254results about "Cold cathode manufacture" patented technology

The invention provides heat pump comprising a chamber for accommodating electrically charged or chargeable particles, having a thermal conductive wall, and an electrically insulating sink wall. A resistive layer made of electrical resistive material, is positioned outside the chamber with one of its faces proximal to the sink wall. The chargeable particles hit the internal surface of the sink wall, and the thermal conductive wall is in thermal communication with the particles. Thermal fluctuations of the charged particle in the chamber induce variable electric field on the resistive layer, which is harvested into electric current.

The embodiment of the invention provides a foil structure with a carbon nanotube and a preparation method thereof, a cold cathode and an X-ray tube, the foil structure comprises a metal substrate, the metal substrate is provided with a first surface and a first side surface, the first side surface is vertical to the first surface, and the first side surface is located at the edge of at least one side of the metal substrate; the bonding layer is located on the first surface of the metal substrate; the bonding layer is arranged on the first surface of the metal substrate, the multiple carbon nanotubes are located on the first surface of the metal substrate, the bonding layer is used for enhancing the bonding strength of the metal substrate and the multiple carbon nanotubes, the multiple carbon nanotubes comprise a carbon nanotube film and multiple discrete carbon nanotubes, the carbon nanotube film is located on the first surface, and the discrete carbon nanotubes are located on the second surface. The multiple discrete carbon nanotubes are located in the area, close to the first side face, of the first surface, at least the other part of the multiple discrete carbon nanotubes is located outside the carbon nanotube film, orthographic projections of the multiple discrete carbon nanotubes on the metal substrate are located outside the first surface, and the at least the other part of the multiple discrete carbon nanotubes protrude in the direction away from the metal substrate relative to the first side face.

The application provides an ICP and CCP combined plasma etching device, method and preparation method, which comprises upper and lower electrodes oppositely arranged in a plasma vacuum reaction chamber; the upper electrode comprises a gas spraying area for spraying gas downward and a edge area surrounding the gas spraying area, the edge area is provided with a plurality of circumferentially uniformly distributed windows, and each window is closed by an insulating piece; wherein a coil is arranged above each insulating piece in one-to-one correspondence, or a coil extending through the above of all insulating pieces along the circumference of the edge area is arranged above the edge area. The application can solve the problems that the existing ICP etching device cannot withstand high-power bias electric field and the CCP etching device is prone to cause relatively low plasma density at the edge of the substrate.

A method for manufacturing a field emission device is disclosed, which includes the steps of forming a primary epitaxial layer on a substrate, forming a plurality of secondary epitaxial structures on the primary epitaxial layer, forming an emitter electrode layer and a dielectric layer located on the primary epitaxial layer between the emitter electrode layer and the plurality of secondary epitaxial structures, sequentially forming a protective layer, an insulating layer, a gate electrode layer, and a planarization layer on the dielectric layer and the plurality of secondary epitaxial structures, etching the planarization layer to expose the dielectric layer and some of the gate electrode layers in some of the secondary epitaxial structures, etching and removing some of the protective layer, the insulating layer, and the exposed gate electrode layer in some of the secondary epitaxial structures to expose some of the secondary epitaxial structures, forming a gate connection electrode layer on the exposed gate electrode layer in the dielectric layer, and forming an anode facing the exposed secondary epitaxial structures and spaced a predetermined distance from the exposed secondary epitaxial structures.

The invention relates to a field emission cathode structure and a preparation method thereof. The method comprises the following steps: obtaining a first substrate layer with a polished surface, wherein the first substrate layer adopts a silicon wafer or a metal sheet; processing the first substrate layer into an arrayed grid mesh; sequentially depositing a metal conductive layer and a diffusion barrier layer on the outer surface of the grid mesh; depositing a SiNx electret layer on the diffusion barrier layer, and regulating and controlling nitrogen vacancy distribution of the SiNx electret layer through a gradient doping process; depositing an Al2O3 gradient heterojunction layer on the SiNx electret layer, and regulating and controlling the oxygen vacancy concentration of the Al2O3 gradient heterojunction layer through a gradient doping process to obtain a composite electret grid mesh; and aligning and bonding the composite electret grid mesh, the arrayed cathode emitter and the insulating layer to obtain the field emission cathode structure. By adopting the method, the high emission efficiency and stability of the cathode can be improved.

An electrical device can include a body having a shape and including one or more components, and first and second electrodes implemented at respective locations of the body and configured to provide first and second engagements with a mounting surface and to allow a settling motion when the electrical device is positioned on the mounting surface. The electrical device can further include a third electrode implemented at a respective location of the body and configured to allow a limited range of the settling motion such that at an end of the limited range of the settling motion, the third electrode provides a third engagement with the mounting surface.

