70 results about "Wire array" patented technology

The invention discloses a poly-Si film preparation method based on a vertical double-layer hot wire array thermal field design, which changes the surface temperature of a hot wire and the range of a cracking high-temperature region by adjusting the interlayer spacing of a double-layer hot wire array and the current of the double-layer hot wire, expands the cracking time and the cracking space of silane, promotes secondary cracking of the silane, and improves the yield of the poly-Si film. Components and concentration distribution of a silane cracking intermediate product reaching the surface of the substrate can be effectively controlled, and the ratio of SiH / SiH2 active groups is increased; and depositing the poly-Si thin film under the vacuum of 0.5 Pa-5. 0Pa, the substrate temperature of 200-560 DEG C and the deposition time of 10-60 minutes, after deposition is finished, raising the substrate temperature to 200-650 DEG C, and carrying out vacuum annealing on the grown poly-Si thin film to obtain the high-crystallization-rate poly-Si thin film. According to the method, the poly-Si thin film is grown by using a vertical double-layer hot wire array thermal field design, a high-temperature hot wire silane cracking technology and a vacuum annealing technology, and the crystallization quality of the poly-Si thin film can be obviously improved.

The invention discloses a follow-up PIV boundary layer flow field test system and test method based on electrolytic hydrogen bubbles. The follow-up PIV boundary layer flow field test system comprises an integrated optical measurement module and a tracer particle generation module, the optical measurement module is arranged in the UUV and comprises a laser transmitter assembly, a sapphire prism and two imaging cameras which are symmetrically arranged, and laser sheet light forms a sheet light area on the outer surface of the UUV after being refracted by the sapphire prism; the tracer particle generation module comprises a cathode, an anode and a power supply unit, the cathode is a platinum wire array composed of a plurality of platinum wires arranged in the axial direction of the UUV, and the platinum wires are located at different heights away from the wall face of the UUV; the power supply unit selectively electrifies the platinum wire, independently adjusts the voltage, controls the number and frequency of generated hydrogen bubbles, and achieves the synchronous measurement of flow field information at different thickness positions of a boundary layer. According to the invention, boundary layer flow field in-situ follow-up measurement and synchronous fine measurement of different thickness positions under the condition of not changing the UUV shape are realized, and the device has the advantages of high integration level, small flow field disturbance, high measurement efficiency and the like.

The utility model discloses an electromagnetic film, a magnetic-capacitance integrated film and a touch display device. The electromagnetic film comprises a first base material, a first metal wire array and a second metal wire array. The first base material comprises a first surface and a second surface which are oppositely arranged; the first metal wire array is arranged on the first surface and comprises a plurality of first metal wires which are arranged in parallel; the second metal wire array is arranged on the second surface and comprises a plurality of second metal wires arranged in parallel, and projections of the first metal wires and the second metal wires on the first surface or the second surface are arranged in a crossed mode. According to the utility model, the first metal wire array and the second metal wire array can be insulated directly through the first base material, so that the cross points of the first metal wires and the second metal wires do not need to be insulated, the manufacturing difficulty is reduced, the thickness of the product is obviously reduced, and the product accords with the trend of light and thin development.

The invention discloses a microelectrode for collecting cell electrophysiological signals and a preparation method thereof.The microelectrode comprises a substrate, an electrode array, a wire array and a bonding pad array, the electrode array, the wire array and the bonding pad array are arranged on the substrate, the electrode array is distributed in a dispersed mode with a preset position as the center, and the wire array is connected with the electrode array and the bonding pad array; the electrode array comprises a first conducting layer, the wire array sequentially comprises a first conducting layer, a second conducting layer and an insulating layer, the bonding pad array sequentially comprises a first conducting layer and a second conducting layer, and the first conducting layer and the second conducting layer are made of different materials. According to the embodiment, the performance of the microelectrode array can be improved, the preparation cost is reduced, and the preparation efficiency is improved. The microelectrode can be widely applied to the technical field of microelectrodes.

