389results about "Cold cathode manufacture" patented technology

The invention relates to a gradient diameter microchannel plate and a preparation method and application thereof. The preparation method comprises the following steps: preparing a transparent material into a sheet-shaped substrate; the method comprises the following steps: processing conical array micropores in a substrate by using femtosecond laser to obtain a gradient-diameter substrate; when the conical array micropores are processed, the inlet end is firstly etched to form an opening, then the diameter is gradually and uniformly reduced to the outlet end, and the diameter of the inlet end is greater than that of the outlet end; the ratio of the hole depth of the conical array micropores to the diameter of the outlet end is 30-200, and the taper angle is 1-5 degrees; preparing AlO-SiO-BOsol containing Cs, uniformly coating the AlO-SiO-BOsol on the inner walls of the conical array micropores, and then carrying out hydrogen reduction to obtain a microchannel blank plate; and plating electrodes at the two ends of the micro-channel blank plate to obtain the gradient-diameter micro-channel plate. The gradient diameter microchannel plate provided by the invention has the advantages of high gain and low noise, and is more practical.

A field emission assembly and an electromagnetic wave generator are provided, the field emission assembly includes a linear emitter which includes carbon nanotube (CNT) fibers and emits electrons and a holder configured to fix the emitter, both ends of the emitter are fixed to the holder, and the emitter includes at least one of a curved portion so as to form a peak in an electron emission direction and a bent portion so as to form a peak in the electron emission direction.

The present invention discloses a method for preparing an X-ray fluorescent screen and the X-ray fluorescent screen thereof. The preparation method comprises the following steps: S1, pretreatment: cleaning and drying a microchannel structure; the microchannel structure is provided with a plurality of through microchannels, and the microchannel structure is made of glass; S2, microchannel coating: coating the sidewalls of the microchannels with a reflective film; S3, preparing a suspension: mixing fluorescent material particles, a carrier solvent, and a surfactant, and dispersing them to prepare a suspension; S4, filling the microchannels; S5, repeating the filling; S6, post-treatment: cleaning the surface of the microchannel structure and encapsulating it; the X-ray fluorescent screen is prepared using the above preparation method; the X-ray fluorescent screen comprises a microchannel structure, the microchannel structure is provided with a plurality of through microchannels arranged in an array, and the microchannels are filled with fluorescent material particles. The present invention fills the glass microchannel structure with fluorescent material particles to improve the resolution and fluorescence transmission efficiency of the X-ray fluorescent screen.

A manufacturing method of a substrate processing apparatus includes: preparing a main body having a lower end disposed at a first level, having a step formed at a second level higher than the first level, and having an upper end disposed at a third level higher than the second level; forming, by a thermal spray (TSC) method, a first coating from the first level to a height of a fourth level higher than the third level so as to surround the body; forming a bonding unit from an upper surface of the main body to the fourth level; forming a second coating layer on the first coating layer, the second coating layer having a smaller thickness than the bonding unit and a greater hardness than the first coating layer; and arranging a disc on the upper surfaces of the joint unit and the second coating.

A method for fabricating an electron field emission cathode, the field emission cathode including a substrate having a field emission layer engaged therewith, where the field emission layer incorporates modified carbon nanotubes and a matrix material to improve field emission characteristics of the cathode and field emission cathode devices implementing such cathodes.

The invention provides heat pump comprising a chamber for accommodating electrically charged or chargeable particles, having a thermal conductive wall, and an electrically insulating sink wall. A resistive layer made of electrical resistive material, is positioned outside the chamber with one of its faces proximal to the sink wall. The chargeable particles hit the internal surface of the sink wall, and the thermal conductive wall is in thermal communication with the particles. Thermal fluctuations of the charged particle in the chamber induce variable electric field on the resistive layer, which is harvested into electric current.

The embodiment of the invention provides a foil structure with a carbon nanotube and a preparation method thereof, a cold cathode and an X-ray tube, the foil structure comprises a metal substrate, the metal substrate is provided with a first surface and a first side surface, the first side surface is vertical to the first surface, and the first side surface is located at the edge of at least one side of the metal substrate; the bonding layer is located on the first surface of the metal substrate; the bonding layer is arranged on the first surface of the metal substrate, the multiple carbon nanotubes are located on the first surface of the metal substrate, the bonding layer is used for enhancing the bonding strength of the metal substrate and the multiple carbon nanotubes, the multiple carbon nanotubes comprise a carbon nanotube film and multiple discrete carbon nanotubes, the carbon nanotube film is located on the first surface, and the discrete carbon nanotubes are located on the second surface. The multiple discrete carbon nanotubes are located in the area, close to the first side face, of the first surface, at least the other part of the multiple discrete carbon nanotubes is located outside the carbon nanotube film, orthographic projections of the multiple discrete carbon nanotubes on the metal substrate are located outside the first surface, and the at least the other part of the multiple discrete carbon nanotubes protrude in the direction away from the metal substrate relative to the first side face.

