The invention relates to a method and
system for detecting the vacuum degree of a
vacuum arc-extinguishing chamber based on high-frequency
discharge and
spectral analysis, and the method comprises the steps: exciting the interior of the
vacuum arc-extinguishing chamber to generate
field emission current through a high-frequency
electric field, and obtaining a high-frequency current
peak value through the
spectral analysis of the
field emission current; the vacuum degree is determined according to a pre-constructed vacuum degree-high-frequency current
peak value standard relation curve, a high-frequency power source is connected to a
vacuum arc extinguish chamber, the output
voltage of the high-frequency power source is gradually increased until a
vacuum gap breaks down, the
voltage waveform in the process is recorded, and the
total current of a loop is calculated; calculating a
capacitive current component by combining the
equivalent capacitance of the loop; and selecting a stable current section between two
dielectric breakdown events in the
total current, intercepting a current peak
signal in the section, and subtracting the
capacitive current component from the
total current corresponding to the peak
signal to obtain the
field emission current. Compared with the prior art, the method has the advantages of high sensitivity, simplicity and convenience in operation, accurate result and the like.