170 results about "Coating deposition" patented technology

The invention discloses a partitioned multifunctional metal double-cavity vacuum coating process and system, and belongs to the technical field of material surface treatment. The process comprises the steps of base material pretreatment, double-cavity preparation, vacuum inspection, first cavity bottom layer deposition, vacuum transfer, second cavity functional layer deposition and cooling, the double cavities are provided with corresponding target materials respectively, and parallel operation and vacuum seamless transfer are supported; the system comprises double coating cavities, a vacuum transmission channel, a vacuum acquisition and control module, a coating deposition module, a workpiece bearing module and a process parameter regulation and control module, and each of the double cavities is provided with a multi-target mounting rack and carries a real-time monitoring unit and an intelligent control system. Integrated preparation of the composite film layer and synchronous production of multifunctional workpieces are achieved, operation gaps are eliminated, the compactness and adhesive force of the film layer are improved, parameter deviation and the reject ratio are reduced, and batch production requirements are met.

The invention relates to the technical field of coating production, in particular to a method for improving the corrosion resistance of a coating through a PVD and ALD composite preparation technology, according to the method, the advantages of PVD and ALD preparation technologies are combined to deposit the coating, ALD intercalation layers are deposited at different positions of the coating prepared through PVD, and therefore the defects generated in the PVD coating deposition process are overcome. And analyzing the section and phase of the deposited coating by utilizing characterization equipment, and detecting electrochemical and corrosive wear properties in a 3.5 wt.% NaCl solution. The PVD coating is subjected to intermediate or surface treatment by adopting an ALD preparation technology, so that the electrochemical performance of the coating is effectively improved.

The invention relates to the technical field of automobile part production, in particular to a rearview mirror lens coating production method, system and equipment, and the method comprises the steps: sequentially depositing at least two functional film layers in the coating process, monitoring the thickness and uniformity of the film layers in real time, and generating a first film layer quality parameter set; based on the first film layer quality parameter set, predicting a deformation risk area of the lens in a subsequent calibration stage, and outputting a deformation risk level and a compensation suggestion parameter; according to the deformation risk grade and the compensation suggestion parameters, local driving force distribution of the deformable mold is adjusted in a self-adaptive mode, secondary forming processing is conducted on the lens, and actual shape deviation data are collected; and carrying out association analysis on the first film layer quality parameter set, the deformation risk level and the actual morphology deviation data, and dynamically optimizing a coating deposition path and a mold deformation compensation strategy for subsequent lens production. According to the invention, the problem of dynamic deformation of the rearview mirror lens caused by film layer stress accumulation in the film coating production process is effectively solved.

The invention discloses a preparation method of an optical fiber insulator, and relates to electrical equipment and insulator technologies, and the preparation method comprises the steps: carrying out spiral groove cutting on a composite core rod, and sequentially carrying out phosphating treatment, plasma activation and nano coating deposition treatment; performing fitting treatment on the optical fiber and the treated composite core rod; the surface of the composite core rod is wrapped with a prepared sheath, the sheath is of a microphase separation structure formed by mixing liquid crystal polymer LCP and hydrogenated nitrile rubber HNBR as base materials according to the specified mass ratio, injection molding is conducted through a magnetic field induction orientation technology, the axial thermal expansion coefficient of the sheath is reduced to 28 * 10 / K to be close to that of the core rod, and the core rod is made of a composite material. The radial thermal expansion coefficient is kept at 90 * 10 / K and is close to the umbrella skirt; the outer side of the sheath is provided with umbrella skirts, and the two ends of the composite core rod are provided with hardware fittings. According to the method, self-adaptive regulation and control of the thermal expansion coefficient of the sheath material can be realized, and the anchoring stability, the interface durability and the electrical reliability of the optical fiber are remarkably improved.

