Molybdenum disulfide electrodepositing method and liquid for micromachinery surface

A molybdenum disulfide and electrodeposition technology, applied in the direction of electrolytic inorganic material coating, etc., can solve the problem of little research on molybdenum disulfide, and achieve the effects of excellent profiling, controllable operation, and simple electrodeposition equipment.

Inactive Publication Date: 2007-03-14
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There are not many studies on molybdenum disulfide in the field of micro-friction, especially the low-temperature deposition of molybdenum disulfide on the surface of micro-machines. There are no public reports at home and abroad.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] A molybdenum disulfide deposition solution for surface treatment of mechanical parts is characterized in that it includes soluble molybdate, soluble sulfide, and pH regulator, wherein soluble molybdate can be selected as sodium molybdate, molybdenum in this embodiment Ammonium acid, soluble sulfide can be selected as sodium sulfide, ammonium sulfide, acidity regulator in this embodiment and can be selected as hydrochloric acid, phosphoric acid, acetic acid in the present embodiment; The mol ratio of soluble sulfide and soluble molybdate is 4~ 30:1, 5:1, 7:1, 20:1, 27:1; the molar ratio of acidity regulator to soluble molybdate is 2~30:1, which can be selected as 3:1, 7:1 in this embodiment 1, 14: 1, 24: 1, the molar ratio of water and soluble molybdate is 55~5500: 1, can be selected as 70: 1, 300: 1, 2000: 1, 3890: 1, 5100 in this embodiment : 1.

Embodiment 2

[0022] A molybdenum disulfide electrodeposition solution for micromechanical surface treatment, the components required to configure the solution are soluble molybdate, soluble sulfide, pH regulator and water, wherein the soluble molybdate can be selected in this embodiment Be sodium molybdate, ammonium molybdate, can be selected as sodium sulfide, ammonium sulfide, acidity regulator in the present embodiment and can be selected as hydrochloric acid, phosphoric acid in the present embodiment; Remove water, and the molar percentage of soluble molybdate is 1- 30%, can be selected as 5%, 20%, 27% in the present embodiment, and soluble sulfide accounts for 10-50% in molar percentage, can be selected as 14%, 25%, 40%, 45% in the present embodiment, The molar percentage of acidity regulator is 10-50%, can be selected as 14%, 25%, 40%, 45% in the present embodiment, and above-mentioned additive can be hydrochloric acid, phosphoric acid, acetic acid, lactic acid, propionic acid, malic ...

Embodiment 3

[0024] The molybdenum disulfide deposition liquid formulation of the present invention is used to treat N-type single-sided polished single-crystal silicon wafers for micromechanics. The wafer has a diameter of 3 inches, a crystal orientation of 110, doped with arsenic, and a resistivity of 0.002 ohm cm. The composition of molybdenum disulfide and the low-temperature electrodeposition process are as follows:

[0025] Composition of molybdenum disulfide electrodeposition solution

[0026] Component Concentration (Mol / L)

[0027] Sodium molybdate 0.01~0.1

[0028] Sodium sulfide 0.04~0.9

[0029] Hydrochloric acid 0.04~0.5

[0030] Soak the substrate in 80°C hydrochloric acid and hydrogen peroxide solution for 20 minutes. After cleaning, the second step: store the micromechanical material substrate in the electrolytic tank with the above composite deposition solution, and connect the mechanical parts to be processed to the cathode of the power supply. At room temperature, w...

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Abstract

This invention relates to electrolytic deposition of molybdenum disulfide for micro-machine surface and its solution. The micro-machine body, which was treated neatly, was stored in the electrolytic bath with compound deposition solution to joint the negative pole of power supply and the parts needed treating. At the room temperature, density molybdenum disulfide was deposited on the surface of the part needed treating at 0.1-500mA / cm2 current for 0.5-120min.Then the part was taken out. After the part was cleared and washed, it was heated until 100-900deg.C in the protective gas for 0.5-4h to get the homogeneous molybdenum disulfide films with 10-500nm thickness. The deposition solution contained soluble molybdate, soluble disulfide, and pH conditioner. The mol ratio of soluble disulfide and soluble molybdate was (4-30):1. The mol ratio of pHconditioner and soluble molybdate was (2-30):1. The mol ratio of water and soluble molybdate was (55-5500):1.

Description

technical field [0001] The invention relates to a safe and rapid MoS2 electrodeposition solution and a low-temperature MoS2 lubricating film deposition technology for reducing the friction of micro-mechanical working surfaces and improving the lubricating performance. The invention belongs to the technical field of nano tribological surface engineering. Background technique [0002] Micro-Electro-Mechanical Systems (MEMS) is a multi-disciplinary emerging discipline developed on the basis of microelectronics technology. It relies on microelectronics and mechanical processing technology and covers microelectronics, mechanics, mechanics, automatic control, Various engineering technologies and disciplines such as materials science. [0003] However, due to the strong adhesive wear caused by the homogeneous friction between the friction pairs of the micromachines, and the stability of the movable micromachines is extremely sensitive to slight wear, the mi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C25D9/08
Inventor 蒋建清张旭海于金
Owner SOUTHEAST UNIV
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