Machining technology and machining device facilitating parylene coating detection

Abstract

The invention discloses a machining technology and a machining device facilitating parylene coating detection, and belongs to the technical field of chemical vapor deposition. The machining technologycomprises the steps that fluorescent whitening agent powder is arranged in a sublimation cup, a vacuum deposition chamber is sealed, a vacuum system is used for conducting pumping to achieve vacuum,a cooling controller is utilized for controlling the temperature of the area of the vacuum deposition chamber, a parylene material is placed in an evaporation chamber to be heated and gasified, and gas is formed after the splitting decomposition reaction is conducted in a splitting decomposition chamber; and a sublimation cup heating switch is turned on, the heating temperature is set, the constant temperature is kept, the fluorescent whitening agent powder is deeply evaporated in the sublimation cup, a discharging valve is closed, a heating power source is turned off, the vacuum deposition chamber is opened, a machined workpiece is taken out and placed on a detection table, and an ultraviolet lamp is used for conducting irradiation detection. According to the machining technology and themachining device facilitating parylene coating detection, the fluorescent whitening agent powder is sublimated and evenly deposited on the machined workpiece, the coating protectiveness is not damaged, the ultraviolet lamp is used for irradiation for detection, and visual observation can be achieved for the machined product effect.

Description

technical field [0001] The invention relates to a coating process detection process and a device, in particular to a processing technology and a processing device for convenient detection of parylene coating, belonging to the technical field of chemical vapor deposition. Background technique [0002] Chemical vapor deposition is a traditional technique for preparing thin films, which is widely used in the deposition of various materials in the semiconductor industry, including a wide range of insulating materials, most metal materials and metal alloy materials. The principle is to use gaseous precursor reactants, Through the chemical reaction between atoms and molecules, some components in the gaseous precursor are decomposed or react with each other, and the film is deposited on the substrate to form a film. [0003] The existing parylene coating process is that after the parylene material is heated and vaporized in the evaporation chamber, it moves to the coating chamber t...

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Problems solved by technology

[0004] The main purpose of the present invention is to provide a processing technology and a processing device for convenient detection of parylene coating, which can solve the problem that the coating material processed in the prior art is not easy to detect, by providing a sublimation cup on the vacuum deposition chamber, the fluorescent The whitening agent powder is sublimated and evenly deposited on the workpiece, which can be detected clearly and intuitively with ultraviolet light

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