Mask and container and manufacturing apparatus

a technology applied in the field of masks and containers and manufacturing apparatuses, can solve the problems of high production cost of light-emitting devices, low utilization efficiency of expensive el materials in the formation of el layers, and easy non-uniform film thickness in the central zon
US20050034810A1Inactive Publication Date: 2005-02-17SEMICON ENERGY LAB CO LTD
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
SEMICON ENERGY LAB CO LTD
Publication Date
2005-02-17
Estimated Expiration
Not applicable · inactive patent

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Abstract

The present invention provides a large mask with a high mask accuracy for conducting selective deposition on a substrate with a large surface area. In accordance with the present invention, the mask body is fixed in a fixing position disposed on a line passing through a thermal expansion center in the width of the mask frame. Further, in accordance with the present invention, the substrate and mask body are fixed and deposition is carried out by moving the deposition source in the X direction or Y direction. A method comprising moving the deposition source in the X direction or Y direction is suitable for deposition on large substrates.
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Description

DETAILED DESCRIPTION OF THE INVENTION TECHNICAL FIELD TO WHICH THE INVENTION BELONGS

[0001] The present invention relates to a film forming apparatus employed for forming a film of a material capable of forming a film by deposition (referred to hereinbelow as a deposition material) and a production apparatus comprising such a film forming apparatus. In particular, the present invention relates to a mask employed for deposition in which a film is formed by evaporating a deposition material from a deposition source provided opposite to a substrate, a container for accommodating the deposition material, and a production apparatus. PRIOR ART

[0002] Light-emitting elements using organic compounds featuring small thickness and weight, fast response, DC low-voltage drive, and the like, as light-emitting substances have been expected to find application in flat panel displays of the next generation. In particular, display devices in which light emitting elements are disposed as a matrix hav...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
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