The invention relates to the technical field of coating preparation, and particularly discloses a high-performance multi-layer coating based on a magnetron sputtering technology and a preparation method thereof.The preparation method comprises the steps that pretreatment is conducted on a base material, specifically, cleaning, polishing and ion cleaning are conducted on the base material; a transition layer, a functional layer and a protective layer are sequentially deposited on the surface of a base material through the magnetron sputtering technology, a multi-layer alternating structure is formed, after each coating is deposited, the surface of the coating is cleaned and activated through the ion bombardment technology, the transition layer adopts a Ti target material, the functional layer adopts a CrAlN target material, and the protective layer adopts an Al2O3 target material; and low-temperature annealing treatment is conducted on the multi-layer alternating structure to eliminate internal stress and improve the compactness of the coating, and the high-performance multi-layer coating is prepared. Through multi-layer coating structure design and ion bombardment treatment, the interlayer binding force is remarkably improved, and the problems of coating stripping and cracking are solved.

The invention discloses a small hybrid spraying robot trajectory planning method and system for a local area of the surface of special equipment, and the method comprises the steps: S1, task shunting: determining a scene of visual shunting when a target area does not meet a repetitive or standardized repair condition, S2, point cloud acquisition and segmentation: segmenting a plane point cloud and a curved surface point cloud, and storing the segmented points; s3, deposition modeling: mapping the plane coating deposition model to a curved surface point cloud corresponding area according to a geometrical relationship to obtain a deposition model suitable for a free-form surface; s4, parameter joint optimization: establishing a deposition superposition model of a single track and an adjacent track, and solving the distance between the adjacent tracks and the running speed of the spray gun in a joint manner by taking the minimum coating thickness variance as a target; and S5, track generation: in a visual shunting scene, applying the optimal parameter pair output in the step S4 to set a path spacing and a speed, and generating an execution track. According to the method, in-situ repairing of the special equipment is achieved, adaptability is high, and precision is high.

The invention discloses a preparation method of graphite for a large semiconductor, and belongs to the technical field of graphite for semiconductors. The method comprises the steps of raw material pretreatment, forming process, graphitization, purification and post-treatment, wherein needle coke and a carbon-based functional material are mixed, and a carbon-based dispersing agent is added under the action of a gradient magnetic field for dispersion to obtain a pretreated raw material; filling the mixture into a carbon-based mold, carrying out cold isostatic pressing molding through cooperation of gradient pressure and a gradient magnetic field, and absorbing stress through a carbon-based buffer material to obtain a molded green body; placing the green body in a large graphitization furnace, regulating and controlling a magnetic field in sections, introducing mixed gas, strengthening the reaction through a carbon-based catalytic material, and prolonging the reaction time of a core part by utilizing gas backflow to complete graphitization and purification; and finally, carrying out plasma surface activation, boron nitride coating deposition and annealing treatment to obtain a graphite product for a large semiconductor. The problems that the purity of a large green body is out of control, the impurity removal gradient difference is large and the stress is large can be effectively solved, and the product performance is excellent.

The invention discloses a manufacturing process and equipment of a high-performance long-service-life cold working die. The process comprises the following steps: quenching and tempering a cold-work die steel blank to obtain a tempered martensite structure; plasma nitrocarburizing is carried out to form a reinforced diffusion layer; the micro-pit array is machined through pulse laser, and an annular heat-affected softening zone is formed around the opening of the pit; depositing a hard coating, and forming a cantilever structure on the edge of the micro pit; wherein plasma nitrocarburizing is carried out in a low-pressure plasma atmosphere, laser processing and coating deposition are carried out in a vacuum or protective atmosphere, and transfer among the steps is not exposed to the atmosphere. The invention further provides corresponding manufacturing equipment which comprises a heat treatment cavity, a plasma nitrocarburizing cavity, a surface micro-texture machining cavity, a coating deposition cavity and a vacuum transfer cavity. According to the invention, the hardness mutation between the coating and the matrix is relieved, a hardness gradient transition structure is constructed, the fatigue stripping resistance of the coating is obviously improved, and the service life of a mold is prolonged.

