102 results about "Solvent vapor" patented technology

The invention discloses a post-treatment system and process for PBF printing plastic parts, and the post-treatment system comprises a solvent storage bottle, a part treatment assembly and a solvent recovery assembly; a solvent is stored in the solvent storage bottle; the part processing assembly is used for carrying out fairing treatment on the PBF printing plastic part; the solvent recovery assembly is used for recovering the vaporized solvent in the part treatment assembly and re-liquefying and storing the vaporized solvent; the output end of the solvent storage bottle is connected with the input end of a solvent cabin of the part treatment assembly through a peristaltic pump, and the part treatment assembly is connected with the solvent recovery assembly through a recovery valve. According to the principle that the solvent is rapidly vaporized under the pressure difference, then uniformly reaches any surface position of the workpiece and is condensed and liquefied again, the surface defects of the workpiece are gradually dissolved and leveled under the action of the solvent, then the solvent steam is liquefied and recovered again, and the residual solvent on the surface of the workpiece is removed. The common surface roughness problem of the 3D printing plastic part can be effectively improved, and the appearance quality of the part is improved.

The invention discloses an alkynyl functionalized hydrogen bond organic framework (HOF) material for efficient reverse separation of propylene / propane as well as a preparation method and application of the alkynyl functionalized hydrogen bond organic framework (HOF) material. The preparation method comprises the following steps: dissolving a tetracarboxylic acid type organic ligand H4L in a benign organic solvent to obtain an H4L solution, then placing the H4L solution in a poor solvent steam atmosphere, and obtaining an HOF material through a gas phase diffusion method; after a low-boiling-point reagent is adopted to carry out solvent exchange on the HOF material, solvent molecules in pore channels of the HOF material are removed through an activation method, and then the alkynyl functionalized HOF material for propylene / propane efficient reverse separation is obtained. The material shows the characteristics of high propane adsorption capacity, excellent propylene / propane reverse separation performance, good cycle performance, easy repair and reproducibility, fills the technical blank of the HOF material in the field of efficient reverse separation of propylene / propane mixed gas, and provides a brand new thought and technical support for research and development in the field of light hydrocarbon separation.

The invention provides an impurity deep removal and purification device in ES fiber solvent recovery. Relates to the technical field of electrostatic spinning process and solvent recovery, and comprises a pre-separation module used for removing fiber residues and solid particles larger than 5 microns in solvent-enriched gas; the multi-stage deep condensation module comprises two stages of condensers, and the two stages of condensers condense the solvent steam according to the gradually decreased temperature and intercept micro-droplet impurities; and the composite adsorption module is used for adsorbing residual organic trace impurities and removing water. The impurity deep removal and purification device in ES fiber solvent recovery has the advantages of being low in energy consumption, easy and convenient to maintain, stable in operation and capable of being continuously online for 72 h or above without shutdown, the solvent recovery rate is remarkably increased, the operation cost is reduced, and the potential risk of organic vapor emission to the environment and operation safety is effectively avoided.

The invention provides a method and equipment for mixing powder. The method comprises the following steps: pretreating a material and introducing a liquid phase; dynamically shearing and dispersing; gradient heating and solvent evaporation; performing high-speed shearing to trigger fibrosis; the fiber structure is optimized through low-speed kneading; crushing the fiberized material; according to the method, a low-boiling-point solvent is introduced in the powder dry mixing process through a liquid-phase-assisted dry mixing-low-temperature solvent recovery-controllable fibration synergistic process, the powder mixing efficiency and uniformity are improved through a liquid phase, and after powder is mixed uniformly, condensate water of a stirring tank is closed, so that the temperature of a slurry intermediate semi-finished product is increased; and the stirring tank is synchronously vacuumized, so that the low-boiling-point solvent is boiled, low-boiling-point solvent steam is pumped into the condensation system, and the low-boiling-point solvent is recycled, so that uniformly mixed dry powder is obtained.

