LED epitaxial wafer growing on metal Al substrate and preparing method and application thereof
A technology for LED epitaxial wafers and substrates, which is used in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of unstable chemical properties of metal Al substrates, difficulty in thin film epitaxy, and affecting the quality of epitaxial thin film growth, etc. Achieve the effect of improving internal quantum efficiency, shortening nucleation time, and excellent thermal conductivity
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[0050] Example 1
[0051] An LED epitaxial wafer grown on a metal Al substrate, which is prepared by the following method:
[0052] 1) Substrate treatment: select metal Al as the substrate, and polish the surface of the Al substrate with diamond slurry. Use a microscope to observe the surface of the substrate when there are no scratches, then use chemical mechanical polishing to polish the substrate. The bottom is polished; then the cleaned substrate is placed in deionized water for ultrasonic cleaning at room temperature for 5 minutes to remove the dirt particles on the surface of the Al substrate, and then washed with hydrochloric acid, acetone, and ethanol to remove organic matter on the surface; after cleaning The substrate is dried with dry nitrogen with a purity of 99.9999%; finally the substrate Al is placed at a pressure of 2×10 -10 In the growth chamber of Torr's UHV-PLD, bake at 450°C for 1 hour to remove contaminants on the substrate surface, and then air-cool to room te...
Example Embodiment
[0066] Example 2
[0067] An LED epitaxial wafer grown on a metal Al substrate, which is prepared by the following method:
[0068] 1) Substrate treatment: select metal Al as the substrate, and polish the surface of the Al substrate with diamond slurry. Use a microscope to observe the surface of the substrate when there are no scratches, then use chemical mechanical polishing to polish the substrate. The bottom is polished; then the cleaned substrate is placed in deionized water for ultrasonic cleaning at room temperature for 5 minutes to remove the dirt particles on the surface of the Al substrate, and then washed with hydrochloric acid, acetone, and ethanol to remove organic matter on the surface; after cleaning The substrate is dried with dry nitrogen with a purity of 99.9999% (v%); finally, the substrate Al is placed at a pressure of 2×10 -10 In the growth chamber of Torr's UHV-PLD, bake at a high temperature of 500°C for 1 hour to remove contaminants on the substrate surface, ...
Example Embodiment
[0082] Example 3
[0083] An LED epitaxial wafer grown on a metal Al substrate, which is prepared by the following method:
[0084] 1) Substrate treatment: select metal Al as the substrate, and polish the surface of the Al substrate with diamond slurry. Use a microscope to observe the surface of the substrate when there are no scratches, then use chemical mechanical polishing to polish the substrate. The bottom is polished; then the cleaned substrate is placed in deionized water for ultrasonic cleaning at room temperature for 5 minutes to remove the dirt particles on the surface of the Al substrate, and then washed with hydrochloric acid, acetone, and ethanol to remove organic matter on the surface; after cleaning The substrate is dried with dry nitrogen with a purity of 99.9999%; finally the substrate Al is placed at a pressure of 2×10 -10 In the growth chamber of Torr's UHV-PLD, bake at a high temperature of 550°C for 1 hour to remove contaminants on the substrate surface, and th...
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