223 results about "Coating deposition" patented technology

The invention discloses a nuclear zirconium alloy cladding high-temperature oxidation resistant composite coating and a preparation method thereof, and belongs to the technical field of nuclear zirconium alloy coatings. According to the preparation method disclosed by the invention, through component gradient structure design, Cr ion pretreatment activation, deposition of a pure Cr inner coating, deposition of a Cr70Al30 intermediate coating and deposition of a Cr50Al50 outer coating are sequentially carried out on the surface of a nuclear zirconium alloy cladding, and the Cr-Cr70Al30-Cr50Al50 composite coating zirconium alloy cladding with a three-layer structure is obtained. According to the method, outward migration of the Al element is effectively limited while the excellent anti-oxidation characteristics of the Cr and Al elements are fully utilized, the coating has the excellent high-temperature oxidation performance, and the requirement for the service performance of the surface coating of the zirconium alloy cladding at the extremely high temperature is met.

The invention discloses a partitioned multifunctional metal double-cavity vacuum coating process and system, and belongs to the technical field of material surface treatment. The process comprises the steps of base material pretreatment, double-cavity preparation, vacuum inspection, first cavity bottom layer deposition, vacuum transfer, second cavity functional layer deposition and cooling, the double cavities are provided with corresponding target materials respectively, and parallel operation and vacuum seamless transfer are supported; the system comprises double coating cavities, a vacuum transmission channel, a vacuum acquisition and control module, a coating deposition module, a workpiece bearing module and a process parameter regulation and control module, and each of the double cavities is provided with a multi-target mounting rack and carries a real-time monitoring unit and an intelligent control system. Integrated preparation of the composite film layer and synchronous production of multifunctional workpieces are achieved, operation gaps are eliminated, the compactness and adhesive force of the film layer are improved, parameter deviation and the reject ratio are reduced, and batch production requirements are met.

The invention discloses a preparation method and application of a plasma etching resistant coating, and relates to the technical field of coatings. Comprising the steps that a yttrium oxide layer is prepared through a low-pressure plasma spraying method, the yttrium oxide layer comprises a relative porous layer (the porosity is 1%-3%) and a compact layer (the porosity is smaller than 1%) which are sequentially stacked, and the relative porous layer is used for making contact with a base body. By adopting low-pressure plasma spraying, the yttrium oxide layer with controllable coating morphology and thickness can be obtained, and the thermal expansion coefficient mismatch between the substrate and the compact layer can be effectively relieved through the relative porous layer close to the substrate; the compact layer on the surface is uniform in structure, low in porosity, excellent in cohesion strength and excellent in plasma etching resistance, plasma and a matrix can be isolated, and generation of particles in the etching process is avoided. The compact layer and the relatively porous coating are both prepared on the basis of the same powder material and by adopting the same coating deposition equipment, so that the production efficiency can be improved, and the production cost and the pollution risk caused by transfer between production steps can be reduced.

A solid electrode includes particles of an electroactive material, a solid electrolyte comprising particles of an ionic conducting compound having at least one halogen element, a conductive carbon, and a coating deposited on the particles of the electroactive material, the particles of the solid electrolyte, or a combination thereof. The coating includes a metal halide, a metal sulfide, a metal phosphide, a metal oxide, a metal selenide, or a combination of two or more thereof. A method for preparing the solid electrode includes milling a mixture of the electroactive material, the conductive carbon, and the solid electrolyte to produce the coated solid electrode material comprising the coating derived from decomposition products of the ionic conducting compound, the coating deposited on the particles of the electroactive material, the solid electrolyte, or a combination thereof.

