The invention relates to preparation of an AFE
capacitor with
high energy storage density and
high energy storage efficiency, an anti-ferroelectric film layer and preparation thereof, and a flexible AFE
capacitor. The preparation method of the AFE
capacitor comprises the following steps: depositing a buffer layer on a substrate; depositing a first
electrode layer on the buffer layer; depositing anantiferroelectric thin film layer comprising more than two
layers of thin films on the
electrode layer; and depositing a second
electrode layer on the antiferroelectric film layer to obtain an AFE capacitor, wherein the antiferroelectric thin film layer is deposited through pulse
laser, and elements contained in adjacent thin films can be the same or different. According to the AFE capacitor prepared by the invention, the maximum
breakdown voltage is improved; meanwhile, according to the AFE capacitor layer prepared by using a method of different excitation number components, the
energy storage density and the
energy storage efficiency of the AFE capacitor are improved; and the AFE capacitor has excellent
fatigue resistance and flexible mechanical properties, the polarization and other properties of the AFE capacitor can be kept in a bent state, and a new way is developed for development and application of novel
energy storage equipment.