The invention relates to the technical field of field emission cathodes, in particular to an Au nanoparticle modified 4H-SiC nanowire field emission cathode and a preparation method thereof. The method comprises the following steps: (1) performing electrochemical etching on a 4H-SiC wafer, processing a bamboo-like 4H-SiC nanowire array on the surface of the 4H-SiC wafer, and stripping the 4H-SiC nanowire array from the 4H-SiC wafer; (2) carrying out magnetron sputtering on Au nanoparticles on the surface of the 4H-SiC nanowire array obtained in the step (1); and (3) annealing treatment is carried out on the 4H-SiC nanowire array with the Au nanoparticles, the annealing temperature is 200-400 DEG C, the heat preservation time is 50-70 min, and the Au nanoparticle modified 4H-SiC nanowire field emission cathode is obtained. The bamboo-like 4H-SiC nanowire attached with Au nanoparticles is annealed, and the obtained field emission cathode is low in turn-on electric field and high in electron emission stability.

The application provides an ICP and CCP combined plasma etching device, method and preparation method, which comprises upper and lower electrodes oppositely arranged in a plasma vacuum reaction chamber; the upper electrode comprises a gas spraying area for spraying gas downward and a edge area surrounding the gas spraying area, the edge area is provided with a plurality of circumferentially uniformly distributed windows, and each window is closed by an insulating piece; wherein a coil is arranged above each insulating piece in one-to-one correspondence, or a coil extending through the above of all insulating pieces along the circumference of the edge area is arranged above the edge area. The application can solve the problems that the existing ICP etching device cannot withstand high-power bias electric field and the CCP etching device is prone to cause relatively low plasma density at the edge of the substrate.

A method for manufacturing a field emission device is disclosed, which includes the steps of forming a primary epitaxial layer on a substrate, forming a plurality of secondary epitaxial structures on the primary epitaxial layer, forming an emitter electrode layer and a dielectric layer located on the primary epitaxial layer between the emitter electrode layer and the plurality of secondary epitaxial structures, sequentially forming a protective layer, an insulating layer, a gate electrode layer, and a planarization layer on the dielectric layer and the plurality of secondary epitaxial structures, etching the planarization layer to expose the dielectric layer and some of the gate electrode layers in some of the secondary epitaxial structures, etching and removing some of the protective layer, the insulating layer, and the exposed gate electrode layer in some of the secondary epitaxial structures to expose some of the secondary epitaxial structures, forming a gate connection electrode layer on the exposed gate electrode layer in the dielectric layer, and forming an anode facing the exposed secondary epitaxial structures and spaced a predetermined distance from the exposed secondary epitaxial structures.

A high-gain photomultiplier tube and a method for manufacturing the same. The photomultiplier tube comprises an upper ceramic substrate and a lower ceramic substrate, with a photocathode, a grid, an anode, and a plurality of electron multipliers disposed between the two ceramic substrates. A metal conductive film is deposited on the surfaces of the upper and lower ceramic substrates opposite the electron multipliers, and the metal conductive film is in mechanical contact with each electron multiplier. The photocathode, grid, anode, and electron multipliers are each connected and fixed to the ceramic substrate via positioning pins. A voltage divider resistor is connected between the photocathode and the positioning pin of the first-stage electron multiplier, between the positioning pins of two adjacent electron multipliers, and between the positioning pin of the last-stage electron multiplier and ground. The potential of each electron multiplier is set by adjusting the voltage divider resistor, and the potential difference between two adjacent electron multipliers and the potential difference between the last-stage electron multiplier and ground is in the form of a differentiated voltage divider. The present invention improves the gain and lifespan of the photomultiplier tube.

A method for manufacturing a field emission device is disclosed, which includes the steps of forming a primary epitaxial layer on a substrate, forming a plurality of secondary epitaxial structures on the primary epitaxial layer, forming an emitter electrode layer and a dielectric layer located on the primary epitaxial layer between the emitter electrode layer and the plurality of secondary epitaxial structures, sequentially forming a protective layer, an insulating layer, a gate electrode layer, and a planarization layer on the dielectric layer and the plurality of secondary epitaxial structures, etching the planarization layer to expose the dielectric layer and some of the gate electrode layers in some of the secondary epitaxial structures, etching and removing some of the protective layer, the insulating layer, and the exposed gate electrode layer in some of the secondary epitaxial structures to expose some of the secondary epitaxial structures, forming a gate connection electrode layer on the exposed gate electrode layer in the dielectric layer, and forming an anode facing the exposed secondary epitaxial structures and spaced a predetermined distance from the exposed secondary epitaxial structures.