The invention provides a thin-film resistor network space debris detection circuit and method based on a coding mode, and the circuit comprises a coding thin-film resistor network which is composed of a parallel resistor wire array with the front side and the back side orthogonally arranged, the signal generation module is used for generating on-off signals through broken lines caused by fragment impact; the on-off comparison circuit is connected with the coding thin-film resistor net and is used for converting the on-off state of the resistor wire into an identification signal of a high level or a low level; the on-off identification circuit is connected with the on-off comparison circuit and used for collecting identification signals of all channels in parallel and outputting a disconnection state; resistor wires of the coding film resistor net are connected with signal channels in a grouping circulation connection mode, and the total number of the signal channels is smaller than that of the resistor wires. According to the invention, the size information in two dimension directions can be identified, and the positioning precision of the impact position can be improved, so that the detection parameter testing precision of the whole detector is improved.

The present invention discloses a gallium nitride micro-wire array photodetector and a preparation method thereof. The photodetector includes: a silicon substrate, a methylammonium lead iodide layer, and an electrode; a plurality of grooves arranged in parallel are formed on the upper surface of the silicon substrate; an insulating layer covers the surface of the protruding portion on the upper surface of the silicon substrate; gallium nitride micro-wires are epitaxially grown on the two inner sidewalls of the grooves respectively, the extending direction of the gallium nitride micro-wires is the same as the extending direction of the grooves, and the gallium nitride micro-wires form a parallel micro-wire array; the electrode is disposed on the upper surface of the silicon substrate, and the methylammonium lead iodide layer is coated on the upper surface of the silicon substrate to cover the electrode and the gallium nitride micro-wires so as to form a double heterojunction. The photodetector has low dark current, fast response speed, high on / off current ratio, and long detection range, with good comprehensive performance, and the device structure is simple and easy to manufacture.

This invention discloses a hot wire array device with a hot wire compensation structure and its usage method. The hot wire array device with the hot wire compensation structure includes a base, an electrode assembly, a hot wire assembly, a support device, a horizontal tension compensation assembly, and a longitudinal tension compensation assembly. The hot wire assembly includes several parallel hot wires. The horizontal tension component passes through a heat insulation assembly, and its two ends are connected to the support device and a power compensation component, respectively. The power compensation component does not include an elastic component. The longitudinal tension compensation assembly includes several hot wire support strips, several tantalum cables, and several tantalum cable fixing components. The hot wire support strips are provided with several support grooves. The hot wires contact the support grooves of the hot wire support strips, and the hot wires are perpendicular to the hot wire support strips. This ensures that the tension and length of each segment of the hot wire are the same when fixed, and that no sagging occurs during heating.

The present invention discloses a flexible wire array and an LED light strip. The flexible wire array includes a plurality of flat wires and an insulating film. Each flat wire is fixedly arranged side by side at intervals on the insulating film. The insulating film is provided with a plurality of hollow areas at intervals along the length direction of the flat wires. Each hollow area is provided with a plurality of hollow holes at the position corresponding to the flat wires. The hollow holes are arranged along the width direction of the insulating film. The exposed portions of each flat wire in the hollow holes form flat wire connection areas. A connection conductor is fixed on the flat wire connection areas. The connection conductor includes two plug-in parts for plugging and at least one conductor connection piece. The two plug-in parts are respectively electrically connected to the flat wire, and the two plug-in parts are connected by the conductor connection piece. The plug-in parts are both in a hollow column shape. The structure of the flexible wire array is simple. It only needs to be sheared along the hollow area. After shearing, hollow columns that can be plugged are formed at the end of the flexible wire array, which is convenient for the electrical connection between the flexible wire array and external electrical components.

The present invention discloses a design method for a virtual radiator loaded with a metal wire array, and relates to the technical field of microwave hyperthermia. The present invention can enhance the multipath and complexity of electromagnetic wave propagation in human tissue by loading a metal wire array near a virtual point source, that is, increase the amount of information of the time-reversed electromagnetic wave, so as to reduce the influence of information loss caused by the loss of the inverted electromagnetic wave in the human tissue on the energy focusing accuracy, thereby improving the focusing accuracy of the inverted electromagnetic energy in the human tissue, and can achieve the regulation of the inverted electromagnetic energy focusing spot size by combining the number and spacing of the metal wire array with the source function of the virtual point source, thereby improving the flexibility of the design, and in view of the fact that the increase in the multipath of the time-reversed electromagnetic wave caused by the loading of the metal wire array is not sensitive to small changes in the electromagnetic parameters of the human tissue, when the electromagnetic parameters of the human tissue change due to temperature, the virtual radiator loaded with the metal wire array has the ability to keep the electromagnetic energy stably focused at the original position.

