27 results about "Neutral particle" patented technology

The invention discloses a semiconductor structure processing method and a semiconductor structure, and the processing method comprises the steps: providing a substrate with a high-aspect-ratio etching structure, and enabling the side wall of the high-aspect-ratio etching structure to have rough surface morphology; performing a first treatment on the surface of the sidewall using first neutral particles to generate an oxide layer on the surface of the sidewall; performing second treatment on the surface of the side wall by using second neutral particles so as to remove the oxide layer and reduce the roughness of the surface of the side wall; and performing third treatment on the surface of the side wall by using third neutral particles so as to repair lattice damage existing on the surface of the side wall. According to the method, different neutral particles are excited by using metastable state particles, and the rough surface of the side wall is correspondingly treated, so that the treatment degree can be finely controlled, lower damage is realized, the uniformity is more controllable, the surface of the treated side wall is smoother, and the performance of a device is improved.

The invention discloses a device and method for measuring beam parameters of a neutral beam source, the device comprises the neutral beam source, a deflection magnetic field, an ion receiving electrode and a neutral particle receiving electrode, the deflection magnetic field is located at the downstream of the particle emitting direction of the neutral beam source, and the ion receiving electrode comprises a plurality of tungsten blocks distributed at certain intervals. Water cooling channels are arranged in all tungsten blocks, the neutral particle receiving electrode is positioned at the downstream of the ion receiving electrode and is opposite to the neutral beam source, the neutral particle receiving electrode comprises a neutral particle measuring probe, and a water cooling channel is arranged in the neutral particle measuring probe. The device can realize accurate measurement of neutral beam energy and beam intensity at the same time, and has the characteristics of time saving, high efficiency, simple structure, real-time online detection, capability of displaying instantaneous energy change caused by system state change, high resolution, long service life and the like.

A low-energy neutral particle beam generating device belongs to the field of neutral particle beam technology. The ion beam is accelerated through an extraction device and enters an ion beam deflection device, where a diversion channel is provided, and a molecular pump is installed along the axial channel of the ion source. After passing through the deflection channel, the ion beam enters the ion beam analysis device and the neutralization device area, and passes through a charged particle stripping device. The present invention generates an ion beam based on an ion source, and collimates and regulates the energy of the ion beam through an ion beam extraction device; strips the neutral components in the beam through ion beam deflection and a molecular pump; neutralizes the ions based on surface grazing neutralization; and the neutralized beam passes through a charged particle stripping device to remove the charged components in the beam. The energy distribution and beam current density of the obtained neutral particle beam can be quantitatively measured through a neutral particle beam detection device, so as to be used for the calibration of neutral particle detectors and the study of the neutral beam etching process.

The present application discloses a method for processing a semiconductor structure and a semiconductor structure. The processing method includes: providing a substrate having a high aspect ratio etching structure, wherein the sidewall of the high aspect ratio etching structure has a rough surface topography; using a first neutral particle to perform a first treatment on the surface of the sidewall to generate an oxide layer on the surface of the sidewall; using a second neutral particle to perform a second treatment on the surface of the sidewall to remove the oxide layer and reduce the roughness of the sidewall surface; using a third neutral particle to perform a third treatment on the surface of the sidewall to repair the lattice damage existing on the sidewall surface. The present application uses metastable particles to excite different neutral particles to perform corresponding treatments on the rough surface of the sidewall, which can finely control the treatment degree, achieve lower damage, and have more controllable uniformity, making the treated sidewall surface smoother, thereby improving the device performance.

The invention relates to a method and a device for reducing a local thermal load on a surface of a particle collection device that is struck by electrically charged particles. The electrically charged particles may correspond in particular to a fraction of non-neutralised ions from a particle beam of neutralised ions downstream of a neutraliser of a neutral beam injection device of a fusion reactor. The method comprises changing, preferably continuously, the point of impact (P) of the charged particles (8) on the surface (34) by exposing the charged particles (8) to at least one magnetic and / or electric field, the field lines of which are oblique or perpendicular to a flight direction of the charged particles and the field strength of which is varied, preferably continuously, in order to change the point of impact (P) so as to reduce a local thermal load on the surface (34), the surface (34) being designed as an area with an open cross-section.