The utility model provides a solvent annealing device which can uniformly provide solvent steam and carrier gas for a sample loaded in a processing chamber for solvent annealing and can also realize in-situ tracking test of solvent annealing treatment. The device is compact and flat in structure and easy to assemble and maintain. The processing chamber of the solvent annealing device comprises a chamber body and a chamber cover covering the chamber body, and the chamber body comprises a bottom plate used for carrying a sample; the grooves are formed in the two sides of the bottom plate in the long edge direction respectively and extend in the short edge direction of the bottom plate, one side face of each groove is coupled with the side of the bottom plate in the long edge direction so that the inner space of each groove can communicate with the space above the bottom plate, and the other side face of each groove is provided with an air vent; the flow guide component is coupled with the opening end of the groove and is used for guiding the gas entering the inner space of the groove through the air vent to the sample; and the side wall is matched with the other side surface of the groove and the cavity cover to surround the bottom plate and the groove so as to form the processing cavity.

The application discloses a solvent separation and recovery process of a vinyl lubricating oil base oil, and comprises the following steps: step S1, obtaining organic solvent vapor and crude oil by removing the reaction liquid from a dissolving unit; step S2, obtaining refined solvent by refining the organic solvent vapor in a solvent rectification unit; step S3, obtaining tail gas condensate and tail gas non-condensable gas by condensing tail gas containing solvent vapor in a tail gas condensation recovery unit; and step S4, passing the tail gas non-condensable gas through a tail gas adsorption unit. The application mainly solves the problems of poor separation effect of reaction products, low product quality and inability to reach an industrial scale in the prior art.

The invention is suitable for the technical field of environmental monitoring and analysis, and provides an SVOC semi-volatile matter enrichment method and a sample introduction device, the enrichment method comprises the following steps: loading a sample containing SVOC into a sample tube, and sealing the sample tube; injecting a solvent into the sample tube, heating to 50-500 DEG C, and promoting SVOC desorption by using the steam pressure of the solvent; purging desorption substances to a liquid nitrogen cold trap by using inert gas, controlling the temperature of the liquid nitrogen cold trap to be-196 to-20 DEG C, and enriching SVOC; the liquid nitrogen cold trap is heated to 200-550 DEG C, the total SVOC is transferred to a detection instrument for analysis, SVOC semi-volatile matters adsorbed by the sample tube are more easily desorbed under the working conditions of high temperature and solvent vapor pressure, desorption sample introduction analysis only needs 10-20 minutes, and no sample is transferred; according to the analysis mode, all SVOC semi-volatile matters adsorbed by the tube are fed, and compared with the prior art, the detection sensitivity is improved.

The present disclosure relates to a method of manufacturing a 3D printed object. The method comprises condensing solvent vapour on an outer surface of the 3D printed object. The 3D printed object comprises polymer and radiation absorber. The outer surface of the 3D printed object a) comprises pores that absorb the solvent and b) has a surface roughness, Ra, of greater than 5 μm. The method also comprises dissolving a portion of the 3D printed object to tailor the surface roughness, Ra, of the 3D printed object to a value of from 0.5 to 4 μm.

The utility model discloses a kind of pre-vapor degreasing pipeline systems. A kind of pre-vapor degreasing pipeline system, including a working cavity, including vacuum pipeline, first pneumatic valve, drying condenser, second pneumatic valve and vacuum pump group are successively installed on vacuum pipeline from immediately adjacent working cavity side;It further includes the distillation tank for heating to produce solvent vapor, heater is installed at the bottom of distillation tank, distillation tank is docked working cavity by steam delivery pipeline, third pneumatic butterfly valve is installed on steam delivery pipeline;The bottom of working cavity is connected by a recovery pipeline with distillation tank, fourth pneumatic butterfly valve, circulating pump and fifth pneumatic valve are successively installed on recovery pipeline from working cavity to distillation tank.The utility model passes through pre-vapor degreasing pipeline system, high-temperature solvent vapor is sprayed to the surface of workpiece in working cavity, and then improve the cleaning effect to workpiece.The grease on workpiece after high-temperature solvent vapor treatment is stored in distillation tank by recovery pipeline.

A substrate treating apparatus includes a process tank for storing a treatment liquid, a chamber for surrounding the process tank, a solvent vapor nozzle for supplying solvent vapor into the chamber, a cleaning liquid nozzle for supplying a cleaning liquid, and a controller. The controller causes immersion treatment, where a substrate is immersed in the treatment liquid stored in the process tank, to be performed for a preset period of time, and causes dry treatment, where the substrate processed with the treatment liquid and taken out of the process tank is dried with the solvent vapor supplied from the solvent vapor nozzle, to be performed. The controller causes the cleaning liquid nozzle to supply the cleaning liquid into the chamber and causes the process tank to be immersed in the cleaning liquid stored in the chamber, whereby the chamber cleaning treatment, where the chamber including an outer wall of the process tank is cleaned, is performed.

