The device comprises a substrate layer and an epitaxial layer, the epitaxial layer is located on the surface of the substrate layer, an arc-shaped groove is formed in the epitaxial layer, a certain distance is formed between the top of the arc-shaped groove and the surface of the epitaxial layer, and a
metal potential barrier is arranged on the surface of the epitaxial layer; the side wall of the arc-shaped groove is bent outwards to be in an arc shape, an arc-shaped groove
oxide layer is arranged on the surface of the inner wall of the arc-shaped groove,
polycrystalline silicon filler is arranged in the arc-shaped groove, and the
metal potential barrier is connected with the
polycrystalline silicon filler. According to the device, the
metal potential barrier is not only in contact with the epitaxial layer at the plane position, but also in contact with the epitaxial layer on the vertical structure to form a Schottky junction, the
junction area is larger, and the conduction
voltage drop of the device can be effectively reduced; the device adopts an arc-shaped groove structure, and compared with a traditional right-angle groove structure, the arc-shaped groove structure has a strong
shielding effect under the condition that the device is turned off, the
surface barrier height of the device is reduced, and the leakage current of the
Schottky diode can be effectively reduced.