The invention relates to a field emission cathode structure and a preparation method thereof. The method comprises the following steps: obtaining a first substrate layer with a polished surface, wherein the first substrate layer adopts a silicon wafer or a metal sheet; processing the first substrate layer into an arrayed grid mesh; sequentially depositing a metal conductive layer and a diffusion barrier layer on the outer surface of the grid mesh; depositing a SiNx electret layer on the diffusion barrier layer, and regulating and controlling nitrogen vacancy distribution of the SiNx electret layer through a gradient doping process; depositing an Al2O3 gradient heterojunction layer on the SiNx electret layer, and regulating and controlling the oxygen vacancy concentration of the Al2O3 gradient heterojunction layer through a gradient doping process to obtain a composite electret grid mesh; and aligning and bonding the composite electret grid mesh, the arrayed cathode emitter and the insulating layer to obtain the field emission cathode structure. By adopting the method, the high emission efficiency and stability of the cathode can be improved.

An electrical device can include a body having a shape and including one or more components, and first and second electrodes implemented at respective locations of the body and configured to provide first and second engagements with a mounting surface and to allow a settling motion when the electrical device is positioned on the mounting surface. The electrical device can further include a third electrode implemented at a respective location of the body and configured to allow a limited range of the settling motion such that at an end of the limited range of the settling motion, the third electrode provides a third engagement with the mounting surface.

The present invention provides a discharge lamp in which a coating is applied to the electrode surface, allowing the coating function to be effectively performed while the lamp is lit. [Solution] A coating layer 44 containing ceramics is formed on the surface of the body portion 34 of the electrode 30. The ceramics consist of zirconium nitride (ZrN), and the atomic concentration (%) of nitrogen (N) is relatively lower than the atomic concentration (%) of zirconium (Zr).

The application discloses a liquid metal dynamic pressure sliding bearing, a groove coating manufacturing method and an X-ray tube. The sliding bearing comprises a bearing core, a rotating shell arranged outside the bearing core and a liquid metal material arranged between the bearing core and the rotating shell. The rotating shell can rotate around the bearing core. At least a part of the surface of the rotating shell opposite to the bearing core and / or at least a part of the surface of the bearing core opposite to the rotating shell is provided with a plurality of grooves. The edge surface of the groove is provided with a wear-resistant coating composed of a wear-resistant material. The bottom surface and / or the side surface of the groove is provided with a first wetting coating composed of a wetting material.

A display apparatus manufacturing apparatus includes a chamber, a susceptor arranged in the chamber and supporting a display substrate, a head unit arranged in the chamber and spraying a cleaning gas into the chamber, a cleaning gas supply unit supplying the cleaning gas to the head unit, a pressure adjusting unit adjusting a pressure in the chamber, and a control unit determining an end point of cleaning.

A method (100) for producing an electrode structure (206) for an ion trap, comprising the following steps: providing (110) a base substrate (202) having a structured metallization arrangement (230) arranged in an insulating material (220) on a semiconductor layer (210); providing (120) an insulating substrate (250) having a dielectric material (252); bonding (130) a surface region (224) of the base substrate (202) arranged on the insulating material (220) to the insulating substrate (250) by means of a bonding process; and thinning (140) the base substrate (202) by removing the semiconductor layer (210) down to the insulating material (220) of the base substrate (202), wherein the electrode structure (206) is provided for the ion trap is formed by carrying out the step of back thinning to the metallization arrangement (230),or by applying a structured surface metallization (240) to the insulating material (220) of the re-thinned base substrate (202) or wherein the electrode structure (206) for the ion trap is formed by the structured metallization arrangement (230).

Disclosed are a substrate support unit and a substrate processing apparatus including the same, in which a heat generation issue of a bias electrode is improved. The substrate support unit is disposed inside a chamber body for processing of a substrate using plasma to hold the substrate, and includes a dielectric plate including a chucking electrode for adsorption of the substrate, a bias electrode provided inside the dielectric plate at a position below the chucking electrode to control plasma treatment process characteristics, and a bias power line configured to supply power to the bias electrode. The bias power line branches into a plurality of lines, and the plurality of lines forms junction portions together with the bias electrode in a region outside the substrate.