The invention discloses a high-flux anti-pollution nanofiber membrane modified by a nanoparticle reinforced coating and a preparation method of the high-flux anti-pollution nanofiber membrane. The nanofiber membrane is prepared by doping hydrophilic nanoparticles into a spinning solution and coupling an electrostatic spinning process with a functional coating for modification. The hydrophilic nano-particles are selected from hydrophilic modified inorganic nano-particles, organic nano-particles, carbon-based nano-materials or metal organic framework materials. Nanoparticles, a membrane base material and a solvent are blended to form a uniform spinning solution, and functional coating deposition is performed after electrostatic spinning forming. The method is simple and efficient in preparation process, and the obtained nanofiber membrane has excellent hydrophilicity and anti-pollution performance. The introduction of the nanoparticles not only realizes hydrophilic modification of the membrane surface, but also significantly enhances the bonding strength of the coating and the matrix, so that the membrane material has excellent selective separation performance on oil substances (the rejection rate is greater than or equal to 99%) and macromolecular impurities while maintaining high flux (pure water flux is 3000-4000 L.m <-2 >. H <-1 >), and the transmittance on protein can reach 99%. The membrane material also has outstanding flux recovery rate (greater than or equal to 90%) and long-term operation stability, and has wide application prospects in the fields of sewage treatment, food processing and the like.

The invention relates to the technical field of coating production, in particular to a method for improving the corrosion resistance of a coating through a PVD and ALD composite preparation technology, according to the method, the advantages of PVD and ALD preparation technologies are combined to deposit the coating, ALD intercalation layers are deposited at different positions of the coating prepared through PVD, and therefore the defects generated in the PVD coating deposition process are overcome. And analyzing the section and phase of the deposited coating by utilizing characterization equipment, and detecting electrochemical and corrosive wear properties in a 3.5 wt.% NaCl solution. The PVD coating is subjected to intermediate or surface treatment by adopting an ALD preparation technology, so that the electrochemical performance of the coating is effectively improved.

The invention relates to the technical field of automobile part production, in particular to a rearview mirror lens coating production method, system and equipment, and the method comprises the steps: sequentially depositing at least two functional film layers in the coating process, monitoring the thickness and uniformity of the film layers in real time, and generating a first film layer quality parameter set; based on the first film layer quality parameter set, predicting a deformation risk area of the lens in a subsequent calibration stage, and outputting a deformation risk level and a compensation suggestion parameter; according to the deformation risk grade and the compensation suggestion parameters, local driving force distribution of the deformable mold is adjusted in a self-adaptive mode, secondary forming processing is conducted on the lens, and actual shape deviation data are collected; and carrying out association analysis on the first film layer quality parameter set, the deformation risk level and the actual morphology deviation data, and dynamically optimizing a coating deposition path and a mold deformation compensation strategy for subsequent lens production. According to the invention, the problem of dynamic deformation of the rearview mirror lens caused by film layer stress accumulation in the film coating production process is effectively solved.

The invention discloses a preparation method of an optical fiber insulator, and relates to electrical equipment and insulator technologies, and the preparation method comprises the steps: carrying out spiral groove cutting on a composite core rod, and sequentially carrying out phosphating treatment, plasma activation and nano coating deposition treatment; performing fitting treatment on the optical fiber and the treated composite core rod; the surface of the composite core rod is wrapped with a prepared sheath, the sheath is of a microphase separation structure formed by mixing liquid crystal polymer LCP and hydrogenated nitrile rubber HNBR as base materials according to the specified mass ratio, injection molding is conducted through a magnetic field induction orientation technology, the axial thermal expansion coefficient of the sheath is reduced to 28 * 10 / K to be close to that of the core rod, and the core rod is made of a composite material. The radial thermal expansion coefficient is kept at 90 * 10 / K and is close to the umbrella skirt; the outer side of the sheath is provided with umbrella skirts, and the two ends of the composite core rod are provided with hardware fittings. According to the method, self-adaptive regulation and control of the thermal expansion coefficient of the sheath material can be realized, and the anchoring stability, the interface durability and the electrical reliability of the optical fiber are remarkably improved.

The invention relates to the technical field of coating preparation, and particularly discloses a high-performance multi-layer coating based on a magnetron sputtering technology and a preparation method thereof.The preparation method comprises the steps that pretreatment is conducted on a base material, specifically, cleaning, polishing and ion cleaning are conducted on the base material; a transition layer, a functional layer and a protective layer are sequentially deposited on the surface of a base material through the magnetron sputtering technology, a multi-layer alternating structure is formed, after each coating is deposited, the surface of the coating is cleaned and activated through the ion bombardment technology, the transition layer adopts a Ti target material, the functional layer adopts a CrAlN target material, and the protective layer adopts an Al2O3 target material; and low-temperature annealing treatment is conducted on the multi-layer alternating structure to eliminate internal stress and improve the compactness of the coating, and the high-performance multi-layer coating is prepared. Through multi-layer coating structure design and ion bombardment treatment, the interlayer binding force is remarkably improved, and the problems of coating stripping and cracking are solved.