The invention is suitable for the technical field of aluminum material spraying control, and particularly relates to an electrostatic spray gun motion compensation method for eliminating aluminum material spraying yin and yang surfaces, and the electrostatic spray gun motion compensation method for eliminating aluminum material spraying yin and yang surfaces comprises the following steps: obtaining aluminum material surface structure information; determining a first type of area and a second type of area based on the aluminum material surface structure information; generating a first spraying parameter based on the first type of region, and generating a second spraying parameter based on the second type of region; generating a parameter mutation feature based on the first spraying parameter and the second spraying parameter; and when it is detected that the spray gun moves from the first type of area to the second type of area, a spray gun motion compensation track is generated based on the parameter mutation characteristics, the spray gun is controlled to adjust the first spraying parameter to the second spraying parameter, and meanwhile the spray gun moves from the first type of area to the second type of area according to the spray gun motion compensation track. According to the method, the problems of coating deposition deviation and asynchronous movement and parameter adjustment caused by parameter mutation are effectively reduced, and the yin-yang surface phenomenon is remarkably improved.

The invention relates to a polycrystalline cubic boron nitride coated cutting tool and a preparation method and application thereof.The polycrystalline cubic boron nitride coated cutting tool comprises a PCBN base body and a first coating formed on the PCBN base body, the PCBN base body is at least provided with a polycrystalline layer, the polycrystalline layer comprises cubic boron nitride, a first binder and a second binder, and the first coating is formed on the PCBN base body. The second binder is selected from a mixture of one or more of aluminum, titanium, cobalt, nickel, tungsten, niobium, tantalum and zirconium, and the ratio of the average particle size of the cubic boron nitride to the average thickness of the first coating is 0.5-2.5. The thermal expansion coefficient of the PCBN polycrystalline layer is matched with the thermal expansion coefficient of the coating by regulating and controlling the formula of the PCBN substrate (the type and proportion of the binder) and the formula of the coating, and the thermal stress between interfaces during cutting is reduced; and by regulating and controlling the thickness of the cubic boron nitride and the coating, the deposition nucleation of the coating is compact, and the hardness of the coating is matched with that of a polycrystalline layer.

The invention belongs to the technical field of industrial coating engineering and automatic control, and relates to a steel member surface coating thickness control system based on machine vision, which is characterized in that electromagnetic characteristics of a liquid coating are sensed in real time through a dielectric parameter detection module; the rheological and dynamic behaviors of the coating are analyzed by utilizing a microdynamics measurement module and combining impact force sensing and structured light imaging; a direct measurement result of the machine vision module on the three-dimensional morphology of the coating is fused, and the information and the pose data of the spray gun are synchronously packaged into a physical state vector by means of a multi-source data fusion module; matching an optimal strategy through a collaborative decision control module, and generating a control instruction; and finally, a controlled fluid resonance perturbation field is formed in the jet flow, so that in-situ and self-adaptive regulation and control of the coating deposition process are realized. The method solves the problems that a traditional spraying process lacks real-time, quantitative and self-adaptive control capability on the coating deposition process and guarantees the coating thickness uniformity and the process stability.

The invention provides a galvanized steel wire rope plastic coating device, and relates to the technical field of steel wire ropes, the galvanized steel wire rope plastic coating device comprises a box body, a storage cavity, a circulating conveying mechanism, a fixed shell I, a plastic coating mechanism, a fixed shell II and an air drying mechanism; a complex assembly process is not needed, the early-stage investment and installation difficulty of an enterprise can be reduced, meanwhile, all the mechanisms are compact in layout and small in occupied space, and the device is suitable for production scenes of different scales and convenient to apply and popularize in industrial production; stable conveying of the plastic coating material is achieved through the circulating conveying mechanism, deposition and blockage of the plastic coating material can be avoided, uniform feeding of the plastic coating mechanism is guaranteed, the problem that feeding of existing equipment is unstable is solved, meanwhile, the conveying amount of the plastic coating material can be accurately controlled by adjusting the rotating speed of a motor, and the feeding reliability is further improved; the output blade of the plastic coating mechanism can enable redundant plastic coating materials to flow back to the storage cavity through the output port, recycling of the plastic coating materials is achieved, material losses are reduced, the production cost is reduced, and the problem that waste of the plastic coating materials of existing equipment is serious is solved.

