The invention relates to a low-cost low-
pollution gallium nitride (GaN) nano-wire preparation generation method, and belongs to the field of
inorganic compound semiconductor materials. The method provided by the invention comprises the steps that: (1) GaN
powder is subjected to gum-
doping,
grinding, tabletting, and calcining, such that a GaN target is prepared; (2) a washed and bake-dried
silicon wafer is deposited for 30-60s by using a SBC-12 small
ion sputtering instrument, such that a substrate with a
gold film with a thickness of 10-30nm on the surface is obtained; and (3) a
plasma-assisted hot-wire
chemical vapor deposition method is utilized, wherein an
atmospheric pressure is 1500Pa-2500Pa, a substrate temperature is 800-1000 DEG C, a bias current is 100mA-180mA, a flow rate of fed
nitrogen is 10-50cm<3> / min, a flow rate of fed
hydrogen is 10-50cm<3> / min, and a deposition time is 5-30min. With the method provided by the invention,
solid and linear
gallium nitride nano-wires can be obtained. The product is straight, neat, ordered, uniform, and linear. Chemical and physical properties of the nano-wires are stable. The preparation process is short, and product growth is fast. Product
diameter reaches 40-150nm, and an average single wire length is 10-15mum.