The invention discloses a light-emitting
diode epitaxial
wafer, a manufacturing method thereof, a light-emitting
diode chip manufacturing method, and a substrate recycling method, which belongs to the field of light-emitting diodes. The light-emitting
diode epitaxial
wafer comprises a GaAs substrate, and a first epitaxial layer growing on the GaAs substrate, wherein the first epitaxial layer comprises an N-type GaAs buffer layer, a first N-type GaXIn1-XP layer, an N-type GaAs layer, an N-type AlAs sacrificial layer, an N-type GaInP
etching stop layer, an N-type GaAs
ohmic contact layer, an N-type AlInP layer, a
quantum well layer and a P-type layer located on the GaAs substrate in sequence, and X is larger than 0.47 but smaller than 0.51. The light-emitting diode epitaxial
wafer manufacturing method comprises steps: the GaAs substrate is provided; the first epitaxial layer grows on the GaAs substrate; and the light-emitting diode epitaxial wafer is obtained. According to the embodiment of the invention, the GaAs substrate is stripped from the first epitaxial wafer, the GaAs substrate is not fully damaged, and environmental
pollution is reduced; and the stripped GaAs substrate is used for manufacturing the epitaxial wafer again, repeated use of the GaAs substrate is realized, and the cost of the LED epitaxial wafer is greatly reduced.