LED epitaxial wafer growing on Ag substrate and preparing method and application of LED epitaxial wafer

A technology of LED epitaxial wafers and substrates, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as difficulties in film epitaxy, affecting the quality of epitaxial film growth, and unstable chemical properties of metal Ag substrates. Achieve the effect of improving internal quantum efficiency, avoiding high temperature interface reaction, and uniform current distribution
CN103996764AActive Publication Date: 2014-08-20广州市众拓光电科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
广州市众拓光电科技有限公司
Publication Date
2014-08-20

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Abstract

The invention discloses an LED epitaxial wafer growing on an Ag substrate. The LED epitaxial wafer growing on the Ag substrate comprises the Ag substrate, an AlN buffer layer, a U-GaN film layer, an N-GaN film layer, an InGaN / GaN multi-quantum-well layer and a P-GaN film. The AlN buffer layer, the U-GaN film layer, the N-GaN film layer, the InGaN / GaN multi-quantum-well layer and the P-GaN film sequentially grow on the Ag substrate. By the adoption of the low-temperature growth technology, a GaN film grows on the novel metal Ag substrate in an epitaxial mode, so that the LED epitaxial wafer with the high quality is obtained; by the adoption of the metal Ag substrate, the growth technology is simple, the price is low, and the manufacturing cost of a device can be reduced to a great extent; by the selection of the proper crystal orientation, the GaN epitaxial film with the high quality is obtained from the Ag substrate (111) and the efficiency of nitride devices such as a photoelectric detector can be improved to a great extent.
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Description

technical field

[0001] The invention relates to an LED epitaxial wafer, in particular to an LED epitaxial wafer grown on an Ag substrate, a preparation method and application thereof. Background technique

[0002] Light-emitting diode (LED), as a new type of solid-state lighting source and green light source, has outstanding features such as small size, low power consumption, environmental protection, long service life, high brightness, low heat and colorful, and is widely used in outdoor lighting, commercial lighting and decoration Engineering and other fields have a wide range of applications. At present, under the background of the increasingly serious problem of global warming, saving energy and reducing greenhouse gas emissions has become an important issue faced by the whole world. A low-carbon economy based on low energy consumption, low pollution, and low emissions will become an important direction of economic development. In the field of lighting, the application...

Claims

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