1results about How to "Increase the sensing area" patented technology

The application discloses a resonator array structure and belongs to the technical field of micro-electro-mechanical systems. The resonator array structure comprises a plurality of resonator subunits, each resonator subunit comprising a resonator and at least one elastic coupling beam, the first end of the elastic coupling beam being connected to the resonator of the same resonator subunit, and the second end of the elastic coupling beam being connected to the resonator of another resonator subunit or the second end of the elastic coupling beam, so as to sequentially connect the plurality of resonator subunits together and form a preset geometric shape, the preset geometric shape being a stepped annular shape or a cross-connected symmetric pattern. The technical scheme of the application can increase the number of resonator subunits in the resonator array structure as much as possible in a limited area, effectively increases the sensing area of the resonator array structure, improves the dynamic impedance, and further helps to enhance the sensing signal of the resonator array structure.