The invention discloses a preparation method of a multi-element co-doped
bismuth ferrite film
system material, the
film material is Bi < 1-x > (La < 0.2 > Nd < 0.2 > Sm < 0.2 > Gd < 0.2 > Lu < 0.2 >) < x > FeO < 3 >, and x is equal to 0.05, 0.1, 0.14 and 0.2. According to the preparation method, a multi-element co-doped
ceramic target material is prepared by adopting a
sol-
gel method, and then the multi-element co-doped
bismuth ferrite film is epitaxially grown on a LaAlO3 substrate by adopting a pulse
laser deposition technology. According to the preparation method, uniform
doping of five
rare earth elements (La, Nd, Sm, Gd and Lu) in BFO
crystal lattices is achieved, the prepared
ceramic target material is high in density, and an epitaxial film is high in purity and good in
crystallinity. The phase structure,
ferroelectricity and
conductivity of the film are remarkably regulated and optimized through the multi-element co-
doping effect, compared with a pure-phase
bismuth ferrite film, the coercive field of the film is remarkably reduced, the
conductivity is improved by several orders of magnitude, and meanwhile the film has a regular nano island structure and an excellent ferroelectric domain overturning characteristic. The thin film prepared by the method is suitable for next-generation nonvolatile memories, sensors and multifunctional electronic devices.