The present invention provides a discharge lamp in which a coating is applied to the electrode surface, allowing the coating function to be effectively performed while the lamp is lit. [Solution] A coating layer 44 containing ceramics is formed on the surface of the body portion 34 of the electrode 30. The ceramics consist of zirconium nitride (ZrN), and the atomic concentration (%) of nitrogen (N) is relatively lower than the atomic concentration (%) of zirconium (Zr).

The application discloses a liquid metal dynamic pressure sliding bearing, a groove coating manufacturing method and an X-ray tube. The sliding bearing comprises a bearing core, a rotating shell arranged outside the bearing core and a liquid metal material arranged between the bearing core and the rotating shell. The rotating shell can rotate around the bearing core. At least a part of the surface of the rotating shell opposite to the bearing core and / or at least a part of the surface of the bearing core opposite to the rotating shell is provided with a plurality of grooves. The edge surface of the groove is provided with a wear-resistant coating composed of a wear-resistant material. The bottom surface and / or the side surface of the groove is provided with a first wetting coating composed of a wetting material.

A display apparatus manufacturing apparatus includes a chamber, a susceptor arranged in the chamber and supporting a display substrate, a head unit arranged in the chamber and spraying a cleaning gas into the chamber, a cleaning gas supply unit supplying the cleaning gas to the head unit, a pressure adjusting unit adjusting a pressure in the chamber, and a control unit determining an end point of cleaning.

Disclosed are a substrate support unit and a substrate processing apparatus including the same, in which a heat generation issue of a bias electrode is improved. The substrate support unit is disposed inside a chamber body for processing of a substrate using plasma to hold the substrate, and includes a dielectric plate including a chucking electrode for adsorption of the substrate, a bias electrode provided inside the dielectric plate at a position below the chucking electrode to control plasma treatment process characteristics, and a bias power line configured to supply power to the bias electrode. The bias power line branches into a plurality of lines, and the plurality of lines forms junction portions together with the bias electrode in a region outside the substrate.

The invention provides a carbon nanotube cold cathode, a preparation method thereof and an X-ray tube, and the preparation method of the carbon nanotube cold cathode comprises the following steps: carrying out ball milling on an agglomerated carbon nanotube to obtain carbon nanotube powder; mixing the carbon nanotube powder with a first solvent and an electrolyte solution, and performing ultrasonic oscillation to obtain a suspension; a metal substrate is placed in the suspension liquid for electrophoretic deposition, and the carbon nano tube thin film cold cathode is obtained; coating a curing agent on the carbon nano tube thin film cold cathode for cross-linking curing to obtain a cured carbon nano tube cold cathode; and enabling the carbon nano tube in the carbon nano tube cold cathode in the curing state to form a tip by utilizing a high-energy ion beam, and enabling the carbon nano tube to form an upright state by utilizing a high-strength electric field to obtain the carbon nano tube cold cathode in an activated state.

The application discloses a CT cathode tube cathode surface coating and a preparation method thereof. The coating is prepared by improving a magnetron sputtering process, using iridium (Ir) and osmium (Os) as metal targets, and depositing a metal coating with a thickness of 10-20 microns on a molybdenum base. The prepared metal coating has a bonding force to the base which can exceed 100 N, and the coating is dense and has good uniformity, and can be used as a cathode for exciting electrons on the surface of a cathode tube in a CT X-ray tube.

The utility model relates to the technical field of mass spectrometers, in particular to a mass spectrometer filament belt burning device which comprises a shell, the left side of the shell is fixedly connected with a molecular pump, the top of the shell is provided with a box cover, and the bottom of an inner cavity of the shell is fixedly connected with a fixing block. The lamp filament fixing device has the advantages of being capable of fixing lamp filaments of different specifications and convenient to disassemble, stable clamping of the lamp filaments of different specifications can be achieved through the arrangement of the fixing mechanism in the actual use process, the universality of the device is improved, the stability and safety of the lamp filaments in the installation process are guaranteed, and the service life of the lamp filaments is prolonged. According to the lamp filament inserting disc, the problem of installation difficulty or lamp filament loosening caused by mismatching of specifications is avoided, the lamp filament inserting disc can be easily locked and unlocked through the arrangement of the locking mechanism, a user can rapidly complete installation and disassembly of the lamp filament inserting disc only through simple up-down movement operation, and the working efficiency and the operation convenience are greatly improved.

