Low-energy scanning electron microscope system, scanning electron microscope system and sample detection method

Abstract

The present invention discloses a low-energy scanning electron microscope system. The low-energy scanning electron microscope system comprises an electronic source configured to generate an electron beam; an electronic acceleration structure configured to add the motion speed of the electron beam; a compound objective lens configured to perform collection of electronic beams accelerated through the electronic acceleration structure; a deflection device configured to change the movement direction of the electronic beams; a detection device comprising a first sub detection device configured to receive secondary electrons and backscattered electrons generated on the samples, a second sub detection device configured to receive the backscattered electrons and a control device configured to change the movement directions of the secondary electrons and the backscattered electrons; and an electric lens comprising the second sub detection device, a sample table and a control electrode and configured to reduce the movement speed of the electronic beams and change the movement directions of the secondary electrons and the backscattered electrons. The present invention further discloses a scanning electron microscope system and a sample detection method.

Description

technical field [0001] The invention relates to scanning electron microscope technology, in particular to a low-energy scanning electron microscope system, a scanning electron microscope system and a sample detection method. Background technique [0002] Scanning electron microscopes are widely used to observe the characteristics of samples in the micron or nanometer size range; when observing non-metallic samples such as biological samples or semiconductor samples, scanning electron microscopes with low drop point energy (energy less than 3keV) can reduce damage to samples and charge effect and widely used. [0003] On the one hand, under the condition of low drop point energy, most of the samples to be detected are non-conductive materials. In order to prevent the charging effect or damage the samples, the incident scanning electron beam current is usually very small, only a few hundred pA or even several pA, so the excitation from the sample There are very few signal ele...

AI Technical Summary

Problems solved by technology

[0005] At present, under the condition of low landing point energy, there is no such thing as high resolution, 100% or close to 100% signal electron collection efficiency, flexible detection of backscattered electrons at different emission angles, and flexible control of received signal electrons. Scanning Electron Microscopes of Classes and Other Requirements

Images