A method and apparatus for predicting the configuration and attitude of a towed wire array subjected to current-induced vibrations, relating to the field of marine exploration technology, are disclosed. The method includes: employing a quasi-static model to determine the configuration and attitude and tension of the towed wire array at its equilibrium position by solving a set of nonlinear equations considering boundary constraints; wherein the tail boundary conditions of the quasi-static model include tail rope tension; employing a dynamic model, using the configuration and attitude and tension as initial conditions, discretizing and solving the dynamic model to obtain the spatiotemporal distribution characteristics of the displacement of the towed wire array subjected to current-induced vibrations; wherein the dynamic model includes segment tension and gravity. This application combines a quasi-static model and a dynamic model, adding tail rope tension, segment tension, and gravity to the existing parameters, making the model conform to the actual stress conditions of the towed wire array, thereby achieving accurate prediction of the spatiotemporal distribution of the configuration and attitude of the towed wire array subjected to current-induced vibrations.

To provide a memory replaceable with a redundant cell even upon generation of a plurality of defective cells.SOLUTION: A memory includes a cell array. A first wire is connected to memory cells arrayed in a first direction. A second wire is connected to memory cells arrayed in a second direction. Multiple third wires are provided correspondingly to respective multiple second wires arrayed in a third direction. A first sense circuit is connected to a first pair of the third wires. A second sense circuit is connected to a second pair of the third wires. A switching circuit is connected to the first and second sense circuits and selectively outputs signals of the first and second sense circuits. A switch control circuit stores addresses of the second and third wires connected to defective cells, and outputs a control signal for controlling the switching circuit based on the addresses of the second and third wires connected to a selected cell to be read out.SELECTED DRAWING: Figure 3

Technical problem: The present invention provides a method for restarting the operation of a wire saw, wherein, in a wire saw using a fixed abrasive metal wire, when restarting the cutting of a workpiece that has been interrupted in the middle due to an abnormality such as wire breakage, the wire will not break due to the wire pulling the workpiece. Solution: A method for restarting the operation of a wire saw, the method being an operation restart method in the following case, wherein, in the operation of a wire saw that forms a metal wire array by winding a fixed abrasive metal wire having abrasive grains fixed on its surface onto a plurality of grooved rollers, and cutting and feeding the workpiece relatively against the metal wire array while reciprocating the fixed abrasive metal wire in an axial direction, thereby cutting the workpiece into a wafer shape, when the cutting of the workpiece is temporarily interrupted in the middle of the workpiece, the cutting of the workpiece is restarted, wherein the fixed abrasive metal wire after the abrasive grains have been worn away is arranged at the cutting position of the workpiece where the cutting of the workpiece was interrupted, and the cutting of the workpiece is restarted.

The application discloses a kind of based on electrolytic hydrogen bubble's PIV boundary layer flow field test system and test method of satellite, including integrated optical measurement module and tracer particle generation module;Optical measurement module is located in UUV interior, including laser emitter assembly, sapphire prism and the two imaging cameras of symmetrical arrangement, laser sheet light is refracted after sapphire prism and forms sheet light area on the outer surface of UUV;Tracer particle generation module includes cathode, anode and power supply unit, cathode is the platinum wire array of several platinum wires arranged along the axis of UUV, each platinum wire is located at different height from the wall surface of UUV;Power supply unit selectively energizes platinum wire and independently adjusts voltage, control the number and frequency of hydrogen bubbles generated, realize the synchronous measurement of flow field information at different thickness positions of boundary layer.The application realizes boundary layer flow field in-situ satellite measurement and synchronous fine measurement at different thickness positions under the condition of not changing the appearance of UUV, with the advantages of high integration, small flow field disturbance, high measurement efficiency.

The invention discloses a cable management clamp and welding equipment, the cable management clamp comprises a base, a cable holding piece and a guiding piece, and wires extending out of the ends of a cable respectively penetrate through corresponding guiding structures and extend outwards to form a wire array used for being connected with an external device in a guiding mode. The cable is mainly placed on the base, the end portion of the cable can be pulled to the cable holding piece, and the multiple wires can penetrate through the cable holding piece, move in the direction of the guiding piece and penetrate through the corresponding guiding structures so that the multiple wires can form a wire array used for being connected with an external device in a guiding mode, and therefore the positions of the multiple wires do not need to be repeatedly ranked continuously. In the welding production process, the time needed for welding one product can be shortened through the arrangement, and the production problem caused by disordered wire sorting due to human negligence is avoided.