The invention discloses an integrated high-energy particle detector for a magnetic confinement fusion device, which mainly comprises a cross collimator and a scintillator plate, the cross collimator is provided with a front collimation hole, a rear collimation hole, an upper collimation hole and a lower collimation hole, the upper collimation hole, the lower collimation hole, the front collimation hole and the rear collimation hole are arranged in a cross manner, and the top of the upper collimation hole is provided with an electronic stripping film. Ions with different energies and throwing angles pass through the front and rear collimation holes, so as to hit different coordinates on the scintillator to emit scintillation light; the high-energy neutral particles which are not electrified sequentially pass through the lower collimation hole and the upper collimation hole in a straight line, then pass through the electron stripping film, are stripped with electrons and become ions, and then do Ramor cyclotron motion in a magnetic field and strike the scintillator to emit scintillation light. The integrated high-energy particle detector can detect high-energy ions and high-energy neutral particles in the magnetic confinement fusion device at the same time.

The application discloses an integrated high-energy particle detector for a magnetic confinement fusion device, mainly comprising a cross collimator and a scintillator plate, front, rear, upper and lower collimating holes are formed in the cross collimator, the upper and lower collimating holes are arranged in a cross shape with the front and rear collimating holes, and an electron stripping film is installed on the top of the upper collimating hole. Ions with different energies and pitch angles pass through the front and rear collimating holes, thereby hitting different coordinates on the scintillator to emit scintillation light; for high-energy neutral particles without electricity, the high-energy neutral particles pass through the lower collimating hole and the upper collimating hole in sequence, then pass through the electron stripping film to be stripped of electrons to become ions, and then make Larmor cyclotron motion in a magnetic field and hit the scintillator to emit scintillation light, therefore, the integrated high-energy particle detector can simultaneously detect high-energy ions and high-energy neutral particles in the magnetic confinement fusion device.

The invention discloses an E / / B neutral particle analyzer detector for a Tokamak device, which belongs to the technical field of high-temperature plasma diagnosis and comprises a magnet structure for generating a specific magnetic field structure and a vacuum chamber structure for passage of charged ions. The electrode plate structures are used for guiding the charged ions to deflect; the detector main body structure is used for receiving the charged ions; the magnet structure is vertically fixed on a plane, the vacuum chamber structure is fixed and tightly attached in a gap of the magnet structure, the electrode plate structure is fixed in the vacuum chamber structure, and the detector main body structure is fixed in the vacuum chamber structure. While the target magnetic field structure and the energy detection range are met, the overall size and mass of the device are effectively optimized.

A plasma source having an adjustable exit aperture is disclosed. The plasma source has a cylindrical body and two ends, wherein a housing aperture is formed along the cylindrical body. An adjustable output plate is disposed on the cylindrical body and covers the housing aperture. The adjustable output plate has an exit aperture, smaller than the housing aperture. The adjustable output plate is capable of rotation in the circumferential direction, thus moving the position of the exit aperture relative to a workpiece holder. The plasma source is configured such that changes to the exit angle may be performed without breaking vacuum. In some embodiments, a defining aperture is located outside the exit aperture to define the path of radicals and neutrals. In other embodiments, biased electrodes may be disposed outside the exit aperture.

A plasma source having an adjustable outlet opening is disclosed. The plasma source has a cylindrical body and two ends, with a housing opening formed along the cylindrical body. An adjustable output plate is positioned on the cylindrical body and covers the housing opening. The adjustable output plate has an outlet opening smaller than the housing opening. The adjustable output plate is circumferentially rotatable and thus moves the position of the outlet opening relative to the workpiece holder. The plasma source is configured such that changes in the outlet angle can be performed without breaking the vacuum. In some embodiments, a delimiting opening is positioned outside the outlet opening to define the paths of radicals and neutral particles. In other embodiments, a biased electrode may be positioned outside the outlet opening.

The invention discloses a method and system for optimizing two-dimensional argon plasma uniformity by introducing a high-energy particle source, and the method comprises the steps: S1, filling a plasma reaction chamber with background gas, and simulating the distribution of neutral particles; s2, initializing the speed and the position of charged particles in the gas in the chamber, enabling the charged particles to be uniformly distributed in the chamber, and determining the intensity, the time sequence, the incident direction and the incident position of high-energy particles emitted by an external particle source; s3, calculation of charged particle density, potential and electric field; s4, calculating the force acting on the charged particles; s5, moving the charged particles; s6, checking and executing collision; and S7, repeating the steps S3 to S6, adjusting the high-energy particle injection time sequence until a steady state is reached, and obtaining the data distribution of the charged particles. Through controllable interaction between an external particle source and plasma or background gas, seed electrons-ions are actively generated in a specific space area or energy distribution is changed, and inherent space non-uniformity of the plasma is compensated.