The present application relates to a kind of extraction method and extraction concentration equipment of spearmint flavor, the method uses liquid nitrogen brittle treatment, low-temperature ultrasonic extraction, two-stage ultrafiltration purification, then liquid-liquid extraction by ethyl acetate, the organic phase is concentrated in vacuum;Concentrated solvent vapor generated is introduced into microbubble in separation tank two, and the water phase residual flavor component, concentrated volatile flavor component and ethyl acetate are recovered synchronously.The equipment includes separation tank one, separation tank two, concentration tank and vacuum pump, micro gas plate, temperature control module and the like, and the extraction agent and flavor recovery rate are improved by pressure boosting and low-temperature control.The present application can efficiently recover flavor component, improve the total yield of aroma, reduce solvent loss and flavor loss.

The present application relates to hydrogen fuel cell preparation equipment technical field, specifically relates to a kind of continuous preparation equipment of hydrogen fuel cell gas diffusion layer. Including unwinding roller and winding roller, coating area, drying zone and sintering zone are provided between the unwinding roller and winding roller, the coating area is equipped with coating unit, including coating die and air jet die, the air jet die is located downstream of the coating die along the substrate conveying direction, negative pressure suction groove is arranged between the coating die and the air jet die, the coating die and air jet die are respectively connected with pitch angle adjusting mechanism, the both sides of the coating die and the air jet die are equipped with lateral baffle along substrate width direction.This application constructs efficient and cooperative coating and flattening system by non-contact coating die, reverse flattening air jet die and intermediate negative pressure suction groove, removes excess air flow and solvent vapor in real time, and effectively inhibits slurry and air flow transverse diffusion through lateral baffle on both sides of coating.

The invention discloses paint surface drying equipment, which belongs to the field of paint surface drying equipment and is characterized in that a basic platform is constructed by an equipment bracket and a conveying belt, a drying area is isolated by a sealing cover, and accurate positioning and partitioned heating of a workpiece are realized by a built-in positioning cover structure. The drying spray pipe structure realizes'air supply-air exhaust 'alternate dynamic airflow circulation through a plurality of groups of independent pipelines, and solvent steam and moisture volatilized by a paint film are effectively taken away by combining the two-way airflow switching design of a heat preservation air pipe and a branch pipeline and the airflow guiding design of a horn-shaped air outlet, so that water vapor accumulation is avoided; and the arc dome of the positioning cover is integrated with a temperature-adjustable heating lamp tube, and is matched with a heat preservation layer and an intelligent temperature control system, so that the surface temperature of the paint film is accurately matched and uniformly heated. According to the equipment, the defects of paint film water spots, sagging and surface and interior dryness are thoroughly eliminated through a sectional type dynamic moisture removal and precise temperature control technical system, and the hardness and weather resistance of a paint film are improved.

The invention discloses a preparation method of 2, 2, 6, 6-tetramethyl-4-methoxypiperidine nitroxide free radicals, which comprises the following steps: in a reaction container equipped with a nitrogen protection system, dissolving tetramethyl-4-hydroxypiperidine nitroxide free radicals in 2-methyltetrahydrofuran, and maintaining the reaction system in an inert environment by the nitrogen protection system; adding a supported sodium hydride catalyst into the reaction system, wherein the molar ratio of the supported sodium hydride catalyst to the tetramethyl-4-hydroxypiperidine nitroxide free radical is (1.0-1.5): 1; the preparation method comprises the following steps: adding 2, 2, 6, 6-tetramethyl-4-methoxypiperidine into a reaction kettle, dropwise adding methyl iodide, stirring for 4-6 hours, separating an organic phase, and crystallizing to obtain the 2, 2, 6, 6-tetramethyl-4-methoxypiperidine nitroxide free radical. According to the preparation method provided by the invention, the supported sodium hydride catalyst is introduced, and the 2-methyltetrahydrofuran solvent system is combined, so that the reaction efficiency and safety are remarkably improved. According to the preparation method provided by the invention, through nitrogen protection and staged purging, low-temperature crystallization and explosion-proof equipment control, the generation amount of hydrogen is reduced, and the concentration of solvent vapor is reduced.