The invention provides a preparation method of a high-entropy nitride anti-erosion coating, which comprises the following steps: (1) polishing, cleaning and drying a sample in sequence, placing the sample in a vacuum coating chamber, introducing argon Ar, adjusting the flow of the argon Ar, and carrying out ion bombardment cleaning on the surface of the sample; (2) acquiring the optical emission intensity of the plasma after argon Ar is introduced and the optical emission intensity of the plasma after nitrogen N2 is introduced; (3) depositing a high-entropy alloy transition layer on the surface of the sample; (4) depositing a high-entropy nitride anti-erosion coating on the surface of the sample; and (5) taking out the sample to complete preparation of the coating on the surface of the sample. The preparation of the high-entropy nitride anti-erosion coating is completed by adopting a bipolar high-power pulse magnetron sputtering technology and an ion source to jointly construct a high-density plasma film forming environment, so that the nitridation reaction on the surface of the target material can be effectively inhibited, and the characteristic peak intensity of the plasma is kept unchanged; and the stability of plasma components in the film forming process is ensured.

This invention provides a high-entropy alloy nano-coating high-temperature oxidation-resistant modification preparation process, belonging to the field of coating modification technology. The high-entropy alloy nano-coating high-temperature oxidation-resistant modification preparation process specifically includes the following steps: S1. Target material selection and preparation; S2. Alloy substrate treatment; S3. Low-temperature nanocrystalline coating deposition; S4. Coating densification treatment; S5. Low-temperature recovery annealing; S6. Pre-oxidation treatment. Through the synergistic process of low-temperature preparation of the alloy nano-coating, densification annealing, and pre-oxidation, the high-temperature strength and phase stability of the coating are improved by utilizing the lattice distortion effect. A thermodynamically stable protective oxide film of aluminum oxide and chromium oxide is generated in situ on the surface, solving the problems of traditional chromium-based coatings such as few main components, poor oxidation resistance, and short lifespan. This significantly improves the service reliability and safety of nuclear reactor structural materials under high-temperature irradiation environments.

The invention relates to the technical field of electroplating pools, in particular to a device for improving electroplating uniformity of a VCP electroplating line, which comprises an electroplating pool, a metal mesh plate is fixed in the electroplating pool, a rotating handle is arranged below the metal mesh plate, the rotating handle is rotatably connected to a bottom plate of the electroplating pool, blades are fixed on the surface of the rotating handle, and a mounting frame is mounted at the top of the electroplating pool. A servo motor is mounted on the surface of the mounting frame, the power output end of the servo motor is in transmission connection with a driving shaft, and the bottom end of the driving shaft penetrates through the metal net plate and then is inserted into the top end of the rotating handle; the device has the beneficial effects that the rotating handle is driven to rotate through the servo motor, the blades are driven to forcibly stir electrolyte, metal ion diffusion is accelerated, and the concentration gradient is eliminated; electrolyte circulation is promoted in the stirring process, so that metal ions generated by anodic oxidation reaction are rapidly supplemented to a cathode area, the deposition rate of a plating layer is stabilized, and the phenomenon that the edge thickness of a workpiece is out of tolerance is reduced.

An apparatus is provided for coating deposition, particularly by chemical vapour deposition, on three-dimensional glass articles such as bottles. The apparatus lends itself to incorporation in a plant for a continuous production process for glass containers.

