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252 results about "Plasma coating" patented technology

Methods of Coating Substrate With Plasma Resistant Coatings and Related Coated Substrates

The invention includes a method of coating a substrate with a plasma etch-resistant layer that exhibits reduced particulation comprising applying an coating layer to a substrate wherein coating layer has a thickness of about 20 microns or less and wherein the coating layer, after exposure to a fluorine based plasma for an amount of time, is substantially free of any cracks or fissures that span the cross section of the coating layer.A coated substrate prepared by the methods described. Also included in the invention are coated substrates for use as a structural element in a fluorine-based semiconductor wafer processing protocol, wherein the coating is a coating layer having a thickness of about 20 microns or less and wherein the coating layer, after exposure to a fluorine based plasma for an amount of time, is substantially free of any cracks or fissures that span the cross section of the coating layer and exhibits reduced particulation.Included are structural elements used in a fluorine-based semiconductor wafer processing protocol, wherein at least a portion of a surface of a structural element is coated with a coating layer that having a thickness of about 20 microns or less and wherein the coating layer, after exposure to a fluorine based plasma for an amount of time, is substantially free of any cracks or fissures that span the cross section of the coating layer and exhibits reduced particulation.
Owner:GREENE TWEED TECH

Device and method for measuring radar reflection characteristic of plasma coating material

The invention discloses a device and a method for measuring the radar reflection characteristic of a plasma coating material. The device comprises a large-area uniform unmagnetized plasma generation unit, a radar cross section measurement mechanism, a microwave unreflected chamber, a supporting guide rail, a supporting sliding block, a measured material plate and a wave-absorbing material, wherein the large-area uniform unmagnetized plasma generation unit and the radar cross section measurement mechanism are fixed in the microwave unreflected chamber; the large-area uniform unmagnetized plasma generation unit is surrounded in a space by the wave-absorbing material; and the wave-absorbing material is provided with a window, so that the measured material plate of the large-area uniform unmagnetized plasma generation unit directly faces the radar cross section measurement mechanism. By the device and the method, plasma can be coated on the surface of a measured material, and the adjustment of the thickness of the plasma and the weakening of the radar echo reflection of a body are further realized, so that the development of the experimental measurement of the radar reflection characteristic of the plasma coating material is met.
Owner:XIDIAN UNIV

WC composite guide roller and manufacturing method thereof

The invention discloses a WC composite guide roller and a manufacturing method thereof. A composite layer is arranged on the surface of matrix steel of the composite guide roller. The WC composite guide roller is characterized in that the matrix steel is carbon steel or alloy steel containing 0.2-0.7 percent by weight of carbon; the composite layer comprises the following material components in percentage by weight: 10-50 percent of WC, 0.2-0.8 percent of C, 0-3.0 percent of Cr, 0-2.0 percent of Mo, 0-2.0 percent of Mn, 0.11-0.5 percent of RE, not more than 5 percent of other metallic and non-metallic elements and the balance of Fe. The manufacturing method of the WC composite guide roller comprises the following steps of: coating composite powder on the surface of the matrix steel by using an plasma coating method and enabling the composite powder to be remelted together with the matrix steel by using an argon arc remelting method so as to form the composite layer on the surface of the matrix steel; or directly spraying the composite powder on the surface of the matrix steel and enabling the composite powder to be remelted together with the matrix steel by using the argon arc remelting method. The composite guide roller has high rigidity, good abrasion resistance, low fragility, capability of thermal treatment and mechanical machining, low cost and high cost performance.
Owner:合肥上雅电子科技有限公司
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