The application belongs to the technical field of spinning dope production, and discloses a polymerization liquid monomer removal system and a polymerization liquid monomer removal method. The polymerization liquid monomer removal system comprises a monomer removal tower, a reboiler, and a discharge port. The polymerization liquid enters the top of the monomer removal tower. The reboiler is in communication with the lower region of the monomer removal tower and transports solvent vapor into the monomer removal tower. The solvent vapor contacts the polymerization liquid to separate monomers in the polymerization liquid. The bottom of the reboiler has a discharge port. During the monomer removal process, liquid solvent continuously enters the reboiler, and the material at the bottom of the reboiler is continuously discharged through the discharge port. In the application, the material at the bottom of the reboiler is continuously discharged through the discharge port during the monomer removal process, which can timely discharge the precipitated impurities, ensure the purity of the solvent vapor, and further avoid the impurities entering the monomer removal tower with the vapor to affect the quality of the polymerization liquid.

The present invention belongs to the technical field of thin film drying equipment and relates to a thin film drying device, a thin film drying method, and a perovskite solar cell assembly. The thin film drying device includes: a blowing component that provides a first airflow in a first direction toward the liquid film to be dried, the air outlet direction of the blowing component and the plane where the liquid film to be dried are sandwiched to form an acute angle area; and an air supply device that provides solvent vapor; wherein, when the blowing component provides the first airflow in the first direction toward the liquid film to be dried, a drainage area is formed in the acute angle area, and the solvent vapor is covered by the drainage airflow in the drainage area to the surface of the liquid film to be dried. The thin film drying device and thin film drying method of the present invention can significantly accelerate the drying of the liquid film to be dried, and can also improve the crystallization quality during the drying process, taking into account the consistency of the crystal orientation of the film, thereby alleviating interface defects between the film and other materials.

The utility model provides a vacuum drying oven capable of recovering a solvent, which is used for effectively recovering the evaporated solvent in the vacuum drying oven and comprises a vacuum drying oven body, a vacuum box cover, a vacuum box cover and a vacuum box cover, an air inlet and an air outlet of the condenser are formed in the lower end and the upper end respectively, and the air inlet is connected with the extraction opening of the vacuum drying box body; an air inlet of the vacuum pump is connected with an air outlet of the condenser; according to the vacuum drying box, the solvent outlet is formed in the bottom of the vacuum drying box body, so that the situation that solvent steam flows back to the bottom of the box body to be accumulated in the rising process after being evaporated out of materials can be avoided; the solvent evaporated in the vacuum drying box body is effectively recycled, waste of the solvent and corrosion of equipment are avoided, and the production cost is reduced.

The invention relates to the technical field of chemistry and chemical engineering experimental equipment, in particular to a high-speed distillation instrument which comprises a solvent evaporation system, a solvent condensation system and a controller which are associated with one another. The solvent evaporation system comprises a hot bath pool, an evaporation bottle, a two-way glass shaft, a locking mechanism, a driving motor and a steam guide bottle, and is used for evaporation of a volatile solvent and steam guide; the solvent condensing system comprises a bathing pool, a double-arm condenser, a cold liquid pump, an air pump and a collecting bottle and is used for condensing and recycling solvent steam; the controller is used for controlling the running states of the solvent evaporation system and the solvent condensation system, so that the volatile solvent is efficiently distilled and recycled in a closed environment in the high-speed distillation instrument. The high-speed distillation instrument provided by the invention has the beneficial effects that the bumping phenomenon of a rotary evaporator can be completely eradicated, and the high-speed distillation instrument has the advantages of high working efficiency, environment friendliness, high safety and the like.

This invention relates to organic functional thin films, specifically to a method for growing controllable number of layers using solvent vapor-assisted growth. p A method for preparing MSB molecular crystal thin films, and the application of these films in generating superoxide ions under light irradiation for antibacterial protection. This method addresses the limitations of existing solution drop casting epitaxy methods for preparing... p To address the problems of uncontrollable layer number, limited area, and insufficient reactive oxygen generation efficiency in MSB molecular crystal thin films, this invention utilizes toluene vapor atmospheres of varying concentrations to control the solvent evaporation rate, thereby achieving... p The few-layer, large-area, and uniform growth of MSB molecular crystal thin films allows for the regulation of molecular arrangement and electronic structure, promoting electron localization and efficient electron transfer to oxygen molecules under illumination, thus significantly improving the generation efficiency and stability of superoxide ions.

