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382results about How to "Efficient deposition" patented technology

Sputtering Target of Nonmagnetic-Particle-Dispersed Ferromagnetic Material

Provided is a sputtering target of nonmagnetic-particle-dispersed ferromagnetic material comprising a phase (A) such that nonmagnetic particles are dispersed in a ferromagnetic material formed from a Co—Cr alloy containing 5 at % or more and 20 at % or less of Cr and Co as the remainder thereof, and schistose textures (B) with a short side of 30 to 100 μm and a long side of 50 to 300 μm formed from a Co—Cr alloy phase in the phase (A); wherein each of the foregoing nonmagnetic particles has such a shape and size that the particle is smaller than all hypothetical circles with a radius of 1 μm around an arbitrary point within the nonmagnetic particle, or a shape and size with at least two contact points or intersection points between the respective hypothetical circles and the interface of the ferromagnetic material and the nonmagnetic material. Consequently, obtained is a high-density sputtering target of nonmagnetic-particle-dispersed ferromagnetic material whose crystal grains are fine, which realizes improvement of PTF (pass through flux) of the target, high-speed deposition with a magnetron DC sputtering system, reduction in the particles (dust) and nodules generated during the sputtering process, minimal variation in quality, and improvement of mass productivity.
Owner:JX NIPPON MINING& METALS CORP

TM021 modal high-power microwave plasma diamond film deposition device

The invention provides a TM021 modal high-power microwave plasma diamond film deposition device. The TM021 modal high-power microwave plasma diamond film deposition device comprises an upper cylinder, a lower cylinder, an adjustable upper cavity, a microwave reflecting plate, a deposition table, a microwave coaxial excitation port, a microwave quartz port, a gas inlet, a gas outlet, a temperature measuring hole, an observing window and the like. The TM021 modal high-power microwave plasma diamond film deposition device has TM021 modal electric field distribution and the characteristics of centralized electric field distribution in a microwave resonator and stable excited plasma locations. The distribution of plasmas in the device can be optimized in real time through a regulating mechanism of the device. An annular microwave quartz window placed below the deposition table can be prevented from being excessively heated, polluted and etched by the plasmas. The inner wall of a resonant cavity is far away from a high-temperature plasma zone, so that the thermal radiation on the inner wall of the cavity is weakened, and foreign matter deposition is avoided. Each main part of the device can be directly water-cooled. Due to the advantages, the device can be applied to the input of relatively high-power microwaves, and the high-efficiency deposition of large-area high-quality diamond films is realized.
Owner:HEBEI PLASMA DIAMOND TECH

Ellipsoidal high-power microwave plasma diamond film deposition device

The invention relates to an ellipsoidal high-power microwave plasma diamond film deposition device which is composed of a staisecase annular microwave coupled system, an annular quartz microwave window arranged at the staircase of an annular antenna, an ellipsoidal microwave resonant cavity, an adjustable deposition table, a conical upper reflecting body, an adjustable cylindrical lower reflecting body, an inlet and outlet, a temperature measurement hole, a view window and the like. By utilizing the design of the ellipsoidal upper and lower focal points, the conical upper microwave reflecting body is positioned on the upper focal point, the deposition table is positioned on the lower focal point, and the electric field is distributed centrally, so the excited plasma has high position stability and high density; the hidden microwave window can be protected from plasma heating, pollution and etching; the adjustable microwave lower reflecting body and the deposition table optimize the plasma distribution in real time; the inner wall of the ellipsoidal resonant cavity is far from the high-temperature plasma region, so that the heat radiation of the plasma to the inner wall of the cavity is reduced, thereby avoiding depositing foreign matters; and all the components of the device are cooled with water. The device can implement high-efficiency deposition of a large-area high-quality diamond film under the condition of high power.
Owner:HEBEI PLASMA DIAMOND TECH
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