Particle beam system (1, 1a, 1b), comprising: a stage (55) for receiving a holder (27, 27a, 27b) with an object (29) held on it, wherein a first temperature sensor (57) is attached to the stage (55); a
particle beam source (63) for generating a
particle beam (65) directed at the object (29); a vacuum jacket (11) that defines a vacuum space (17) in which at least the object stage (55) is arranged; a lock (5, 5a) coupled to the
vacuum chamber (17) with a lock chamber (7, 7a) which is separated from the
vacuum chamber (17) by an openable door (15); and a transfer device (35, 35a, 35b) for transporting the object holder (27, 27a, 27b) from the
airlock (5, 5a) to the object table (55); the transfer device (35, 35a, 35b) comprises: an elongated rod (37, 37a, 37b) passing through a vacuum seal (33, 33a) provided in the vacuum jacket (11) or in a wall (9, 9a) of the lock (5, 5a); a
coupling (38, 38a, 38b) which is attached to one end of the rod (35, 35a, 35b) and which is configured to be mechanically detachably coupled to the object holder (27, 27a, 27b); a
signal line (43, 43a, 43b) for a second temperature sensor (39, 39a, 39b), which is led to the
coupling (38, 38a, 38b); and a supply line (47, 47a, 47b) for a heater (41, 41a, 41b) which leads to the
coupling (38, 38a, 38b).