The application provides a gas
mass flow
servo control device and a control method, which comprises a gas collecting
pipe, an inlet
electromagnetic valve group, an exhaust
electromagnetic valve group, a pressure regulating valve and a
regulator; the gas collecting
pipe is sealedly connected with the inlet
electromagnetic valve group, the exhaust electromagnetic valve group and the pressure regulating valve to provide a gas storage space with stable
gas pressure; supersonic nozzles in the inlet electromagnetic valve group and the exhaust electromagnetic valve group are installed on the two sides of the gas collecting
pipe in a split manner, and the on-off states are opposite, so that the required gas
mass flow of a gas using device is provided while the
gas pressure in the gas collecting pipe is kept stable; the
regulator determines the current gas
mass flow, the theoretical pressure of the gas collecting pipe at the next moment and the on-off combination of all supersonic nozzles in the inlet and exhaust electromagnetic valve groups, and drives the
actuator to act. The application overcomes the problems of discontinuous data, large overshoot, long
response time and large steady-state error during the regulation of the gas mass flow, and has the characteristics of simple structure, high
automation and intelligence and good
system stability.