting the anode voltage of the gyrotron to the target voltage at one time according to the adjustment amplitude; under the target voltage, the power of the gyrotron rapidly passes through a power forbidden zone and then climbs to the target power, and enters long-pulse steady-state operation; the invention further provides a system. A power forbidden zone and a safety advance point of long pulse operation are identified through statistical analysis, and the anode voltage is pre-judged and adjusted at one time when the safety advance point is reached in the starting process, so that the gyrotron quickly adjusts the voltage of the power forbidden zone after boosting, and directly reaches a target power stable zone; therefore, the long-pulse starting success rate is obviously improved, the fault risk is reduced, and the starting time is shortened.

This invention discloses a millimeter-wave power monitoring and compensation method and system for ECRH systems, belonging to the field of magnetic confinement nuclear fusion plasma heating and microwave measurement technology. The invention constructs an offline training dataset with time delay alignment under energy integral constraints to train a millimeter-wave power thermal drift compensation model with detector voltage and detector temperature as inputs. After quantizing the model into a low-bit model, it is deployed on an edge control platform, forming a dual-rate compensation architecture of "slow-loop inference - fast-loop execution": the slow loop periodically infers dynamic compensation coefficients, and the fast loop uses these coefficients to perform real-time linear compensation of the high-speed detector voltage and execute microsecond-level interlocking protection. This invention combines the high-speed response of diode detectors with the high precision of calorimetry, enabling high-precision, low-delay, and highly robust power monitoring and interlocking protection under long-pulse, high-power conditions, significantly improving the safety of fusion device operation and the accuracy of physical analysis.

The invention discloses a plasma hot blast stove yellow phosphorus consolidation reduction material system using CO as a medium. The system comprises a plasma heating device, a consolidation reduction material device and a cooling device. The material consolidation and reduction device comprises a preheating section, a consolidation and reduction section and a cooling section and is used for sequentially preheating, consolidation and reduction and cooling the materials, so that the powdery and pelletized materials form target materials, and the target materials are yellow phosphorus; preheated gas generated by flue gas waste heat and material sensible heat in the consolidation reduction section according to a preset first temperature range is conveyed into the preheating section and preheats the materials; the plasma heating device adopts CO as a medium to generate high-temperature CO plasma gas, and the materials in the consolidation reduction section are consolidated and reduced through the high-temperature CO plasma gas according to a preset second temperature range; and the cooling device adopts CO as a medium to generate low-temperature gas in a preset third temperature range and conveys the low-temperature gas to the cooling section, and the material is cooled to 70-90 DEG C to form a target material.

A mobile fusion device (MFD) comprises three main sections: the MFD reactor (467), MFD support sub-systems (468), and the MFD support and fuel injection sub-systems (469), which are indicated by broken lines in Figure 1 The MFD reactor (467) is where the Deuterium and Tritium fuel is heated to high enough temperatures and densities and confinement times that fusion occurs, releasing neutrons that are absorbed in and heats up the 17Li-83Pb breeder blanket where more Tritium fuel is bred and where heat is transferred to Helium coolant. The MFD support sub-systems (468) houses auxiliary power units that generate electricity to power the electrical sub-systems of the MFD, and houses the MFD control computer, and where the Helium coolant is cryogenically cooled and purified, and where the 17Li-83Pb breeder blanket fluid is purified by separating and storing Deuterium fuel and Tritium fuel and Helium coolant, and where a Helium heat exchanger is located. The MFD support and fuel injection sub-systems (469) houses Deuterium and Tritium neutral beam injection plasma heating systems and a Deuterium and Tritium fuel gas puffer system and a Deuterium and Tritium fuel storage and pellet manufacturing system, and where the 17Li-83Pb breeder blanket fluid is purified by separating and storing Deuterium fuel and Tritium fuel and Helium coolant, and where a Helium heat exchanger is located, and where the Helium coolant is cryogenically cooled and purified, and houses auxiliary power units that generate electricity to power the electrical sub-systems of the MFD. The MFD is housed within a multi-layered pressurised outer containment pod MLP, which has a multi-layered pressurised rear access hatch MLH. The MFD is mounted on a sliding raft SR for ease of access.

A beam of lithium plasma comprising 6Li and 7Li is generated using a helicon plasma source 105, and 6Li is selectively heated within the beam using a plasma heating module 130. The beam is conveyed al

The invention discloses a plasma gas heating-reforming intelligent regulation and control system and method based on deep reinforcement learning and a storage medium, and relates to the technical field of metallurgical gas treatment. The system comprises a gas distribution module, a plasma heating module, a sensing and monitoring module, a data acquisition and communication module and an AI intelligent control module, and dynamic optimization of process parameters is realized through a plasma heating-reforming integrated system integrating an AI self-learning algorithm and an artificial intelligence control technology.