The invention discloses a flexible piezoelectric micromechanical ultrasonic
transducer as well as a preparation method and application thereof. The flexible piezoelectric micromechanical ultrasonic
transducer comprises a laminated structure and a flexible
coating layer packaging the laminated structure, the laminated structure comprises a flexible substrate, an
adhesive layer, a first supporting layer, a second supporting layer, a bottom
electrode layer, a piezoelectric layer and a top
electrode layer which are sequentially laminated, the first supporting layer is provided with a through cavity structure, and the second supporting layer is provided with a through cavity structure. The first supporting layer and the second supporting layer are both made of
epoxy group negative
photoresist, and the piezoelectric layer is composed of
polyvinylidene fluoride-trifluoroethylene and nano
potassium sodium niobate
ceramic particles. The flexible piezoelectric micromechanical ultrasonic
transducer has the advantages of being high in sensitivity, good in
tensile ductility and bendability, capable of flexibly adjusting resonant frequency, easy to array and the like, the preparation method is simple, the production cost is low,
batch production is easy, and the flexible piezoelectric micromechanical ultrasonic transducer is suitable for large-scale industrial production and application.