The application discloses a device and method for preventing
pollution and blockage of a cold stage
system of a
scanning electron microscope, the device comprising a main low-temperature gas
path system and a normal-temperature
nitrogen branch, low-temperature
nitrogen discharged from the main low-temperature gas
path system is divided into two paths, and is respectively connected to a cold hydrazine and a cold stage and is independently controlled through a flow valve. In order to solve the problems that a sample is easily polluted and a gas path is easily blocked during temperature rising in the prior art, a normal-temperature
nitrogen branch is additionally arranged on the cold stage gas path through a three-way valve. During a
system temperature rising stage, the cold stage low-temperature gas path is closed and the normal-temperature nitrogen
branch is opened, dry nitrogen is blown to the cold stage, the cold stage is rapidly heated under
positive pressure protection, meanwhile, the cold hydrazine continuously obtains low-temperature nitrogen, and an ultralow temperature is maintained. The above-mentioned measures ensure that a large
temperature difference (such as > 150 DEG C) always exists between the cold hydrazine and the cold stage, ensure that pollutants are preferentially captured by the cold hydrazine, effectively protect the surface of the sample to be clean, and fundamentally prevent the gas path from being blocked due to
moisture backflow.