Filed-effect tube channel type field emission cathode and preparation method thereof

A tube-channel type, field emission technology, applied in cold cathode manufacturing, electrode system manufacturing, discharge tube/lamp manufacturing, etc., can solve the problem of difficult control of stability, and achieve the effect of uniform and stable field emission current
CN104992891AInactive Publication Date: 2015-10-21XI AN JIAOTONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
XI AN JIAOTONG UNIV
Publication Date
2015-10-21
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a field-effect tube channel type field emission cathode and a preparation method thereof. The cathode is modulated by a back gate and drain voltage. Additional bias voltage is used for changing electronic supply functions in two dimensional materials used as conductive channels, thereby adjusting field emission current density and achieving a field emission cold cathode modulated by the electric field. A new solution is provided for improving stability of field emission current of two-dimensional nano-materials, and a new path is provided for achievement of high-frequency regulated field emission cathode, thereby promoting actual application of two-dimensional nano cold cathodes with low emission threshold voltage in the vacuum microelectronic field.
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Description

technical field

[0001] The invention belongs to the field of vacuum microelectronics, and relates to a field emission cathode modulated by an external channel bias voltage and a back grid voltage and a preparation method thereof. Background technique

[0002] Integrated vacuum electronic devices require the cathode to have higher electron beam current density output, higher operating frequency, smaller cathode size and higher assembly precision. Compared with hot cathodes, which rely on increasing the kinetic energy of electrons to escape the surface barrier of materials, field emission cathodes with higher emission efficiency are the most promising solutions for integrated vacuum electronics. The development of field emission cathodes has gone through the earliest Spindt-type cathodes to nano-cold cathodes in recent years. The practical application of Spindt-type cathode technology is not smooth. Taking the silicon cone field emission array as an example, even thanks to th...

Claims

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