The application relates to the technical field of thin film deposition equipment
processing, and discloses a
shower head particle cleaning and detection integrated device and method. The integrated device comprises a bearing mechanism, a
temperature control mechanism, a ventilation mechanism, a
particle detector and a driving mechanism. The bearing mechanism comprises a base, a first valve and a second valve. The base is used for placing the
shower head and has an open opening. The
shower head is placed in the sealed opening of the base, and the first valve and the second valve are communicated with the opening. The
temperature control mechanism comprises a temperature rising disc and a power supply. The temperature rising disc can be in
close contact with the shower head to rise the temperature. The ventilation mechanism is used for ventilating the shower head. The
particle detector is communicated with the second valve. The driving mechanism is used for driving the bearing mechanism or the
temperature control mechanism, so that the temperature rising disc and the shower head have close and far motion states. In the application, the shower head is heated to a first predetermined temperature to simulate the
actual use scene of the shower head, the detection precision is effectively improved, the cleaning and detection integration can be realized through the conversion of the first valve and the second valve, and the production and
processing convenience is improved.