Method and device for producing a parylene coating

A parylene and cladding technology, which is applied in the field of manufacturing parylene cladding and devices, can solve the problems of long manufacturing time, cost, high technology and economy of cladding equipment, and achieve high output and realize output Effect

Inactive Publication Date: 2012-11-21
OSRAM OPTO SEMICONDUCTORS GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, for the serial production of electronic components, such as optoelectronic components, the known parylene coating method is not suitable, because the components have to be coated in a closed volume and controlled vacuum or low pressure, which or This leads to extremely long production times or, also in the case of coil coating methods, to an uneconomically high technical and economic outlay for coating equipment

Method used

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  • Method and device for producing a parylene coating
  • Method and device for producing a parylene coating
  • Method and device for producing a parylene coating

Examples

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Embodiment Construction

[0046] exist figure 1 A method 100 for producing a parylene coating on at least one surface of at least one component according to one embodiment is shown in .

[0047] In a first method step 101 of method 100 a first gas with parylene monomer is provided. In a further method step 102 a component arranged in an environment with atmospheric pressure is provided, and in a further method step 103 a first gas with parylene monomer is directed to at least one of said components by means of a first nozzle surfaces such that parylene monomer is deposited on at least one surface.

[0048] Embodiments of the method and other features are incorporated below Figures 2 to 5 The devices in the examples are illustrated.

[0049] exist figure 2 An exemplary embodiment of a device 200 for carrying out a method for producing a parylene coating 2 on at least one surface 11 of at least one component 1 is shown in FIG.

[0050] In the exemplary embodiment shown, the component 1 to be coat...

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Abstract

The invention relates to a method for producing a parylene coating (2) on at least one surface (11) of at least one component (1), in which a first gas (4) having parylene monomers is provided and the parylene monomers are deposited on the at least one surface (11) of the component (1) by feeding the first gas (4) having the parylene monomers by means of a first nozzle (3) to at least one surface (11), wherein the component (1) is disposed in an environment having atmospheric pressure. The invention further relates to a device for producing a parylene coating.

Description

[0001] This application claims priority from German patent application 10 2010 010 819.7, the disclosure content of which is hereby incorporated by reference. technical field [0002] A method and apparatus are presented for the manufacture of a Parylen coating. Background technique [0003] For example, in the case of optoelectronic components, corrosive gases, such as sulfur compounds, lead to corrosion of sensitive surfaces of the electrical components. Silver surfaces of optoelectronic components can thus be corroded, for example, by such gases, leading to failure of the component. [0004] There are also applications which require the use of silicone resins as potting materials for the encapsulation of electrical components, for example optoelectronic components. However, silicone resins typically exhibit a more or less high permeability to corrosive gases. However, modification of the silicone, eg the enhanced introduction of phenyl groups, can reduce the permeabilit...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05D7/24H01L51/52B05D3/14
CPCB05D1/60B05D1/62B05D3/142H01L51/5253H10K50/844H10K71/00
Inventor 贝尔特·布劳内克里斯蒂娜·基思伊凡·加莱希奇
Owner OSRAM OPTO SEMICONDUCTORS GMBH
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