To provide a coating member having a coating layer composed of BN on a metal base material containing Fe, in which the adhesion of the coating layer is secured and the reduction of the film deposition rate of the coating layer is suppressed.SOLUTION: The coated member 1 is provided with a metallic base material 10 containing Fe, an intermediate layer 20 containing Al, B, O and N, and a coating layer 30 composed of BN, and the intermediate layer 20 and the coating layer 30 are laminated on the metallic base material 10 in this order. The coated member 1 is manufactured by forming the intermediate layer 20 and the coating layer 30 on the surface of the metal base material 10 by an atomic layer deposition method.SELECTED DRAWING: Figure 1

The application relates to the field of cemented carbide surface coating, and particularly discloses a multi-element nano composite structure coating for a cemented carbide drill bit and a preparation method; the multi-element nano composite structure coating for the cemented carbide drill bit comprises the following specific steps: S1, polishing the surface of the cemented carbide drill bit, and then cleaning the surface of the drill bit by using an ultrasonic wave and a cleaning agent; S2, loading the pretreated drill bit into a furnace at an inclined angle, so that a cutting edge part faces a coating deposition source; S3, performing vacuum treatment on the loaded drill bit in a vacuum chamber and depositing a TiAlSiCrCN coating; the TiAlSiCrCN coating is a gradient coating, a TiAlSiN layer is first deposited on the surface of the drill bit, then a TiAlSiCrN coating is deposited, and finally a TiAlSiCN coating is deposited; S4, performing laser remelting on the surface of the coating after cooling, and finally performing grinding and polishing treatment, so that the multi-element nano composite structure coating for the cemented carbide drill bit is prepared; the composite structure coating prepared by the application can have better hardness and lubricity.

The invention discloses a vanadium-tungsten-titanium type SCR denitration catalyst and a preparation method thereof, and relates to the technical field of catalysts. According to the technical scheme, the preparation method comprises the following steps: S1, preparing a TiO2-coated ZrO2 core-shell composite carrier; s2, electromagnetic coupling field auxiliary tungsten loading; s3, microwave-enhanced vanadium loading; s4, depositing a coating: coating a polyacrylic acid-b-polystyrene layer on a product in the step S3 through atomic layer deposition to obtain the vanadium-tungsten-titanium type SCR denitration catalyst. The vanadium-tungsten-titanium type SCR denitration catalyst has excellent low-temperature activity and toxicity resistance, the replacement period of a catalyst module is prolonged to 6 years, and the service life is greatly prolonged.

This invention belongs to the field of thin film deposition technology and relates to a method for improving the uniformity and quality of DLC coatings prepared by PECVD. Based on PECVD equipment, a method for preparing uniform, highly wear-resistant / corrosion-resistant DLC coatings on irregularly shaped workpieces by controlling a rotating magnetic field is provided. The method includes a vacuum chamber system, a dynamic magnetic field generator, a radio frequency plasma excitation system, a dual-path gas supply system, and a vacuum and pressure regulation system. The dynamic magnetic field generator uses two sets of ring-arranged neodymium iron boron permanent magnets, driven by a motor to rotate the magnetic field vector. The top spray electrode and the bottom ring ground electrode form the main discharge circuit. The rotating magnetic field increases the number density of active groups and molecular kinetic energy during deposition. Different gas ratios are used during coating deposition to achieve high-density, high-quality DLC coatings. The workpiece for DLC coating deposition is placed at the bottom of the reaction chamber. This method is used to deposit uniform, highly wear-resistant, and highly corrosion-resistant DLC coatings on planar or irregularly shaped workpieces.

