Preparation of AFE capacitor with high energy storage density and high energy storage efficiency, anti-ferroelectric film layer and preparation thereof and flexible AFE capacitor

Abstract

The invention relates to preparation of an AFE capacitor with high energy storage density and high energy storage efficiency, an anti-ferroelectric film layer and preparation thereof, and a flexible AFE capacitor. The preparation method of the AFE capacitor comprises the following steps: depositing a buffer layer on a substrate; depositing a first electrode layer on the buffer layer; depositing anantiferroelectric thin film layer comprising more than two layers of thin films on the electrode layer; and depositing a second electrode layer on the antiferroelectric film layer to obtain an AFE capacitor, wherein the antiferroelectric thin film layer is deposited through pulse laser, and elements contained in adjacent thin films can be the same or different. According to the AFE capacitor prepared by the invention, the maximum breakdown voltage is improved; meanwhile, according to the AFE capacitor layer prepared by using a method of different excitation number components, the energy storage density and the energy storage efficiency of the AFE capacitor are improved; and the AFE capacitor has excellent fatigue resistance and flexible mechanical properties, the polarization and other properties of the AFE capacitor can be kept in a bent state, and a new way is developed for development and application of novel energy storage equipment.

Description

Technical field

[0001] The present application relates to the field of antiferrogen oxide materials, and more particularly, it relates to the preparation of the AFE capacitor of high storage density, high storage efficiency, anti-ferroelectric film layer and preparation, AFE capacitor. Background technique

[0002] The energy storage capacitor is also called electrochemical capacitors or super capacitors, which have excellent overall performance, fast storage capacitance, long battery life, can be connected in parallel to form a supercapacitor module, and the pressureable pressure is more high capacity. The energy storage capacitor is the core of the high-efficiency energy storage device capable of achieving high energy storage and high power densities, and has good energy storage efficiency.

[0003] Anti-ferroelectric (AFE) or ferroelectric (Fe) material has the advantages of large dielectric constant, high resistance, polarized switching speed, and width operating temperature ...

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