The utility model relates to the field of
coating devices, in particular to a
parylene coating device with a cleaning function, which comprises a
coating chamber, a
liquid injection header
pipe is arranged in the middle of the upper portion of the coating chamber, and a liquid supply box used for providing cleaning liquid is arranged on one side of the coating chamber. After a product is coated, the coating chamber is opened, the product is taken out, and the bracket in the coating chamber is taken out for cleaning, so that cleaning dead angles in the coating chamber are reduced, then the upper coating chamber is closed, the
liquid injection header
pipe is in threaded connection with the water outlet
pipe on the liquid supply box, and then the liquid supply box is started; by means of the method, impurities on the cavity, gas and the surface of a product can be effectively removed, the cavity is clean, the impurities can be prevented from being mixed into a coating material, and the defects of pinholes, hard spots and the like of a coating film are prevented; and moreover, the
parylene film can be tightly attached to the product, and the
adhesive force and uniformity of the film layer are improved, so that the
film coating quality is improved.