The invention discloses a small hybrid spraying robot trajectory planning method and system for a local area of the surface of special equipment, and the method comprises the steps: S1, task shunting: determining a scene of visual shunting when a target area does not meet a repetitive or standardized repair condition, S2, point cloud acquisition and segmentation: segmenting a plane point cloud and a curved surface point cloud, and storing the segmented points; s3, deposition modeling: mapping the plane coating deposition model to a curved surface point cloud corresponding area according to a geometrical relationship to obtain a deposition model suitable for a free-form surface; s4, parameter joint optimization: establishing a deposition superposition model of a single track and an adjacent track, and solving the distance between the adjacent tracks and the running speed of the spray gun in a joint manner by taking the minimum coating thickness variance as a target; and S5, track generation: in a visual shunting scene, applying the optimal parameter pair output in the step S4 to set a path spacing and a speed, and generating an execution track. According to the method, in-situ repairing of the special equipment is achieved, adaptability is high, and precision is high.

The invention discloses a preparation method of graphite for a large semiconductor, and belongs to the technical field of graphite for semiconductors. The method comprises the steps of raw material pretreatment, forming process, graphitization, purification and post-treatment, wherein needle coke and a carbon-based functional material are mixed, and a carbon-based dispersing agent is added under the action of a gradient magnetic field for dispersion to obtain a pretreated raw material; filling the mixture into a carbon-based mold, carrying out cold isostatic pressing molding through cooperation of gradient pressure and a gradient magnetic field, and absorbing stress through a carbon-based buffer material to obtain a molded green body; placing the green body in a large graphitization furnace, regulating and controlling a magnetic field in sections, introducing mixed gas, strengthening the reaction through a carbon-based catalytic material, and prolonging the reaction time of a core part by utilizing gas backflow to complete graphitization and purification; and finally, carrying out plasma surface activation, boron nitride coating deposition and annealing treatment to obtain a graphite product for a large semiconductor. The problems that the purity of a large green body is out of control, the impurity removal gradient difference is large and the stress is large can be effectively solved, and the product performance is excellent.

The manufacturing method comprises the following steps that a basalt fiber / graphene modified epoxy resin base plate is prepared, a tungsten carbide reinforced titanium alloy honeycomb layer is formed through selective laser melting (SLM), the titanium alloy honeycomb layer is compounded to the surface of the base plate through vacuum diffusion welding, and the wear resistance of the container floor is enhanced. Gradient silicon nitride ceramic laser cladding is carried out on the surface of the composite substrate, and bionic micro-groove laser etching and diamond-like carbon (DLC) coating deposition are carried out on a cladding layer. According to the manufacturing method of the container floor with the enhanced wear resistance, compared with a traditional steel floor, the weight is reduced by 50% or above, meanwhile, the bending strength is improved to be larger than or equal to 320 MPa, through silane coupling agent pretreatment (KH-550) of basalt fibers and the nanometer enhancement effect of graphene, the impact resistance of the base plate is remarkably improved, and the harsh working condition requirements of high-frequency forklift loading and unloading are met.

The invention discloses a manufacturing process and equipment of a high-performance long-service-life cold working die. The process comprises the following steps: quenching and tempering a cold-work die steel blank to obtain a tempered martensite structure; plasma nitrocarburizing is carried out to form a reinforced diffusion layer; the micro-pit array is machined through pulse laser, and an annular heat-affected softening zone is formed around the opening of the pit; depositing a hard coating, and forming a cantilever structure on the edge of the micro pit; wherein plasma nitrocarburizing is carried out in a low-pressure plasma atmosphere, laser processing and coating deposition are carried out in a vacuum or protective atmosphere, and transfer among the steps is not exposed to the atmosphere. The invention further provides corresponding manufacturing equipment which comprises a heat treatment cavity, a plasma nitrocarburizing cavity, a surface micro-texture machining cavity, a coating deposition cavity and a vacuum transfer cavity. According to the invention, the hardness mutation between the coating and the matrix is relieved, a hardness gradient transition structure is constructed, the fatigue stripping resistance of the coating is obviously improved, and the service life of a mold is prolonged.