The utility model relates to a grounding device of an optical cable shielding layer, and relates to the technical field of optical cable grounding, the grounding device comprises a steel strand used for electrically communicating a metal reinforcing core with a lightning protection ground bar, and a plurality of groups of conductive wires used for electrically communicating the shielding layer with the lightning protection ground bar, and the metal hoop is used for locking the plurality of groups of conductive wires on the shielding layer. The multiple groups of conductive wires are installed on the outer ring of the shielding layer in a circumferential array mode, the metal hoops lock the multiple groups of conductive wires on the shielding layer, the other ends of the multiple groups of conductive wires are fixedly installed on the special ground bar and finally electrically communicated with the lightning protection ground bar, and the grounding effect of the optical cable shielding layer is improved.

The invention belongs to the technical field of eddy current detection. The rail vehicle communication cable broken wire array eddy current detection probe comprises a plane winding displacement coil and a differential three-dimensional coil array, the plane winding displacement coil is used for applying high-frequency excitation, and the differential three-dimensional coil array is used for sensing broken wire defect magnetic field disturbance; the differential three-dimensional coil array comprises a plurality of differential three-dimensional coil pairs, each differential three-dimensional coil pair comprises a first three-dimensional coil and a second three-dimensional coil, the first three-dimensional coil is arranged at the position where the magnetic field disturbance gradient of the planar winding displacement coil is maximum, and the second three-dimensional coil is arranged at the position where the magnetic field disturbance gradient of the planar winding displacement coil is minimum. The detection bottleneck of a thick insulating layer is broken through, the channel consistency of the array probe is optimized, the detection efficiency and precision of the communication cable under the large lift-off working condition are greatly improved, interference is effectively restrained, the structural adaptability is high, and effective recognition of the broken wire in the cable can be achieved.

The application relates to the technical field of display, and provides a display panel, a folding screen and a folding screen device. The display panel is applied to the folding screen device, first display driving chips and second display driving chips of the folding screen device are arranged along a longer first side of the folding screen device, the first side is perpendicular to a rotating shaft of the folding screen device, the first side is adjacent to a shorter second side of the folding screen device; a first gate driver of the folding screen device is arranged along the second side; the display panel comprises: a plurality of scanning signal lines and a first wire array, the plurality of scanning signal lines are connected with the first gate driver and are perpendicular to the rotating shaft; a first end of the first wire array is connected with the first display driving chip, and a second end of the first wire array is connected with a data signal line of a first folding sub-region in a first display region. The display panel can increase the charging time of a pixel unit, and can also make the wire between the scanning signal line and the DDIC avoid the folding region.

The invention has been developed primarily for use in / with sensing biological signals and / or stimulating a body part of a subject. The invention relates to flexible bioelectrode(s) device and a method of manufacturing such a flexible bioelectrode device. The flexible bioelectrode device comprises a moulded body, a wire array of conductive wires at least partially embedded in the moulded body; the wire array defining terminal ends and distal ends; wherein each of the terminal ends of the wire array are connected to an electrode; and at least one or more connector terminals connected to the distal ends of the wire array.

The present invention discloses a wheel hub grinding device, which belongs to the technical field of wheel hub grinding, and includes a main shaft, and a connecting disk is fixed at the end of the main shaft; the lower surface of the connecting disk is symmetrically rotatably connected to two rotating blocks, and a plurality of brackets are connected to the two rotating blocks through a connecting rod, and the outer arc surface of each bracket is provided with brush wires; the present invention realizes the conversion from comprehensive annular grinding to precise sector-shaped grinding through a double rotating block structure, thereby improving the efficiency and effect of wheel hub grinding. In the annular grinding mode, the rotating blocks enclose a complete annular brush wire array, ensuring comprehensive and uniform grinding of the wheel hub surface, and meeting general maintenance needs. When it is necessary to target a specific area of ​​the wheel hub, the rotating blocks can be synchronously adjusted to the sector mode, and the brush wires form a compact sector-shaped layout, and the hemispherical grinding path generated by the rotation can accurately cover and penetrate these hard-to-reach areas.