This invention provides an X-ray tube filament winding mold and a filament manufacturing method. The winding mold includes a first main mold, a second main mold, and a clamping plate. Both the first and second main molds are cylindrical. The front end of the first main mold and the rear end of the second main mold each have two positioning holes. Angular grooves are formed on both sides of the first main mold, symmetrically opposite in direction, with pin holes at the rear of the grooves. Two positioning pins are provided in the two positioning holes at the front end of the first main mold. The front end of the first main mold and the rear end of the second main mold can be connected by the positioning pins. The first and second main molds are fixed together by the clamping plate. Using the filament winding mold, a coil-shaped X-ray tube filament, distinct from a long, spiral filament, can be regularly wound. The filament winding mold has a simple structure, low manufacturing cost, is easy to use, has a high reusability rate, long lifespan, and wide applicability. The wound filament has a small and regular emission surface, resulting in a relatively concentrated spatial distribution of emitted electrons, making it easy to focus and improving the spatial resolution of image reconstruction.

The invention discloses a silicon-based micro-channel plate (MCP) structure and a manufacturing method thereof, relates to the technical field of semiconductor device manufacturing, and aims to solve the problems of poor high temperature resistance, insufficient etching precision, film layer quality defect and process synergy deficiency of a traditional glass-based / organic-based MCP. An 8-inch N-type monocrystalline silicon wafer is adopted in the structure, the thickness of the N-type monocrystalline silicon wafer is (250-350) + / -25 microns, micropores of 3-10 microns are evenly distributed, the hole pitch is 7-22 microns, the inclination angle is 6-12 degrees, the side wall roughness is smaller than or equal to 50 nm, the perpendicularity deviation is smaller than or equal to + / -0.5 degrees, an AlO or AlO / HfO / AlO electron multiplication layer with the thickness of 10-30 nm is prepared on the inner wall of a channel through ALD, and a Cr / Ni electrode with the thickness of 50-80 nm is plated on the surface. According to the method, the OES is used for monitoring SiFs in real time. According to the invention, the double targets of < = 30% of 1kg impact fracture rate and stable electron multiplication gain are achieved, the tolerable temperature reaches 800 DEG C, the secondary electron emission efficiency is improved by 25%, the production efficiency is improved by 20%, the cost is reduced by 15%, and the method is suitable for the high-sensitivity detection fields of night vision imaging, particle detection and the like.

The application provides an X-ray tube cathode assembly assembling method, a tool and an X-ray tube. The method comprises the following steps: S100: pre-positioning a filament and a pin, so that the filament and the pin reach an assembling distance, to obtain a pre-assembled filament assembly; pre-positioning the filament assembly and a ceramic assembly and assembling the filament assembly to the ceramic assembly; S200: inspecting and adjusting the filament concentricity of the pre-assembled filament assembly, so that the concentricity is consistent with a cathode focusing electrode to be assembled; S300: assembling the cathode focusing electrode to the filament assembly whose concentricity has been adjusted, to obtain a cathode assembly in which the filament is concentric with the cathode focusing electrode. By using the assembling method and the tool, the assembling position of the filament can be accurately controlled, the concentricity of the filament and the cathode focusing hole is ensured, efficient assembly and welding of the cathode assembly are realized, the filament assembling time is greatly shortened, and the production efficiency and product performance are improved.

The present application provides a functionalized carbon nanocone tip, the front end of a tip base being modified by a carbon nanocone. The carbon nanocone is a cone-shaped nanocarbon material composed of a layered graphite structure; the tip base is made of metal selected from one or more of tungsten, iron, cobalt, nickel, and titanium; and the carbon nanocone has a tail end connected to the interface of the tip base on which a covalent bond is formed, and a tip end in an orientation consistent with the orientation of the central axis of the whole tip. The present application also provides a preparation method for the functionalized carbon nanocone tip. In the present application, the orientation of the carbon nanocone tip end coincides with the orientation of the central axis of the whole tip, thereby ensuring the controllability of an active emission site of the carbon nanocone tip during electron emission. The prepared functionalized carbon nanocone tip has a carbon nanocone tip end with a clean and complete layered graphite structure. The structure feature of the tip prevents damages or even failure of the tip structure caused by electron emission noise and uncontrollable emission current due to the contamination on the tip end surface.