The invention is suitable for the technical field of aluminum material spraying control, and particularly relates to an electrostatic spray gun motion compensation method for eliminating aluminum material spraying yin and yang surfaces, and the electrostatic spray gun motion compensation method for eliminating aluminum material spraying yin and yang surfaces comprises the following steps: obtaining aluminum material surface structure information; determining a first type of area and a second type of area based on the aluminum material surface structure information; generating a first spraying parameter based on the first type of region, and generating a second spraying parameter based on the second type of region; generating a parameter mutation feature based on the first spraying parameter and the second spraying parameter; and when it is detected that the spray gun moves from the first type of area to the second type of area, a spray gun motion compensation track is generated based on the parameter mutation characteristics, the spray gun is controlled to adjust the first spraying parameter to the second spraying parameter, and meanwhile the spray gun moves from the first type of area to the second type of area according to the spray gun motion compensation track. According to the method, the problems of coating deposition deviation and asynchronous movement and parameter adjustment caused by parameter mutation are effectively reduced, and the yin-yang surface phenomenon is remarkably improved.

The invention relates to a polycrystalline cubic boron nitride coated cutting tool and a preparation method and application thereof.The polycrystalline cubic boron nitride coated cutting tool comprises a PCBN base body and a first coating formed on the PCBN base body, the PCBN base body is at least provided with a polycrystalline layer, the polycrystalline layer comprises cubic boron nitride, a first binder and a second binder, and the first coating is formed on the PCBN base body. The second binder is selected from a mixture of one or more of aluminum, titanium, cobalt, nickel, tungsten, niobium, tantalum and zirconium, and the ratio of the average particle size of the cubic boron nitride to the average thickness of the first coating is 0.5-2.5. The thermal expansion coefficient of the PCBN polycrystalline layer is matched with the thermal expansion coefficient of the coating by regulating and controlling the formula of the PCBN substrate (the type and proportion of the binder) and the formula of the coating, and the thermal stress between interfaces during cutting is reduced; and by regulating and controlling the thickness of the cubic boron nitride and the coating, the deposition nucleation of the coating is compact, and the hardness of the coating is matched with that of a polycrystalline layer.

The invention discloses a coating deposition process for an implant, and relates to the technical field of implant coating preparation, and the deposition process comprises the following steps: S1, base material pretreatment: placing a base material in a deionized water mixed solution for ultrasonic cleaning, adopting low-temperature plasma purification treatment, utilizing high-energy particles of plasma to bombard the base material, and using the high-energy particles of the plasma to bombard the base material; the preparation method comprises the following steps: removing surface and internal impurities, introducing active groups, forming a nanoscale rough interface with the surface roughness Ra of 50-200nm on the surface of a base material through a chemical etching process and femtosecond laser etching synergistic process, and carrying out vacuum drying on the base material; s2, metal gasification: placing a metal tantalum raw material in an upstream heating zone of the reaction chamber; the chemical vapor deposition (CVD) technology is adopted, osseointegration can be promoted, the infection risk can be reduced, the method is suitable for porous implantation instruments of the orthopedics department, the dental department and the like, the obtained coating technology is compatible with a complex base material structure, the clinical curative effect and the life quality of a patient are improved, large-scale production is supported, and development of a new material industry chain is promoted.

The invention belongs to the technical field of industrial coating engineering and automatic control, and relates to a steel member surface coating thickness control system based on machine vision, which is characterized in that electromagnetic characteristics of a liquid coating are sensed in real time through a dielectric parameter detection module; the rheological and dynamic behaviors of the coating are analyzed by utilizing a microdynamics measurement module and combining impact force sensing and structured light imaging; a direct measurement result of the machine vision module on the three-dimensional morphology of the coating is fused, and the information and the pose data of the spray gun are synchronously packaged into a physical state vector by means of a multi-source data fusion module; matching an optimal strategy through a collaborative decision control module, and generating a control instruction; and finally, a controlled fluid resonance perturbation field is formed in the jet flow, so that in-situ and self-adaptive regulation and control of the coating deposition process are realized. The method solves the problems that a traditional spraying process lacks real-time, quantitative and self-adaptive control capability on the coating deposition process and guarantees the coating thickness uniformity and the process stability.

