The invention discloses an embedded
flash memory structure based on a vertical auxiliary gate and a
dynamic programming method of the embedded
flash memory structure, and belongs to the technical field of memorizers, the embedded
flash memory structure based on the vertical auxiliary gate comprises a substrate, the top surface of the substrate is covered with a channel
oxide layer, floating gates are further distributed on the channel
oxide layer, and the floating gates are arranged on the top surface of the substrate. A control gate is further arranged on the floating gate, an auxiliary gate, a high-K
dielectric layer and an interlayer
oxide layer are sequentially stacked on the channel oxide layer and the floating gate from bottom to top, and during
programming and erasing,
channel potential is modulated by applying
voltage to the auxiliary gate, and an effective
electric field of the floating gate is changed. The auxiliary gate is additionally arranged below the floating gate, the
channel potential is dynamically modulated through the auxiliary gate, the effective
electric field of the floating gate is changed, the
programming efficiency can be improved, the erasing working
voltage is reduced,
noise is restrained, and the
data retention capacity is remarkably improved.