The invention belongs to the field of magnetic confinement controllable nuclear fusion, and discloses a method for simulating Tokamak INPA to diagnose passive signals. The method comprises the following steps: firstly, calculating fast ion steady-state moderated distribution at a corresponding moment by using physical parameters of a neutral beam injection device and a temperature density profile of plasma at the corresponding moment and combining a test particle program, and then simulating distribution of neutral particles near a plasma boundary by using a boundary neutral particle simulation program; and inputting the calculated fast ion steady-state moderated distribution and boundary neutral particle distribution as input files into a fast ion diagnosis simulation program, simulating by using the fast ion diagnosis simulation program to obtain particle flux collected by INPA diagnosis in unit time, and comparing a simulation result with a measured value of INPA. According to the invention, the simulation of INPA diagnosis passive signals is realized, the experimental measurement result can be reproduced in simulation, and efficient numerical analysis is provided for the INPA diagnosis passive signals.

The embodiment of the invention discloses a high-pressure gas switch arc plasma particle component prediction method, system, medium and equipment, and the method comprises the steps: constructing a thermochemical database, and storing the thermodynamic parameters of SF6, air, fluorocarbon and dissociation / ionization decomposition products thereof, and metal steam; the method comprises the following steps: performing atomic-scale decomposition on a detected arc extinguishing medium to identify basic elements, extracting metal vapor, neutral particles containing the elements and charged ions generated by ionization of the neutral particles in combination with a database, and forming a candidate particle list; constructing a reaction equation library (reactants and products are from candidate lists) on the basis of mass conservation, and determining dominant reaction paths under different temperatures and pressures; determining particle number density distribution during balance according to the dominant path, constructing a neural network model taking temperature pressure as input and number density as output, defining a loss function and completing training; and finally, inputting the current arc temperature pressure to quickly obtain the corresponding population density distribution so as to provide support for the optimization of the arc extinguishing performance of the high-voltage switch.

The invention relates to the technical field of high-temperature plasma diagnosis, in particular to a method for drawing a neutral particle counting rate time curve of a neutral particle analysis system, which comprises the following steps of: measuring a background energy spectrum and an original energy spectrum, and calculating background components in the original energy spectrum; background noise in the original energy spectrum is deducted based on the background component, and a net energy spectrum is obtained; determining a counting ratio of channel addresses in a neutral particle energy region in the net energy spectrum to the original energy spectrum; performing weighted statistics on the timestamps of the pulse signals according to the counting ratio to generate a statistical histogram; performing normalization processing on the counting value of the statistical histogram to generate a neutral particle counting rate time curve; according to the method, the background of the measurement spectrogram of the electric field parallel magnetic field type neutral particle analysis system can be quickly and effectively removed, the counting error of the measurement neutral particles is effectively reduced, and an accurate neutral particle energy spectrum and counting rate time curve can be obtained.

The invention provides a magnetic shielding structure for a detector in a neutral particle analyzer of a Tokamak device, which belongs to the technical field of nuclear fusion diagnosis and comprises a common magnetic shielding cover body, an independent magnetic shielding cover body and a grid shaped like a Chinese character'jing 'on a signal input window at the front end of the independent magnetic shielding cover body. Compared with a traditional design of adding an independent magnetic shielding cover body to a common magnetic shielding cover body, a #-shaped grating framework is additionally arranged on a signal input window at the front end of the independent magnetic shielding cover body, a low-carbon steel material is adopted, and the grating divides an open area into nine independent magnetic compensation areas under the condition that the functions of the detector are not influenced, so that the performance of the detector is improved. And the magnetic field can be reduced to be less than 25Gs that the PMT detector can normally work. According to the invention, the problem of signal distortion of the photomultiplier (PMT) caused by high-intensity magnetic field interference is solved, and a stable and efficient magnetic shielding mode is provided.