The application discloses a modified two-dimensional metal organic framework nanosheet membrane, a preparation method thereof and gas separation application. The original two-dimensional metal organic framework nanosheet membrane is controllably modified through solvent vapor treatment, the interaction force between adjacent nanosheet layers in the nanosheet membrane is enhanced, and the passage of macromolecular gas along the channel between the nanosheet layers is inhibited, so that the separation selectivity is improved. The preparation and modification method of the original nanosheet membrane comprises the following steps: (1) synthesizing a metal organic framework layered precursor by a solvothermal method; (2) combining a wet ball milling method and an ultrasonic dispersion method to delaminate the metal organic framework layered precursor to obtain two-dimensional metal organic framework nanosheets; (3) assembling the two-dimensional metal organic framework nanosheets into an original two-dimensional layered metal organic framework nanosheet membrane on the surface of a porous carrier; and (4) modifying the nanosheet membrane through solvent vapor treatment. The modified two-dimensional metal organic framework nanosheet membrane prepared by the application has excellent gas separation performance.

The utility model relates to the technical field of semiconductor manufacturing, in particular to a wafer supporting structure for baking. The utility model provides a wafer supporting structure for baking, which can enable the side end supporting assembly and the middle supporting assembly to alternately support the lower surface of a wafer through a mode of arranging the side end supporting assembly, the lifting motor and the middle supporting assembly, thereby reducing the influence on the baking effect of the wafer caused by heat transfer blocking due to local shielding, and improving the baking quality of the wafer. The baking difference of the wafer is reduced; and 2, the side end supporting assembly lifts or sinks one side of the wafer, so that the wafer swings up and down during baking, the surface adhesive film flows and is redistributed through external force, the thickness uniformity of the adhesive film is improved, meanwhile, solvent steam is more easily diffused to the surface from the interior of the adhesive film, and the volatilization efficiency of the solvent steam is improved.

The application provides a method for synthesizing 2,2'-dithiobisbenzothiazole under negative pressure, wherein the absolute pressure of a reaction system is controlled to be 20-45 kpaA, the reaction temperature in a reaction kettle is kept at 30-60 DEG C under the pressure, 2-mercaptobenzothiazole slurry and an oxidizing agent are reacted, 2,2'-dithiobisbenzothiazole is synthesized by a one-step method, and solvent vapor is returned to a solvent recovery tank after being condensed. The method can control the reaction temperature by controlling the vacuum degree of the reaction system, the reaction kettle body does not need to be provided with heat exchange pipes, the problem of poor heat transfer effect caused by fouling can be effectively avoided, the production can be continuously and stably carried out, the cost of starting and stopping and the safety risk can be effectively reduced, the reaction heat can be effectively utilized to recover the solvent, the energy consumption cost of 200 yuan per ton of product can be directly reduced, the temperature in the reaction system kettle is more uniform, the side reaction is less, the product content is high, and the yield is high.

The present disclosure relates to a method of manufacturing a 3D printed object. The method comprises treating an outer surface of a 3D printed object with a dye condensing solvent vapour on the treated outer surface; and dissolving a portion of the treated outer surface in the condensed solvent to reduce the surface roughness of the 3D printed object.

A method for manufacturing a bulk heterojunction organic photovoltaic cell through a combination of thermal annealing and solvent vapor annealing is described. In an effort to improve the crystalline properties of a photoactive material, a bulk heterojunction film may be prepared by a known method, e.g., spin coating, and then exposed to one or more vaporized solvents and thermally annealed.

In a state in which a solvent capable of dissolving ozone gas is circulated through a circulation line (L2a), the temperature of the solvent is appropriately controlled, and the solvent is caused to flow into a gas-liquid mixer (21) to which the ozone gas is supplied at an arbitrary supply pressure, thereby mixing and dissolving the ozone gas in the solvent. The gas-liquid mixer (21) includes a solvent flow path through which a solvent flows, and an ozone gas introduction path that is connected to the solvent flow path and introduces ozone gas supplied to the gas-liquid mixer (21) into the solvent flow path. In addition, the solvent temperature is controlled such that the solvent vapor pressure is less than the ozone gas supply pressure, and the ozone gas supplied to the gas-liquid mixer (21) has an ozone concentration of 50 vol% or more and an ozone partial pressure of 30 kPa (abs) or less.