The invention provides a carbon nanotube cold cathode, a preparation method thereof and an X-ray tube, and the preparation method of the carbon nanotube cold cathode comprises the following steps: carrying out ball milling on an agglomerated carbon nanotube to obtain carbon nanotube powder; mixing the carbon nanotube powder with a first solvent and an electrolyte solution, and performing ultrasonic oscillation to obtain a suspension; a metal substrate is placed in the suspension liquid for electrophoretic deposition, and the carbon nano tube thin film cold cathode is obtained; coating a curing agent on the carbon nano tube thin film cold cathode for cross-linking curing to obtain a cured carbon nano tube cold cathode; and enabling the carbon nano tube in the carbon nano tube cold cathode in the curing state to form a tip by utilizing a high-energy ion beam, and enabling the carbon nano tube to form an upright state by utilizing a high-strength electric field to obtain the carbon nano tube cold cathode in an activated state.

The application discloses a CT cathode tube cathode surface coating and a preparation method thereof. The coating is prepared by improving a magnetron sputtering process, using iridium (Ir) and osmium (Os) as metal targets, and depositing a metal coating with a thickness of 10-20 microns on a molybdenum base. The prepared metal coating has a bonding force to the base which can exceed 100 N, and the coating is dense and has good uniformity, and can be used as a cathode for exciting electrons on the surface of a cathode tube in a CT X-ray tube.

The present invention is titled Methods and Systems for an X-ray Tube with Texture. The present invention provides various methods and systems for a cathode cup having surface texturing that aids in adhering an emitter deposition film. In one embodiment, a method may include chemically and / or mechanically texturing a surface of the cathode cup to form a plurality of features, each feature having a depth above a threshold, the surface of the cathode cup facing an emitter coupled to the cathode cup.

The utility model relates to the technical field of mass spectrometers, in particular to a mass spectrometer filament belt burning device which comprises a shell, the left side of the shell is fixedly connected with a molecular pump, the top of the shell is provided with a box cover, and the bottom of an inner cavity of the shell is fixedly connected with a fixing block. The lamp filament fixing device has the advantages of being capable of fixing lamp filaments of different specifications and convenient to disassemble, stable clamping of the lamp filaments of different specifications can be achieved through the arrangement of the fixing mechanism in the actual use process, the universality of the device is improved, the stability and safety of the lamp filaments in the installation process are guaranteed, and the service life of the lamp filaments is prolonged. According to the lamp filament inserting disc, the problem of installation difficulty or lamp filament loosening caused by mismatching of specifications is avoided, the lamp filament inserting disc can be easily locked and unlocked through the arrangement of the locking mechanism, a user can rapidly complete installation and disassembly of the lamp filament inserting disc only through simple up-down movement operation, and the working efficiency and the operation convenience are greatly improved.

The present invention relates to a high-temperature component (1) made of a refractory metal or a refractory metal alloy, which has a coating (3) for increasing the thermal emissivity. The coating (3) consists essentially of tungsten and rhenium, i.e., consists of at least 55 wt.% of rhenium and at least 10 wt.% of tungsten, and has at least 35 wt.% of the Re3W phase.

This invention provides an X-ray tube filament winding mold and a filament manufacturing method. The winding mold includes a first main mold, a second main mold, and a clamping plate. Both the first and second main molds are cylindrical. The front end of the first main mold and the rear end of the second main mold each have two positioning holes. Angular grooves are formed on both sides of the first main mold, symmetrically opposite in direction, with pin holes at the rear of the grooves. Two positioning pins are provided in the two positioning holes at the front end of the first main mold. The front end of the first main mold and the rear end of the second main mold can be connected by the positioning pins. The first and second main molds are fixed together by the clamping plate. Using the filament winding mold, a coil-shaped X-ray tube filament, distinct from a long, spiral filament, can be regularly wound. The filament winding mold has a simple structure, low manufacturing cost, is easy to use, has a high reusability rate, long lifespan, and wide applicability. The wound filament has a small and regular emission surface, resulting in a relatively concentrated spatial distribution of emitted electrons, making it easy to focus and improving the spatial resolution of image reconstruction.

The invention provides a one-dimensional array multi-channel periodic permanent magnet focusing system and a design method thereof. The one-dimensional array multi-channel periodic permanent magnet focusing system comprises pole shoes and magnetic groups which are arranged at intervals along a first direction, the pole shoes and the magnetic groups are periodically and alternately arranged along a first direction to form a plurality of periodic permanent magnet structures; the magnetic group comprises two pieces of first magnetic steel which are arranged at intervals along a second direction; the first magnetic steel and the pole shoe extend along a third direction; a plurality of through holes which are arranged at intervals in the third direction are formed in the pole shoe, and the through holes are used for assembling a slow wave structure; a plurality of through holes form a through hole unit; the two pieces of first magnetic steel are located on the two sides of the through hole unit in the second direction respectively. The magnetic group further comprises two pieces of second magnetic steel arranged between the two pieces of first magnetic steel; the two pieces of second magnetic steel are located on the two sides of the through hole unit in the third direction respectively. A plurality of amplification channels are integrated in one set of magnetic focusing system, and the focusing performance of the magnetic focusing system on electron beams is not influenced.