The invention discloses a gun emitting device of a tungsten filament scanning electron microscope. The gun emitting device comprises an emitting end vacuum cavity, a ceramic electrifying suite, a cathode assembly, a transmission module, an isolating valve and an outlet blind plate, the outlet blind plate is mounted on the end face of the rectangular boss of the transmitting end vacuum cavity; an extraction opening is formed in the opposite side of the rectangular boss of the transmitting end vacuum cavity; the ceramic power-on suite is mounted on the first step end surface of the transmitting end vacuum cavity; the isolating valve is mounted on the end face of a flange plate at the bottom of the transmitting end vacuum cavity to isolate the transmitting end vacuum cavity from other cavities of the electron microscope; the transmission module is fixed on the transmitting terminal vacuum cavity, and the cathode assembly installed on the transmission module can be driven by the motor to move back and forth to the atmosphere side and the vacuum side of the transmitting terminal vacuum cavity to replace the tungsten filament. The precision is high when the tungsten filament is installed, the tungsten filament is convenient to disassemble in the process of replacing the tungsten filament, and the equipment recovery time is shortened.

Apparatus and methods are disclosed for a mechanically stable, long-life junction between hexaboride-containing and tantalum-containing components. Examples are used as a cold field emitter assembly which is compatible with ultra-high vacuum and occasional high-temperature flashing. A metal adapter is welded to a hexaboride electrode. Some embodiments use a tantalum adapter and a LaB6 microrod electrode with a nanorod emitter tip. Other material combinations are disclosed, as also usage in electron sources for electron microscopes. In variations, the adapter is deposited onto a filament and the electrode then welded to the adapter.

This invention provides a power transmission window for a traveling wave tube and its fabrication method, belonging to the field of electronic vacuum device technology. The power transmission window includes an outer conductor, an inner conductor, and a window ceramic. The outer conductor is configured as a coaxial annular composite structure, including a first annular portion and a second annular portion. The second annular portion is brazed within the first annular portion. The first annular portion is made of a molybdenum-copper alloy, and the second annular portion is made of oxygen-free copper. The inner conductor is formed by brazing a power transmission needle and a power transmission needle sealing body. The inner conductor axially penetrates the outer conductor from the power transmission needle side, and the power transmission needle sealing body is a hollow structure. The window ceramic passes through the power transmission needle sealing body and is brazed perpendicularly to it, with the outer circumference of the window ceramic brazed to the inner side of the second annular portion.

Embodiments of the present disclosure are directed to an isolation housing for an electro-hydrodynamic (EHD) air mover device. The isolation housing includes the EHD air mover device, a shield placed on top of the EHD air mover device forming an upper wall of the isolation housing, a printed circuit board (PCB) assembly forming a bottom wall of the isolation housing, and a chassis made of one or more non-conductive materials and forming side walls of the isolation housing. The PCB assembly carries signal connections for a positive bias voltage signal, a negative bias voltage signal, and / or a ground signal. The chassis is shaped to hold the EHD air mover device in a defined position within the isolation housing. A first surface of the chassis is affixed to the shield, and a second surface of the chassis opposite to the first surface is affixed to the PCB assembly.

The present application relates to an electron gun, which has a cathode having an electron emission surface, a planar shape of which is circular, and which emits electrons, a heater which warms the cathode, and an anode which applies a positive potential to the cathode and extracts the electrons in a certain direction. The cathode has a through-hole along a central axis of the cathode in a central portion thereof, and at least one of an opening edge portion of the through-hole on the electron emission surface side and an inner surface of the through-hole has a non-emission layer, or the opening edge portion of the through-hole on the electron emission surface side is a chamfered C face or a chamfered R face.

Embodiments of the present disclosure are directed to an electro-hydrodynamic air mover apparatus that includes a pair of isolators, a collector electrode, an emitter electrode, and a pair of conductive metal terminals. Each end of the collector electrode and each end of the emitter electrode are attached to a respective isolator of the pair of isolators. Each conductive metal terminal is placed in a slot of the respective isolator and is electrically connected to the emitter electrode. Each conductive metal terminal is configured for applying a respective voltage of a power supply. A distance from the emitter electrode to the collector electrode along an outer surface of each isolator is equal to or greater than a threshold distance set to prevent an electrical arcing between the collector electrode and the emitter electrode.