The invention relates to a special-shaped pipe surface treatment technology, and provides an automatic electrostatic spraying parameter intelligent regulation and control method for solving the problem that the thickness of an electrostatic spraying coating of a special-shaped pipe is not uniform. Firstly, a special pipe three-dimensional geometric model is constructed by means of three-dimensional laser scanning, and an electrostatic field is simulated to obtain electric field distribution data. And then utilizing an improved genetic algorithm to optimize spraying parameters including spray gun voltage, current and the like. During spraying, parameters are monitored in real time through a sensor and are automatically adjusted after being compared with optimized values, and accurate regulation and control are achieved. According to the method, the accurate spraying process physical model and the coating deposition model are constructed, the uniformity and quality of the coating are effectively improved, material waste is reduced, the production efficiency is improved, an efficient and reliable solution is provided for special pipe surface treatment, and the method has good application prospects in the related industrial production field.

The invention provides a galvanized steel wire rope plastic coating device, and relates to the technical field of steel wire ropes, the galvanized steel wire rope plastic coating device comprises a box body, a storage cavity, a circulating conveying mechanism, a fixed shell I, a plastic coating mechanism, a fixed shell II and an air drying mechanism; a complex assembly process is not needed, the early-stage investment and installation difficulty of an enterprise can be reduced, meanwhile, all the mechanisms are compact in layout and small in occupied space, and the device is suitable for production scenes of different scales and convenient to apply and popularize in industrial production; stable conveying of the plastic coating material is achieved through the circulating conveying mechanism, deposition and blockage of the plastic coating material can be avoided, uniform feeding of the plastic coating mechanism is guaranteed, the problem that feeding of existing equipment is unstable is solved, meanwhile, the conveying amount of the plastic coating material can be accurately controlled by adjusting the rotating speed of a motor, and the feeding reliability is further improved; the output blade of the plastic coating mechanism can enable redundant plastic coating materials to flow back to the storage cavity through the output port, recycling of the plastic coating materials is achieved, material losses are reduced, the production cost is reduced, and the problem that waste of the plastic coating materials of existing equipment is serious is solved.

The invention provides a preparation method of a high-entropy nitride anti-erosion coating, which comprises the following steps: (1) polishing, cleaning and drying a sample in sequence, placing the sample in a vacuum coating chamber, introducing argon Ar, adjusting the flow of the argon Ar, and carrying out ion bombardment cleaning on the surface of the sample; (2) acquiring the optical emission intensity of the plasma after argon Ar is introduced and the optical emission intensity of the plasma after nitrogen N2 is introduced; (3) depositing a high-entropy alloy transition layer on the surface of the sample; (4) depositing a high-entropy nitride anti-erosion coating on the surface of the sample; and (5) taking out the sample to complete preparation of the coating on the surface of the sample. The preparation of the high-entropy nitride anti-erosion coating is completed by adopting a bipolar high-power pulse magnetron sputtering technology and an ion source to jointly construct a high-density plasma film forming environment, so that the nitridation reaction on the surface of the target material can be effectively inhibited, and the characteristic peak intensity of the plasma is kept unchanged; and the stability of plasma components in the film forming process is ensured.

This invention provides a high-entropy alloy nano-coating high-temperature oxidation-resistant modification preparation process, belonging to the field of coating modification technology. The high-entropy alloy nano-coating high-temperature oxidation-resistant modification preparation process specifically includes the following steps: S1. Target material selection and preparation; S2. Alloy substrate treatment; S3. Low-temperature nanocrystalline coating deposition; S4. Coating densification treatment; S5. Low-temperature recovery annealing; S6. Pre-oxidation treatment. Through the synergistic process of low-temperature preparation of the alloy nano-coating, densification annealing, and pre-oxidation, the high-temperature strength and phase stability of the coating are improved by utilizing the lattice distortion effect. A thermodynamically stable protective oxide film of aluminum oxide and chromium oxide is generated in situ on the surface, solving the problems of traditional chromium-based coatings such as few main components, poor oxidation resistance, and short lifespan. This significantly improves the service reliability and safety of nuclear reactor structural materials under high-temperature irradiation environments.