The invention belongs to the technical field of composite material forming, and relates to a thickness-controllable deposition method, which comprises the following steps: firstly, obtaining calibrated actual morphology data of a ceramic matrix composite material component, the calibrated actual morphology data at least comprising deformation, profile tolerance and thickness uniformity; the coating thickness deviation value is determined according to the calibrated actual morphology data, deposition flow field iterative analysis is conducted on the basis of the coating thickness deviation value, the coating deposition process conditions are determined according to the iterative analysis result, and the process conditions at least comprise the deposition height, the deposition angle, the ceramic matrix composite component direction and the deposition time; and coating deposition is completed according to the process conditions. The invention further provides a thickness-controllable deposition system and a ceramic matrix composite component. According to the method, data acquisition is conducted on the component before deposition through the three-dimensional scanning technology, the deposition process is optimized in the mode that deposition flow field analysis and size data are matched, and the thickness and profile tolerance size precision of the component after deposition is effectively improved.

The invention belongs to the field of waste battery material recovery, and provides a waste battery material recovery method based on a plasma chemical vapor deposition technology. Firstly, a network compound with a metal chelating function is synthesized and forms stable combination with active sites on the surface of an electrode in subsequent coating deposition, and harmful metal ions are effectively captured; secondly, a fluorine-containing imidazolyl-quaternary ammonium salt network compound is designed, and the fluorine-containing imidazolyl-quaternary ammonium salt network compound is endowed with excellent surface passivation and chemical stability by a fluorinated group; in the stripping process, the active material and the metal current collector are separated by periodically adjusting the temperature and combining the plasma technology, the stripped active powder can be further extracted and purified through acid pickling treatment, and the metal current collector is combined with a fluorine-containing compound and an inorganic silica network deposition process. The metal surface is endowed with good corrosion resistance and reprocessing performance, the method is suitable for recycling of electrode materials in waste batteries, and meanwhile the recycling value of related materials is improved.

The present invention relates to a method for coating filaments, the method comprising: depositing a coating on elongate filaments (11) in a treatment zone (ZT) of a reactor (3) by fluidized-bed chemical vapor deposition from a gas phase introduced into the reactor, the method further comprising (i) monitoring the fluidization of the filaments, and (ii) one or more corrective actions for the fluidization of the filaments, each being triggered if an absence of fluidization of the filaments is detected during monitoring and each comprising a temporary modification of the flow rate of a dispersion gas, during which an increased flow rate at least equal to three times a nominal flow rate imposed during deposition is imposed, this increased flow rate being imposed for at least (3) seconds.

The invention discloses a method for preparing a composite nitriding coating on the surface of titanium alloy, and belongs to the technical field of surface engineering and coatings. The coating at least comprises a nitride strengthening layer and a hard coating in sequence from inside to outside. The hard coating comprises a composite coating, the composite coating comprises a nano multilayer structure formed by alternately depositing A layers and B layers on the surface of the nitride strengthened layer, the A layers are TiAlN layers, the B layers are TiSiC-N layers, and the TiSiC-N layers have nano-scale (Ti, Si) (C, N) composite phases. According to the method, one or more hard coatings are deposited on the surface of the nitride layer through the composite process of double-glow combined active screen plasma nitriding and post-treatment hard coating deposition, and the problems that a single nitriding layer is insufficient in hardness, limited in wear resistance and the like are successfully solved. And two procedures are continuously finished in the same vacuum cavity, so that the interlayer bonding strength is ensured, and the production efficiency is improved.

This invention relates to a method and system for optimizing coating trajectory to ensure uniformity of spacecraft coating thickness. The method includes: acquiring a model of the surface to be coated, generating a regular grid initial coating curve and setting constraint parameters; mapping the curve to a complex surface using a pseudo-projection algorithm, and generating a fully covered, non-intersecting initial trajectory after trajectory correction; based on an experimentally calibrated coating deposition model, constructing a multi-objective optimization function that minimizes coating thickness deviation while considering trajectory smoothness and operation time, using trajectory waypoint coordinates, coating gun attitude quaternions, and coating segment duration as optimization variables, and applying constraints such as coating distance, velocity, and attitude; using an interior-point solver for iterative optimization, limiting variable iteration deviations to ensure model accuracy; and outputting an directly executable optimized trajectory. This invention can automatically adapt to the coating requirements of complex surfaces, significantly improve coating thickness uniformity, control deviations within the allowable range of aerospace processes, and effectively improve operational accuracy and efficiency.

