The invention relates to an
optical fiber direct
feed type online detection device for particles in vacuum. The
optical fiber direct
feed type online detection device comprises a
vacuum chamber, a
laser generation and feed-in component, a
laser shaping component, a particle detection and
signal acquisition component, a vacuum unit and a to-be-detected cavity, the side wall of the
vacuum chamber is provided with a
laser feed-in and
signal lead-out sealing interface, and two ends are respectively connected with the vacuum unit and the to-be-tested cavity in a sealing manner; the
laser source is externally arranged in the vacuum cavity, and laser is directly fed into the cavity through the transmission
optical fiber; the laser shaping component shapes laser in the cavity to form a detection area; the particle detection and
signal acquisition part comprises a filtering element, a photoelectric detection element and a residual laser absorption element, the photoelectric detection element is used for receiving a
particle scattering signal, and the signal is led out through the sealing interface. According to the optical
fiber direct
feed type online detection device for the particles in the vacuum, external beam expansion is not needed, external light path interference, vacuum window reflection and visible light
noise are avoided, and stable real-time online monitoring of the particles in the vacuum is achieved.