The present invention provides an electron source structure and manufacturing method, comprising: providing a first substrate, on which a stacked porous layer and a first conductive layer are formed; patterning the first conductive layer and the porous layer to form an opening; forming a passivation layer, which is filled into the opening and forms a groove in the passivation layer; forming a second conductive layer, which is filled into the groove and electrically connected to the first conductive layer; providing a second substrate, which is bonded to the second substrate; removing the first substrate, and forming a top electrode on the side of the porous layer away from the second substrate. The present invention forms a passivation layer in the opening of the active layer before transferring the active layer. The passivation layer serves as a supporting layer to enhance the mechanical strength of the active layer and improve the transfer success rate. Furthermore, the transfer of the active layer improves the flexibility of the substrate, allowing for flexible selection of the substrate's material type, structure type, and function type, thereby enhancing the integration flexibility of the electron source with other auxiliary functional systems such as CMOS systems and MEMS systems.

The invention discloses a silicon-based micro-channel plate (MCP) structure and a manufacturing method thereof, relates to the technical field of semiconductor device manufacturing, and aims to solve the problems of poor high temperature resistance, insufficient etching precision, film layer quality defect and process synergy deficiency of a traditional glass-based / organic-based MCP. An 8-inch N-type monocrystalline silicon wafer is adopted in the structure, the thickness of the N-type monocrystalline silicon wafer is (250-350) + / -25 microns, micropores of 3-10 microns are evenly distributed, the hole pitch is 7-22 microns, the inclination angle is 6-12 degrees, the side wall roughness is smaller than or equal to 50 nm, the perpendicularity deviation is smaller than or equal to + / -0.5 degrees, an AlO or AlO / HfO / AlO electron multiplication layer with the thickness of 10-30 nm is prepared on the inner wall of a channel through ALD, and a Cr / Ni electrode with the thickness of 50-80 nm is plated on the surface. According to the method, the OES is used for monitoring SiFs in real time. According to the invention, the double targets of < = 30% of 1kg impact fracture rate and stable electron multiplication gain are achieved, the tolerable temperature reaches 800 DEG C, the secondary electron emission efficiency is improved by 25%, the production efficiency is improved by 20%, the cost is reduced by 15%, and the method is suitable for the high-sensitivity detection fields of night vision imaging, particle detection and the like.

The application provides an X-ray tube cathode assembly assembling method, a tool and an X-ray tube. The method comprises the following steps: S100: pre-positioning a filament and a pin, so that the filament and the pin reach an assembling distance, to obtain a pre-assembled filament assembly; pre-positioning the filament assembly and a ceramic assembly and assembling the filament assembly to the ceramic assembly; S200: inspecting and adjusting the filament concentricity of the pre-assembled filament assembly, so that the concentricity is consistent with a cathode focusing electrode to be assembled; S300: assembling the cathode focusing electrode to the filament assembly whose concentricity has been adjusted, to obtain a cathode assembly in which the filament is concentric with the cathode focusing electrode. By using the assembling method and the tool, the assembling position of the filament can be accurately controlled, the concentricity of the filament and the cathode focusing hole is ensured, efficient assembly and welding of the cathode assembly are realized, the filament assembling time is greatly shortened, and the production efficiency and product performance are improved.

The present application provides a functionalized carbon nanocone tip, the front end of a tip base being modified by a carbon nanocone. The carbon nanocone is a cone-shaped nanocarbon material composed of a layered graphite structure; the tip base is made of metal selected from one or more of tungsten, iron, cobalt, nickel, and titanium; and the carbon nanocone has a tail end connected to the interface of the tip base on which a covalent bond is formed, and a tip end in an orientation consistent with the orientation of the central axis of the whole tip. The present application also provides a preparation method for the functionalized carbon nanocone tip. In the present application, the orientation of the carbon nanocone tip end coincides with the orientation of the central axis of the whole tip, thereby ensuring the controllability of an active emission site of the carbon nanocone tip during electron emission. The prepared functionalized carbon nanocone tip has a carbon nanocone tip end with a clean and complete layered graphite structure. The structure feature of the tip prevents damages or even failure of the tip structure caused by electron emission noise and uncontrollable emission current due to the contamination on the tip end surface.