The invention discloses a preparation method of a low-wind-resistance noise water retaining device of a purification combined type air conditioning unit for a dust-free room. The method comprises the following steps: S1, manufacturing a steel wire with a water-drop-shaped section; s2, an upper top plate and a lower bottom plate are manufactured, the upper top plate and the lower bottom plate are oppositely arranged, hanging plate arrays are arranged on the opposite faces of the upper top plate and the lower bottom plate, and hanging plates in each row and adjacent hanging plates in the hanging plate arrays are arranged in a staggered mode; s3, water-drop-shaped steel wires are sequentially hung on each row of hanging plates of the lower bottom plate and the upper top plate in a staggered and penetrating mode, and a steel wire array is formed between the upper top plate and the lower bottom plate; and S4, side plates are arranged on the two sides of the upper top plate and the two sides of the lower bottom plate, the upper top plate and the lower bottom plate are fixedly connected through the side plates to form an outer frame, the section of each steel wire in the steel wire array is in a water drop shape, and the water retaining wind resistance is effectively reduced through the steel wires with the water drop-shaped sections.

The invention has been developed primarily for use in / with sensing biological signals and / or stimulating a body part of a subject. The invention relates to flexible bioelectrode(s) device and a method of manufacturing such a flexible bioelectrode device. The flexible bioelectrode device comprises a moulded body, a wire array of conductive wires at least partially embedded in the moulded body; the wire array defining terminal ends and distal ends; wherein each of the terminal ends of the wire array are connected to an electrode; and at least one or more connector terminals connected to the distal ends of the wire array.

The present application discloses a cable management fixture and a soldering apparatus comprising a base, a cable holder, and a guider. Each of conducting wires extending from the end of the cable passes through a corresponding one of said guide structures and protrudes outward, forming a conducting wire array for connecting with external devices. The cable is mainly placed on the base, an end of the cable may be pulled onto the cable holder, and a plurality of conducting wires may pass through the cable holder, move in the direction of the guider and pass through corresponding ones of the guide structures so that the plurality of conducting wires form a conducting wire array for connecting with external devices, therefore the positions of the plurality of conducting wires are not required to be repeatedly reordered. Such an arrangement may shorten the time required to solder a product in a soldering production process and avoid problems in production caused by the disorder of conducting wires caused by any human negligence.

The invention discloses an arc extinguishing structure for preventing metal wire electric explosion circuit breaker rebreakdown, an assembling method and a switch, the structure comprises an insulating sleeve, arc extinguishing partition plates, two disc electrodes and a metal wire array, the arc extinguishing partition plates are detachably connected with the inner wall of a cylinder, the arc extinguishing partition plates are arranged at intervals in the axial direction of the insulating sleeve, micropores are formed in the arc extinguishing partition plates, and the metal wire array is arranged between the two disc electrodes. The micropores in the adjacent arc extinguishing partition plates are aligned in the axial direction; the two disc electrodes are fixedly attached to the opposite side walls of the two sealing plates respectively. The parallel metal wires of the metal wire array are arranged in the axially aligned micropores in the axial direction of the insulating sleeve in a penetrating mode, the two ends of the metal wires are fixedly connected with the two disc electrodes respectively, and compared with arc extinguishing media such as sulfur hexafluoride, nitrogen and quartz sand, the arc extinguishing partition plates with the micropores are arranged, so that re-breakdown after a switch is switched off is prevented, and the arc extinguishing effect is improved. The formation of a plasma conductive channel is avoided, the metal wire array can be supported, and the requirement of the interior of the switch for air tightness is low.

A catalytic converter shield assembly including a catalytic converter shield and vehicles including the catalytic converter shield assembly. The catalytic converter shield includes a first panel having an inner surface and an opposite outer surface, a second panel having an inner surface facing the first panel and an opposite outer surface, a wire array provided between the first panel and the second panel, and a heat shielding layer provided on the outer surface of the second panel opposite the wire array.

The application provides a hot wire architecture and a chemical vapor deposition device, and belongs to the field of hot wire chemical vapor deposition. The hot wire architecture provided by the application comprises a hot wire, a first support structure and a second support structure. The first support structure and the second support structure are arranged at intervals along a first direction. The first support structure comprises a plurality of first fixing columns arranged at intervals along a second direction. The second support structure comprises a plurality of second fixing columns arranged at intervals along the second direction. The hot wire is alternately wound around the plurality of first fixing columns and the plurality of second fixing columns along the second direction to form a hot wire array. The hot wire architecture provided by the application greatly simplifies the structure, reduces the demand for electrical contact and power supply, facilitates modular expansion, has high effective utilization rate of the hot wire, relatively low loss, is easy to maintain and replace, reduces the use cost and maintenance cost, and effectively promotes the industrialization process of hot wire CVD diamond film growth.

