Machining technology and machining device facilitating parylene coating detection

A processing device and processing technology technology, applied in the direction of measuring devices, metal material coating technology, gaseous chemical plating, etc., can solve the problems of difficult detection of coating materials, and achieve the effect of solving difficult detection, simple process and strong practicability

Pending Publication Date: 2019-02-15
JIANGSU KERUN PHOTOELECTRIC TECH CO LTD
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0004] The main purpose of the present invention is to provide a processing technology and a processing device for convenient detection of parylene coating, which can solve the problem that the coating material processed in the prior art is not

Method used

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  • Machining technology and machining device facilitating parylene coating detection
  • Machining technology and machining device facilitating parylene coating detection

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Embodiment Construction

[0028] In order to make the technical solutions of the present invention clearer and clearer to those skilled in the art, the present invention will be further described in detail below in conjunction with the examples and accompanying drawings, but the embodiments of the present invention are not limited thereto.

[0029] A kind of processing technology that this embodiment provides is convenient to detect parylene coating, comprises the following steps:

[0030] Step 1: Put the fluorescent whitening agent powder or the fluorescent material with sublimation effect and the temperature-changing material into the sublimation cup 4, seal the sealing ring 41, fix the heating ring 43 on the sublimation cup 4, pass the sublimation cup 4 through The connecting ring 45 is connected to the vacuum deposition chamber 3 and fixed, and the vacuum deposition chamber 3 is connected to the connecting ring 45;

[0031] Step 2: sealing the vacuum deposition chamber 3 and pumping it to a vacuum ...

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Abstract

The invention discloses a machining technology and a machining device facilitating parylene coating detection, and belongs to the technical field of chemical vapor deposition. The machining technologycomprises the steps that fluorescent whitening agent powder is arranged in a sublimation cup, a vacuum deposition chamber is sealed, a vacuum system is used for conducting pumping to achieve vacuum,a cooling controller is utilized for controlling the temperature of the area of the vacuum deposition chamber, a parylene material is placed in an evaporation chamber to be heated and gasified, and gas is formed after the splitting decomposition reaction is conducted in a splitting decomposition chamber; and a sublimation cup heating switch is turned on, the heating temperature is set, the constant temperature is kept, the fluorescent whitening agent powder is deeply evaporated in the sublimation cup, a discharging valve is closed, a heating power source is turned off, the vacuum deposition chamber is opened, a machined workpiece is taken out and placed on a detection table, and an ultraviolet lamp is used for conducting irradiation detection. According to the machining technology and themachining device facilitating parylene coating detection, the fluorescent whitening agent powder is sublimated and evenly deposited on the machined workpiece, the coating protectiveness is not damaged, the ultraviolet lamp is used for irradiation for detection, and visual observation can be achieved for the machined product effect.

Description

technical field [0001] The invention relates to a coating process detection process and a device, in particular to a processing technology and a processing device for convenient detection of parylene coating, belonging to the technical field of chemical vapor deposition. Background technique [0002] Chemical vapor deposition is a traditional technique for preparing thin films, which is widely used in the deposition of various materials in the semiconductor industry, including a wide range of insulating materials, most metal materials and metal alloy materials. The principle is to use gaseous precursor reactants, Through the chemical reaction between atoms and molecules, some components in the gaseous precursor are decomposed or react with each other, and the film is deposited on the substrate to form a film. [0003] The existing parylene coating process is that after the parylene material is heated and vaporized in the evaporation chamber, it moves to the coating chamber t...

Claims

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Application Information

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IPC IPC(8): C23C16/448G01N21/64
CPCG01N21/643C23C16/448
Inventor 张卫兴张振兴
Owner JIANGSU KERUN PHOTOELECTRIC TECH CO LTD
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