Ultrahigh vacuum fast scanning microscopy method based on carbon nanotube probe

A technology of carbon nanotubes and ultra-high vacuum, which is applied in the field of scanning probe microscopy, can solve problems such as firing pins or detachment, poor reliability of constant height mode, etc., and achieve the effects of increased speed, reliable scanning, and high reliability

Inactive Publication Date: 2012-11-07
TIANJIN UNIV
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Problems solved by technology

Traditional scanning probe microscopes—scanning tunneling microscopes and atomic force microscopes usually have the function of constant height mode. If the area is too small, it is very easy to hit the needle or get out of the scanning state in actual operation. The constant height mode has poor reliability and is generally not used in practice.

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  • Ultrahigh vacuum fast scanning microscopy method based on carbon nanotube probe

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Embodiment Construction

[0024] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings.

[0025] see figure 1 Firstly, the carbon nanotube 3 is fixed on the end of the scanning tunneling microscope probe 2 to ensure that the carbon nanotube 3 and the scanning tunneling microscope probe 2 have reliable mechanical connection, electrical connection, coaxial or parallel axis. Then, the scanning tunneling microscope probe 2 fixed with the carbon nanotube 3 is clamped to the probe holder 1, and the probe holder 1 is sent to the corresponding position of the ultra-high vacuum scanning tunneling microscope equipment, and the sample to be tested is placed 6 on sample stage 7. Finally, the scanning tunneling microscope equipment is adjusted to the vacuum state of the scanning test, and the field emission current 5 of the carbon nanotube 3 is used as the detection signal to perform rapid imaging scanning of the sample 8 to be tested under th...

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Abstract

The invention belongs to the field of scanning probe microscopy and relates to an ultrahigh vacuum fast scanning microscopy method based on a carbon nanotube probe, comprising the following steps of: fixing a nanotube probe at the end of a probe of a scanning tunneling microscope; calibrating the field emission current sensitivity curve family of the carbon nanotube probe in the Z direction; fixing the carbon nanotube probe in a probe clamp and adjusting the carbon nanotube probe in a vacuum state required by scanning; enabling the carbon nanotube probe to enter a tunneling state under a constant current mode; keeping a piezoelectric ceramic scanner stationary in the Z direction; setting a scanning range, scanning velocity and sampling point parameters, recording the field emission current i of the carbon nanotube probe one point after another, and carrying out quick imaging scanning of a sample to be detected under a constant height mode. The ultrahigh vacuum fast scanning microscopy method based on the carbon nanotube probe is high in reliability and speed and capable of improving the in-plane resolution of scanning imaging.

Description

Technical field [0001] The invention belongs to the field of scanning probe microscopy and relates to a rapid scanning probe microscopy method. Background technique [0002] At present, the observation and analysis of many microscopic dynamic processes, such as crystal growth, single-molecule tracking, and structural mutation, have put forward an urgent need for fast and high-resolution ultra-high vacuum scanning probe microscopy. Ultra-high vacuum provides a reliable growth and testing environment for clean sample surfaces. The most representative atomic force microscopes and scanning tunneling microscopes in the scanning probe microscope family can work in ultra-high vacuum environments, but the speed performance of scanning imaging There are deficiencies. [0003] Among the various methods to improve the scanning imaging speed of scanning probe microscope, the constant height mode does not need to use the key components that restrict the scanning speed, that is, the Z-di...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/10G01Q60/16
Inventor 徐临燕傅星胡小唐
Owner TIANJIN UNIV
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