The invention relates to the technical field of electroplating pools, in particular to a device for improving electroplating uniformity of a VCP electroplating line, which comprises an electroplating pool, a metal mesh plate is fixed in the electroplating pool, a rotating handle is arranged below the metal mesh plate, the rotating handle is rotatably connected to a bottom plate of the electroplating pool, blades are fixed on the surface of the rotating handle, and a mounting frame is mounted at the top of the electroplating pool. A servo motor is mounted on the surface of the mounting frame, the power output end of the servo motor is in transmission connection with a driving shaft, and the bottom end of the driving shaft penetrates through the metal net plate and then is inserted into the top end of the rotating handle; the device has the beneficial effects that the rotating handle is driven to rotate through the servo motor, the blades are driven to forcibly stir electrolyte, metal ion diffusion is accelerated, and the concentration gradient is eliminated; electrolyte circulation is promoted in the stirring process, so that metal ions generated by anodic oxidation reaction are rapidly supplemented to a cathode area, the deposition rate of a plating layer is stabilized, and the phenomenon that the edge thickness of a workpiece is out of tolerance is reduced.

An apparatus is provided for coating deposition, particularly by chemical vapour deposition, on three-dimensional glass articles such as bottles. The apparatus lends itself to incorporation in a plant for a continuous production process for glass containers.

A method for preparing a TiAl / TiAlN / TiAlB / YiAlBN composite coating on the surface of a small milling cutter through direct current cathode arc comprises the steps that the milling cutter is pretreated, a thin film is deposited, a circuit board is cut and tested, and ultrasonic cleaning is conducted on the milling cutter through absolute ethyl alcohol and deionized water, so that no impurity adheres to the surface of the milling cutter, and follow-up deposition is easy; vactime DLC type thin film deposition equipment is used for conducting four times of different coating deposition on the milling cutter in sequence, and a TiAl / TiAlN / TiAlB / TiAlBN composite coating is obtained; a circuit board cutting test is carried out by using the milling cutter deposited with the coating, and high bonding strength and wear resistance between the composite coating deposited by the method and a substrate are confirmed.

To provide a coating member having a coating layer composed of BN on a metal base material containing Fe, in which the adhesion of the coating layer is secured and the reduction of the film deposition rate of the coating layer is suppressed.SOLUTION: The coated member 1 is provided with a metallic base material 10 containing Fe, an intermediate layer 20 containing Al, B, O and N, and a coating layer 30 composed of BN, and the intermediate layer 20 and the coating layer 30 are laminated on the metallic base material 10 in this order. The coated member 1 is manufactured by forming the intermediate layer 20 and the coating layer 30 on the surface of the metal base material 10 by an atomic layer deposition method.SELECTED DRAWING: Figure 1

The application relates to the field of cemented carbide surface coating, and particularly discloses a multi-element nano composite structure coating for a cemented carbide drill bit and a preparation method; the multi-element nano composite structure coating for the cemented carbide drill bit comprises the following specific steps: S1, polishing the surface of the cemented carbide drill bit, and then cleaning the surface of the drill bit by using an ultrasonic wave and a cleaning agent; S2, loading the pretreated drill bit into a furnace at an inclined angle, so that a cutting edge part faces a coating deposition source; S3, performing vacuum treatment on the loaded drill bit in a vacuum chamber and depositing a TiAlSiCrCN coating; the TiAlSiCrCN coating is a gradient coating, a TiAlSiN layer is first deposited on the surface of the drill bit, then a TiAlSiCrN coating is deposited, and finally a TiAlSiCN coating is deposited; S4, performing laser remelting on the surface of the coating after cooling, and finally performing grinding and polishing treatment, so that the multi-element nano composite structure coating for the cemented carbide drill bit is prepared; the composite structure coating prepared by the application can have better hardness and lubricity.