The invention is applicable to the technical field of high polymer material processing, and provides a polysulfone purification production line, which comprises a pretreatment tank for pretreating a polysulfone raw material; the assembly frame is arranged on one side of the pretreatment tank, and a condenser for condensing solvent steam to extract oligomer is arranged on the assembly frame; the first container and the second container are arranged below the assembly frame and are used for containing solvent liquid for polysulfone purification in a classified manner; the grading tower is arranged on one side of the assembly frame, a treatment box is arranged at the top of the grading tower, a flocculation chamber and a pelletizing chamber which are communicated with each other are arranged on the treatment box, and a drawable baffle is arranged between the flocculation chamber and the pelletizing chamber. According to the polysulfone purification production line provided by the scheme, the problem of more polysulfone impurities is solved.

The present invention discloses a uniform coating device and process for the primer and topcoat of enameled wire. Among them, the coating device includes a bracket and a conveying mechanism. The bracket is also provided with a primer coating mechanism and a topcoat coating mechanism arranged in sequence along the conveying direction of the enameled wire. An anti-foaming component is arranged between the primer coating mechanism and the topcoat coating mechanism. The anti-foaming component includes a heating sleeve arranged on the bracket for the enameled wire to pass through. By applying uniform pressure to the enameled wire through an elastic pressing wheel, combined with the heating effect of the heated air flow entering the heating sleeve on the primer, the solvent vapor is discharged in time, avoiding coating problems caused by steam condensation and the generation of bubbles during the subsequent topcoat coating, ensuring a stable and efficient coating process, and improving the coating effect and stability of the primer and topcoat of the enameled wire.

This invention relates to a substrate processing apparatus and a substrate processing method. The substrate processing apparatus includes: a processing tank storing a processing liquid; a chamber surrounding the processing tank; a solvent vapor nozzle supplying solvent vapor into the chamber; a cleaning liquid nozzle supplying cleaning liquid into the chamber; and a control unit. The control unit performs an immersion process and a drying process at predetermined intervals. The immersion process involves immersing the substrate in the processing liquid stored in the processing tank, and the drying process uses solvent vapor supplied from the solvent vapor nozzle to dry the substrate, which has been processed in the processing liquid and then removed from the processing tank. The control unit supplies cleaning liquid into the chamber from the cleaning liquid nozzle and immerses the processing tank in the cleaning liquid stored in the chamber, thereby performing a chamber cleaning process to clean the chamber, including the outer wall of the processing tank.

The utility model discloses a nuclear magnetic tube cleaning device and a nuclear magnetic tube cleaning system, which enable a receiving bottle and a soaking tube to be filled with a proper amount of solvent, and then the receiving bottle is heated, so that the solvent in the bottle is kept boiling. The solvent steam is condensed in the condensing pipe and flows back into the soaking pipe, so that the outer wall of the nuclear magnetic tube is soaked, and when the solvent submerges the nuclear magnetic tube, the interior of the nuclear magnetic tube is soaked until the solvent submerges the positioning frame, and all the nuclear magnetic tubes and the whole positioning frame are soaked. When the liquid level of the solvent submerges the top end of the siphon, the solvent in the soaking pipe is siphoned and flows back to the receiving bottle by the siphon, and when the liquid level of the soaking pipe is lower than the positioning frame, the liquid in the nuclear magnetic tube begins to be siphoned and flows back to the soaking pipe. After the solvent in the soaking pipe is completely refluxed for three times or more than three times, the nuclear magnetic tube is cleaned up. According to the device, by means of the siphon principle and the steam condensation mode, repeated utilization of the cleaning solvent is achieved, the nuclear magnetic tube is cleaned for multiple times, and the cleaning efficiency and cleanliness of the nuclear magnetic tube are improved.

This pattern-forming device comprises: a solvent treatment compartment which has a chamber for accommodating a substrate and a supply port for solvent vapor, and in which a pattern-forming treatment for forming a pattern on the substrate by treating the substrate with the solvent vapor having been supplied into the chamber is performed; a heat treatment compartment which has a chamber for accommodating the substrate having been treated in the solvent treatment compartment and a heater for heating the substrate, and in which, through heating with the heater, a drying treatment is performed to dry the substrate on which the pattern has been formed; a conveyance mechanism which conveys the substrate between the solvent treatment compartment and the heat treatment compartment; and a housing which accommodates the solvent treatment compartment, the heat treatment compartment, and the conveyance mechanism in a shared accommodation space.