The present invention belongs to the field of photoelectrochemical sensing. In order to solve the problem of poor fluidity of the solution to be tested on the surface of the sensing electrode, an enzyme-free glucose photoelectrochemical sensing electrode, a sensor and a preparation method thereof are disclosed, comprising an n-type silicon layer / conductive layer / waterproof insulating layer; the upper surface of the n-type silicon layer is convex upwardly to form a nanowire array; the surface of the nanowire array is coated with a p-type metal oxide semiconductor thin film layer; the heterojunction energy band structure formed by the p-type metal oxide semiconductor thin film layer and the n-type silicon layer is a staggered type, and the n-type silicon layer forms an ohmic contact with the conductive layer. Under the irradiation of incident light, the photogenerated electron-hole pairs generated by the p-type metal oxide semiconductor thin film layer and the nanowire array are effectively separated under the combined action of the built-in electric field of the heterojunction and the external bias voltage. It is possible to achieve high sensitivity, high selectivity and low background noise detection of glucose without enzyme modification and with a certain external bias voltage.

A method cuts slices from workpieces using a wire saw having a wire array, which is tensioned in a plane between two wire guide rollers supported between fixed and floating bearings and having a chamber and a shell. The workpiece is fed through the wire array along a feed direction perpendicular to a workpiece axis, while simultaneously changing the shells' lengths by adjusting a temperature of the chambers with a first cooling fluid in accordance with a first correction profile specifying a change in the shells' lengths based on the depth of cut. The floating bearings are simultaneously axially moved by adjusting a temperature of the fixed bearings with a second cooling fluid in accordance with a second correction profile, which specifies a travel of the floating bearings based on the depth of cut. The first correction profile and the second correction profile are opposed to a shape deviation.

The application provides a preparation method of a driving array, the driving array and an electronic device. The preparation method of the driving array provided by the application comprises the following steps: forming a metal wire structure; forming a first gate line array on a first dielectric material layer in the metal wire structure, and covering the first gate line array with a second dielectric material layer; forming a first hole in an overlapping area of a projection area of each metal wire in the first metal wire array on the second dielectric material layer and a projection area of each gate line in the first gate line array on the second dielectric material layer; etching downwardly in the first hole, and stopping the etching process on an upper surface of the metal wire to form a first through hole perpendicular to the metal wire; depositing a third dielectric material layer in the first through hole, and etching the third dielectric material layer at the bottom of the first through hole vertically downward to form a side wall in the first through hole; and depositing a channel material in the first through hole. The preparation method of the driving array provided by the application can be used to prepare a driving array with a micro-structured structure.

A method cuts slices from workpieces using a wire saw with a wire array tensioned in a plane between two wire guide rollers supported between fixed and floating bearings. A workpiece is fed through the wire array perpendicular to a workpiece axis and the wire array plane. The workpiece is fed through the wire array while controlling a temperature of the workpiece with a cooling medium, with simultaneous axial movement of the floating bearings by adjusting a temperature of the fixed bearings in dependence on a depth of cut and in correlation with a first correction profile, and while simultaneously moving the workpiece along the workpiece axis in accordance with a specification of a second correction profile, which specifies a travel of the workpiece. The first correction profile and the second correction profile being opposed to a shape deviation.

The invention discloses a microcrystalline silicon film preparation device which comprises a process cavity and a transmission mechanism, the process cavity comprises a preheating cavity, a coating cavity and a cooling cavity which are communicated in sequence, a heating mechanism is arranged in the preheating cavity, and sealing pieces are arranged at the two ends of the coating cavity and used for sealing the coating cavity. Hot wire arrays and air supply parts are arranged in the coating cavity, the hot wire arrays are located at the top of the coating cavity, the air supply parts are located between the hot wire arrays, a first exhaust port is formed in the bottom of the coating cavity, a plurality of cold supply parts are arranged at the top of the cooling cavity, and a second exhaust port is formed in the bottom of the cooling cavity; a substrate to be plated is located on the carrier plate, the process cavity and the adjacent process cavity are connected through a buffer cavity, and the turnover mechanism is located in the buffer cavity and used for turning over the carrier plate. The microcrystalline silicon film preparation device provided by the invention has the advantages of small uniform stress and high film forming efficiency of the microcrystalline silicon film.