The invention discloses a vanadium-tungsten-titanium type SCR denitration catalyst and a preparation method thereof, and relates to the technical field of catalysts. According to the technical scheme, the preparation method comprises the following steps: S1, preparing a TiO2-coated ZrO2 core-shell composite carrier; s2, electromagnetic coupling field auxiliary tungsten loading; s3, microwave-enhanced vanadium loading; s4, depositing a coating: coating a polyacrylic acid-b-polystyrene layer on a product in the step S3 through atomic layer deposition to obtain the vanadium-tungsten-titanium type SCR denitration catalyst. The vanadium-tungsten-titanium type SCR denitration catalyst has excellent low-temperature activity and toxicity resistance, the replacement period of a catalyst module is prolonged to 6 years, and the service life is greatly prolonged.

This invention belongs to the field of thin film deposition technology and relates to a method for improving the uniformity and quality of DLC coatings prepared by PECVD. Based on PECVD equipment, a method for preparing uniform, highly wear-resistant / corrosion-resistant DLC coatings on irregularly shaped workpieces by controlling a rotating magnetic field is provided. The method includes a vacuum chamber system, a dynamic magnetic field generator, a radio frequency plasma excitation system, a dual-path gas supply system, and a vacuum and pressure regulation system. The dynamic magnetic field generator uses two sets of ring-arranged neodymium iron boron permanent magnets, driven by a motor to rotate the magnetic field vector. The top spray electrode and the bottom ring ground electrode form the main discharge circuit. The rotating magnetic field increases the number density of active groups and molecular kinetic energy during deposition. Different gas ratios are used during coating deposition to achieve high-density, high-quality DLC coatings. The workpiece for DLC coating deposition is placed at the bottom of the reaction chamber. This method is used to deposit uniform, highly wear-resistant, and highly corrosion-resistant DLC coatings on planar or irregularly shaped workpieces.

The invention relates to the technical field of LED display module preparation, in particular to a preparation method of an LED display module, which comprises the following steps: carrying out substrate pretreatment and anti-corrosion coating deposition; printing a high-thermal-conductivity silver adhesive and mounting the high-thermal-conductivity silver adhesive on the driving chip Carrying out flip-chip bonding and reflow soldering on the LED chip; performing nano-scale sealant vacuum filling and sealing; performing dynamic voltage driving circuit integration; embedding the micro-channel heat dissipation structure; and carrying out multispectral calibration and aging test. According to the invention, the titanium nitride coating and the bi-component modified silica gel are used for cooperative protection, the TiN coating is used for blocking water and oxygen permeation, and a flip-chip bonding process is combined to eliminate the oxidation risk of a lead, so that the light transmittance of the module is still greater than or equal to 95% in an environment of 85 DEG C / 85% RH, and the adaptability to a severe environment is remarkably improved; the driving efficiency of the module can reach 92% under the brightness of 1000 nits by combining heat dissipation of the micro-channel, meanwhile, the module supports wide-temperature work from-40 DEG C to 125 DEG C, and the problems of energy consumption and thermal runaway in a high-brightness scene are solved.

The utility model provides a clamping deposition device, including driving mechanism, upper support mechanism and lower support mechanism, driving mechanism includes driving piece and fixed piece, upper support mechanism includes upper bearing column, upper bearing column fixed connection on fixed seat, lower support mechanism includes lower bearing column and lower bearing column, lower bearing column fixed connection on driving piece, lower bearing column fixed connection on lower bearing column, lower bearing column fixed connection on driving piece, lower bearing column fixed connection on lower bearing column, lower bearing column fixed connection on driving piece, lower bearing column fixed connection on lower bearing column, lower bearing column fixed connection on lower bearing column. The lower bearing columns are fixedly connected to the lower loading piece, and the number of the upper bearing columns and the number of the lower bearing columns are not less than three; each upper bearing column and the corresponding lower bearing column are fixedly provided with supporting legs used for containing deposition products, and the driving parts are used for driving the lower bearing columns to move in a reciprocating mode, so that the supporting legs of the lower bearing columns move to the positions above or below the supporting legs of the upper bearing columns; the utility model relates to the field of coating deposition, in particular to a clamping deposition device which is used for solving the problems that deposition on the surface of a graphite base is incomplete, and deposition dead angles exist.