The present invention appropriately controls the distribution of charged particles in an ion source. To this end, the present invention comprises: a plurality of plasma generation units (140) each provided with a magnetic flux generation unit (143); an expansion chamber (160) that is connected to the plurality of plasma generation units and emits charged particles; and a magnetic path member (150) through which the magnetic flux generated by the magnetic flux generation units passes. Defining a first magnetic flux density (B) to be the magnetic flux density in an interior space of the expansion chamber and defining a second magnetic flux density (B0) to be the magnetic flux density in the interior space of the expansion chamber in the case of having removed the magnetic path member, the magnetic path member is formed such that the magnetic flux density ratio (B / B0) at a central axis (CL-P) of the expansion chamber and the magnetic flux density ratio (B / B0) at the periphery of the expansion chamber are different.

A system for generating thrust includes a thruster body having a funnel and an ion accelerator. The funnel has an opening at a first end of the thruster body and is configured to receive neutral particles and cause ionization of the neutral particles, resulting in corresponding ions and electrons. The ion accelerator extends from the funnel to a second end of the thruster body and is configured to receive the ionized particles from the funnel and cause ejection of the ionized particles from an opening at the second end of the thruster body, generating thrust.

A plasma source with an adjustable exit aperture is disclosed. The plasma source has a cylindrical body and two ends, with a housing bore formed along the cylindrical body. The adjustable output plate is disposed on the cylindrical body and covers the housing hole. The adjustable output plate has an exit aperture smaller than the housing aperture. The adjustable output plate is rotatable in a circumferential direction to move out of the perforation position relative to the workpiece holder. The plasma source is configured to vary an exit angle without disrupting a vacuum state. In some embodiments, a definition aperture is located outside the exit aperture to define a path for radicals and neutral particles. In other embodiments, a bias electrode may be disposed outside the exit aperture.

The present invention provides a particle beam device and a composite beam device, wherein the particle beam device can selectively and appropriately switch between a charged particle beam and a neutral particle beam. The particle beam column (19) includes an ion source (41), a condenser (52), a charge exchange grid (55) and an objective lens (56). The ion source (41) generates ions. The condenser (52) switches the ion beam and the neutral beam as a particle beam irradiated to a sample (S) by switching the focus of the ion beam. The charge exchange grid (55) converts the ion beam into a neutral particle beam by neutralizing at least a portion of the ion beam. The objective lens (56) is arranged on the downstream side of the charge exchange grid (55). When the neutral particle beam is irradiated to the sample (S) as the particle beam, the objective lens (56) reduces the ion beam toward the sample (S).

The application discloses a simulation method for tokamak neutral beam injection and fast ion deposition. In the numerical simulation of the neutral beam particle injection and ionization process in a tokamak device, the physical parameters of the neutral beam injection device are determined first, then the injection source is simplified by using a narrow particle beam model, the neutral beam particle density of a reference point given under geometric conditions is calculated, the average free path of the neutral beam particle ionization is calculated after the parameters of the position of the reference point in the plasma interior are obtained, the ions in different regions are divided by using a non-uniform grid and are given different weights, and finally the simulation process of the neutral beam injection is realized. The application realizes the simulation of the injection process of the neutral beam particles by using the narrow particle beam model, can obtain the neutral particle and fast ion distribution at any position in the plasma, has high calculation efficiency and strong numerical stability, and is a stable and efficient numerical simulation method.

Apparatus 100 for neutral beam microscopy comprises a neutral particle beam generator, a polariser 104 to polarise the beam 102 to align their magnetic moment along a predetermined direction, a gradient magnetic field generator 106 to manipulate the magnetic moment of the particles to encode the spatial position thereof within the beam, a sample holder for holding a sample 108 in the beam path, a detector apparatus 112 for detecting intensity of the particle beam with a signal intensity proportional to their magnetic moment. The amplitude of the gradient magnetic field is varied and signal intensities are recorded for each amplitude, wherein results are analysed by Fourier transform to obtain a profile of a surface property of the sample. By measuring a signal which depends on the magnetic moment orientation of the beam particles, a one dimensional profile or a two dimensional image of the specimen can be reconstructed.