The utility model relates to superhard material processing technical field, and disclose a kind of PCBN composite sheet edge strengthening treatment device, including rack, rotary workbench, laser processing module, coating deposition module and control system.The PCBN composite sheet edge strengthening treatment device, in combination with laser microstructured processing and nanometer coating deposition, significantly improve the hardness, wear resistance and bonding strength of PCBN composite sheet edge, solve the problem of single technical effect limited, rotary workbench design realizes the continuous processing of multiple PCBN composite sheets, improves production efficiency, reduces cost, accurately controls each module parameter by PLC system, ensures the consistency and stability of processing, reduces manual intervention, integrates laser processing, coating deposition and cooling system in one, compact structure, easy to operate.

The utility model discloses a kind of coating devices for suspension spring production, it is related to suspension spring coating technical field, including bottom plate, the upper end of the bottom plate is fixedly connected with coating storage box, the inside of the coating storage box is provided with stirring assembly, the upper end of the coating storage box is rotatably connected with carousel, the upper end of the carousel is fixedly connected with multiple spring racks, the upper end of the bottom plate is provided with baffle, the baffle is located at the outside of coating storage box, the coating device for suspension spring production of the utility model is rotated by the output end of driving motor and drives rotating rod, and then stirring rod is stirred in coating storage box, solve coating deposition stratification problem from root, ensure that the concentration of coating that nozzle sprays is uniform, effectively improve the thickness uniformity and appearance quality of suspension spring coating, substantially improve product yield, reduce rework cost due to coating quality defect.

The application discloses a kind of integrated preparation devices of three-dimensional bionic optical functional materials, it includes printing unit, gas filtering structure, evaporation unit, control unit and driving unit, the printing unit is square box shape, printing unit is provided with baffle inside, printing unit is divided into two intervals by baffle, baffle upside is provided with printing chamber, baffle downside is provided with driving chamber, printing unit right end is provided with joint surface, printing unit is connected with evaporation unit by joint surface interference, evaporation unit is composed of hot evaporation chamber and control chamber;The present application is green, safe and intelligent, fully-closed operation, and is equipped with a gas filtering device, which will not harm the operator, and is easy to use. From three-dimensional modeling to model structure evaporation, to model coating deposition control, only intelligent one-key operation is required. The integrated forming cancels the intermediate transfer link, ensures the operation sealing and evaporation uniformity, greatly improves the coating deposition forming rate and material performance.

Light-driven deposition methods to form coatings or films, and uses thereof, are described herein. Such coatings or films can be used for various applications, such as in membranes for gas or ion separation.

The invention provides a surface treatment method for a valve plate base body and a valve plate. The method comprises the steps that a valve plate base body is subjected to polishing, ultrasonic cleaning and drying treatment; the cleaned valve plate is placed in a vacuum ion nitriding furnace to be subjected to nitriding treatment under the treatment conditions that a vacuum pump is started for air exhaust, after the pressure value in the furnace reaches a first specified value, high pressure is started, argon is introduced, the vacuum degree of a furnace cavity is kept at a second specified value, the surface layer starts to be heated through high-energy ion bombardment, and the surface layer is heated; after the temperature of the workpiece reaches 480-510 DEG C, nitrogen is introduced, the volume ratio of nitrogen to argon is set to be 1: 6, the air pressure is adjusted to 300-500 Pa, and heat preservation is conducted for 6-8 h; and the valve plate subjected to nitriding treatment is transferred to multi-arc ion plating equipment for coating deposition, and the treatment conditions of coating deposition are as follows: nitride is selected as a deposition material, the substrate temperature is kept at 450 DEG C in the deposition process, the target current is controlled to be 120-150 A, the vacuum degree is 2-3 Pa, and the deposition time is 60-90 min.