To suppress peeling of a coating layer during lamp lighting in a discharge lamp.SOLUTION: The discharge lamp 10 is provided with a pair of electrodes 20, 30, and the body part 34 of the electrode 30 as the anode is provided with the heat radiation structure 40 formed on the side surface thereof. In the heat dissipation structure 40, the groove 42 is formed along the circumferential direction, and the coating layer 44 is formed on the groove 42. In the coating layer 44, tungsten particles having a relatively small particle diameter are contained with respect to zirconium nitride as a base material.SELECTED DRAWING: Figure 2

The invention belongs to the technical field of micro-nano electronic device manufacturing, and relates to a large depth-to-width ratio nano vacuum channel laser collaborative manufacturing process which comprises the following steps: depositing a metal enhancement layer and a metal seed layer on a substrate; defining a first layer of electrode pattern through a photoresist process; electroplating and depositing a first metal electrode, and annealing; performing laser glazing on the surface of the electrode; the redundant metal layer is removed through ICP etching; depositing an oxide sacrificial layer on the surface of the device, and then sequentially depositing a metal enhancement layer and a metal seed layer on the surface; carrying out pattern definition on a second layer of electrode through a photoresist process; electroplating and depositing a second metal electrode, and annealing; removing the redundant metal layer through ICP (inductively coupled plasma) etching; removing an overlapping region of the first layer of electrode and the second layer of electrode by using femtosecond laser; and removing the oxide sacrificial layer by wet etching, and releasing to form a nano vacuum channel structure. According to the laser collaborative manufacturing process, the device with the nano vacuum channel with the large depth-to-width ratio is prepared.

The invention discloses a double-interface modulation type interlayer heterojunction field emission device and a preparation method thereof, the emission device comprises a support substrate, a bottom modulation layer, a cathode emission material and a top modulation layer which are sequentially arranged from bottom to top, the cathode emission material is formed on the upper surface of the bottom modulation layer in an in-situ growth mode, and the top modulation layer is formed on the lower surface of the bottom modulation layer. And the cathode emission material is clamped between the bottom modulation layer and the top modulation layer to form an interlayer heterojunction structure. According to the bottom modulation layer, parasitic resistance and contact resistance are reduced, waste heat loss is reduced, the driving voltage under the same target emission current is remarkably reduced, the effective emission current under the same voltage is higher, and the requirements of portable and high-density integrated equipment are met. The top modulation layer is arranged, electric field homogenization is achieved through the top modulation layer, current fluctuation is reduced to 5% or below from traditional more than 10%, the problem of single-point overheating is avoided, and the service life of the high-power semiconductor device is greatly prolonged.

The invention provides a scandate active material with high Sc2O3 content and application thereof in an impregnated diffusion cathode, and belongs to the technical field of manufacturing of thermal diffusion cathodes for vacuum electronic devices, and the scandate active material is obtained by mixing BaCO3, CaCO3, Al2O3 and Sc2O3 according to a molar ratio of 12: 2: 3: 1, grinding, pressing into a sheet, heating to 1100-1150 DEG C in air, sintering for 24-48 hours, cooling and grinding. By optimizing the proportion of the components, the scandate active substance with the Sc2O3 mole percentage exceeding 5.5% is obtained, and the scandate active substance does not contain an ineffective active substance BaAl2O4, so that the emission performance of the impregnated diffusion cathode is improved; the composite material is applied to an impregnated diffusion cathode, and cathode surface modification treatment is carried out in combination with a surface etching technology, so that pore blockage caused by mechanical polishing or processing is effectively eliminated, and synchronous improvement of cathode emission current density and working stability is realized.

A method for manufacturing an electron source according to the present disclosure includes steps of: (A) preparing a first member provided with a columnar portion made of a first material having an electron emission characteristic, (B) preparing a second member which has a higher work function and a lower strength than the first material, and in which a hole is formed extending in a direction from one end surface toward the other end surface, and (C) pushing the columnar portion into the hole in the second member, wherein the first member has a cross-sectional shape that is dissimilar to the cross-sectional shape of the hole; and in the step (C), by pressing the columnar portion into the hole, a portion of a side surface of the columnar portion scrapes the inner surface of the hole and bites into the second member, thereby fixing the columnar portion to the second member.

The present invention provides an electron beam device such as an electron microscope which is stable and which has high resolution and a high operation rate. A Schottky electron source according to the present invention comprises: a tungsten (W) single crystal that is joined to a tip part of a filament; a diffusion source that contains at least zirconium and oxygen and that is sintered on a portion of the W single crystal; and a suppressor electrode, said electron source emitting electrons by applying, to a lead-out electrode that faces the suppressor electrode, an electric field in which the W single crystal has a negative polarity. The W single crystal includes a substantially cylindrical body portion, a substantially conical shank portion, a columnar crystal portion of an octagonal prism that extends from the shank portion, and a facet of a W (100) crystal face at a top part of the tip of the columnar crystal portion. The diffusion source is a sintered body which is on the generatrix of the shank portion or a part of which is on the generatrix of the shank portion. The diffusion source, which is the sintered body, is surrounded by the suppressor electrode, and a part of the shank portion beyond a part where the sintered body is formed projects from an opening at a central part of the tip of the suppressor electrode.