The invention discloses a plasma constrained mode conversion control method based on boundary particle injection assistance, and relates to the technical field of constrained mode conversion control, and the method comprises the steps: calculating an initial set value of a power threshold through a built-in prediction model of a control unit based on the operation parameters of a current plasma, and entering a closed-loop control stage; in the closed-loop control stage, real-time plasma parameters are obtained through a diagnosis module; calculating a real-time power threshold value based on the plasma parameters, and comparing the real-time power threshold value with an initial set value to obtain a comparison result; according to a comparison result, dynamically adjusting injection parameters of a neutral particle injection module for injecting neutral particles into the plasma boundary region and heating power of a heating module for injecting energy into the plasma through a control unit in different control modes; the problems of high power dependence, inaccurate control and unstable conversion in the prior art are solved, and efficient and adaptive L-H conversion is realized.

The invention discloses a three-dimensional chord integral calculation method for spectral radiation of a magnetic confinement device, and belongs to the field of magnetic confinement fusion. The method comprises the following steps: constructing a three-dimensional boundary plasma-neutral particle transport program EMC3-EIRENE field alignment grid; an EMC3-EIRENE program is adopted to solve a fluid equation set of plasma and impurity transportation; establishing a spectral radiation three-dimensional chord integral calculation coordinate system; and calculating spectral radiation projection distribution of plasmas and impurities in different valence states in the magnetic confinement fusion device. Through accurate coupling of the three-dimensional magnetic field configuration and plasma transportation, asymmetric distribution of impurities and main plasma in complex geometry is effectively depicted, and errors introduced by a traditional axial symmetry hypothesis are eliminated. Independent calculation and overlay analysis of main plasma bremsstrahlung radiation and impurity line radiation are supported, contribution weights of different physical processes to total radiation are determined, and a basis is provided for targeted optimization.

In the ion source, the distribution of charged particles is appropriately controlled. [Solution] The system comprises a plurality of plasma generation units 140, each having a magnetic flux generating unit 143; an expansion chamber 160 connected to the plurality of plasma generation units 140 and emitting charged particles; and a magnetic path member 150 through which the magnetic flux generated by the magnetic flux generating units 143 passes. The magnetic flux density in the internal space of the expansion chamber 160 is defined as a first magnetic flux density B, and the magnetic flux density in the internal space of the expansion chamber 160 when the magnetic path member 150 is removed is defined as a second magnetic flux density B0. The magnetic path member 150 is formed such that the magnetic flux density ratio B / B0 at the central axis CL-P of the expansion chamber 160 is different from the magnetic flux density ratio B / B0 at the peripheral edge of the expansion chamber 160.

A plasma treatment system solves the problem of providing independent control over ion and neutral particle fluxes by separating the workpiece from the plasma and placing the workpiece on a movable stage. Extraction electrodes are used to extract ions from the plasma and beam them at the workpiece. The neutral particles are allowed to project from the plasma to the workpiece. The neutral particle flux has a much stronger dependence on distance from the plasma source than the ion flux. Accordingly, the neutral particle to ion flux ratio may be adjusted by moving the stage toward or away from the plasma source. This system has the additional advantage of enabling directional processing wherein the workpiece is held at a tilt with respect to the ion beam as the workpiece is scanned through the ion beam.

This invention relates to a method and system for measuring the total deposition rate of impurities in the magnetic shadow region of a tokamak. First, the neutral particle energy spectrum and net corrosion or deposition rate of the material in the magnetic shadow region are measured using a low-energy neutral particle analyzer and a quartz crystal microbalance. Second, based on the measurement results from the quartz crystal microbalance, the total corrosion rate of the material by neutral particles is calculated by selecting the corresponding sputtering yield and combining it with the neutral particle energy spectrum and solid angle. Then, the conversion factor for the corresponding net corrosion or deposition rate is determined. Finally, based on the theory that the corrosion and deposition results in the magnetic shadow region of a tokamak device are determined by the competition between neutral particle corrosion and impurity deposition, the total deposition rate of impurities is obtained. This invention can accurately measure the total deposition rate of impurities in the magnetic shadow region of a tokamak in situ and in real time, helping to understand the physical mechanism of impurity deposition and providing support for the safe operation of future fusion reactors.

The invention relates to the technical field of vacuum, and discloses a vacuum deposition method and a vacuum deposition system. A vacuum deposition method includes generating at least one deposition particle to deposit onto a sample. And generating neutral particles to collide with the at least one deposition particle to deposit the at least one deposition particle onto the surface of the sample.