Nano generator and manufacturing method thereof

A nanometer generator and manufacturing method technology, applied in nanotechnology, piezoelectric/electrostrictive device manufacturing/assembly, circuits, etc., can solve the problems of power generation output generator stability and manufacturing difficulties, and achieve improved stability Sexuality, improving efficiency, and enhancing contact effects

Active Publication Date: 2012-08-22
NAZHIYUAN TECH TANGSHAN LLC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The solution disclosed in this patent application has problems such as power generation output, generator stability and manufacturing difficulties.

Method used

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  • Nano generator and manufacturing method thereof
  • Nano generator and manufacturing method thereof
  • Nano generator and manufacturing method thereof

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Embodiment Construction

[0032] Below, the specific implementation manners of the present invention will be further described in conjunction with the accompanying drawings.

[0033] Attached to the manual figure 1 A specific embodiment of the nanogenerator of the present invention is provided. As shown in the figure, the first electrode 4 indium tin oxide (ITO) coating and the zinc oxide seed layer are deposited on the pre-cleaned silicon substrate 5 by radio frequency sputtering. On the surface, the ITO coating not only acts as a conductive electrode, but also improves the adhesion between the ZnO seeds and the Si substrate. On the zinc oxide seed layer, a zinc oxide nanowire array 3 is grown by a wet chemical method. Wet chemical method can be used to grow ZnO nanorod arrays using known techniques, and patent application 201110253998.2 discloses a method for synthesizing ZnO nanorod arrays by hydrothermal method. After the zinc oxide nanowire array is grown, it is heated and annealed. Then the zi...

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Abstract

The invention provides a nano generator and a manufacturing method thereof. The nano generator comprises a base, a first electrode, a zinc oxide nano wire array, a macromolecule insulating layer and a second electrode, wherein the first electrode is arranged on the base; the zinc oxide nano wire array vertically grows on a first electrode layer; the macromolecule insulating layer is coated on a zinc oxide nano wire array layer; the zinc oxide nano wire array layer covers the zinc oxide nano wire array, and the second electrode is arranged on the macromolecule insulating layer; and the first electrode and the second electrode are used as a voltage output pole and a current output pole of the nano generator. The nano generator disclosed by the invention adopts a unique structure so that the electric performance output and the stability are effectively improved.

Description

technical field [0001] The invention relates to a nano generator and a manufacturing method thereof, in particular to a power generating device made of nano piezoelectric materials. Background technique [0002] Energy harvesting and conversion devices constructed with nanotechnology are likely to play a key role in the manufacture and driving of self-powered nanodevices and nanosystem devices. Due to their unique self-generating and self-driving properties, researchers from various countries have recently More and more attention. In 2006, the research group of Professor Wang Zhonglin from the Georgia Institute of Technology successfully realized the piezoelectric nanogenerator that uses zinc oxide nanowires to convert mechanical energy into electrical energy for the first time. Subsequently, based on the piezoelectric effect, various nanogenerators based on different materials and structures have been successively developed. Currently, the output power of nanogenerators i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/113H01L41/22B82Y40/00H01L41/293
CPCH10N30/30H10N30/074
Inventor 朱光王中林王琪
Owner NAZHIYUAN TECH TANGSHAN LLC
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