69 results about "Thin disc" patented technology

In a first aspect, an apparatus for cleaning a thin disk is provided. The apparatus includes (1) a plurality of support rollers adapted to support an edge of the thin disk as the thin disk rotates within a first plane; and (2) an edge-cleaning roller adapted to rotate within a second plane oriented at a first non-zero angle to the first plane, so as to contact an edge bevel of the thin disk while so rotating. Numerous other aspects are provided.

In an outer blade cutting wheel comprising an annular thin disc base of cemented carbide having an outer diameter of 80-200 mm, an inner diameter of 30-80 mm, and a thickness of 0.1-1.0 mm, and a blade section disposed on an outer periphery of the base, the blade section comprises diamond grains and/or CBN grains bound with a metal bond having a Young's modulus of 0.7-4.0×10¹¹ Pa and has a thickness which is greater than the thickness of the base by at least 0.01 mm. The outer blade cutting wheel is capable of cutting a workpiece at a high accuracy and a reduced allowance, improves machining yields, and reduces machining costs.

The invention relates to an apparatus for the cleaning of thin wafers (6), wherein the wafers (6) are fixed with one side to a carrier device (2), and wherein an interspace (7) is formed between two adjacent substrates, wherein the apparatus substantially consists of a shower device (15) by which fluid is injected into the respective interspaces (7), and a basin (14) that can be filled with fluid and that is dimensioned such that it houses the carrier device (2).

According to the invention, optionally either the shower device (15) can be moved in relation to the immobile carrier device (2), or the carrier device (2) can be moved in relation to the immobile shower device (15), or both the carrier device (2) as well as the shower device (15) can be moved in relation to each other.

The method stands out by the fact that in a preferred cleaning process, a shower with warm fluid takes place at first with the carrier device (2) being moved within the basin, followed by an ultrasonic cleaning in cold fluid and another shower with warm fluid.

A bugproof and odorproof sealing ring structure of a sinkhole screen, including a base seat, a diaphragm and a gum ring. The base is a ring body having a screen section formed with multiple perforations and holders. An upper end and a lower end of the base seat are respectively formed with a stepped flange and a stepped skirt. The diaphragm is a gum-made thin disc having chucking bosses inserted in the holders to connect the diaphragm under the base seat with outer circumference of the diaphragm tightly attaching to the stepped skirt of the base seat. The inner circumference of the gum ring is formed with a stepped annular groove adapted to the stepped flange of the base seat, whereby the gum ring can be snugly fitted around the stepped flange of the base seat. The sealing ring can be directly placed on a conventional sinkhole screen to achieve a bugproof and odorproof effect.

The inventive method for processing a silicon wafer is a method comprising step 11 in which a single crystal ingot is sliced into thin disc-like wafers; step 13 in which the surface of each wafer is lapped to be planar; step 14 in which the wafer is subjected to alkaline cleaning to be removed of contaminants resulting from preceding machining; and step 16 in which the wafer is alternately transferred between two groups of etching tanks one of which contain acidic etching solutions and the other alkaline etching solutions, wherein an additional step 12 is introduced between step 11 and step 13 in which a wafer is immersed in an acidic solution containing hydrofluoric acid (HF) and nitric acid (HNO₃) at a volume ratio of ⅛ to ½ (HF/HNO₃) so that degraded superficial layers occurring on the front and rear surfaces of the wafer as a result of machining can be removed and the edge surface of the wafer can be beveled. The inventive method simplifies the steps involved in the processing of a wafer, and reduces the intervention of alkaline cleaning accompanied with mechanical beveling, thereby reducing the risk of contamination due to metal impurities which may result from alkaline cleaning.

It is possible to reduce workloads of a both-side simultaneous polishing process or a single-side polishing process, and to achieve both of the maintenance of the wafer flatness and the reduction in wafer front side roughness upon completing a flattening process. A method for manufacturing silicon wafers according to the present invention includes a flattening process 13 of grinding or lapping front and back sides of a thin disc-shaped silicon wafer obtained by slicing a silicon single crystal ingot, an etching process of immersing the silicon wafer in an etchant for controlling a silicon wafer surface shape in which a fluorochemical surfactant is uniformly mixed in an alkaline aqueous solution to etch the front and back sides of the silicon wafer, and a both-side simultaneous polishing process 16 of simultaneously polishing the front and back sides of the etched silicon wafer or a single-side polishing process of polishing the front and back sides of the etched wafer for every side, in this order.

A method for making a substrate wafer for a low-defect semiconductor component is described. In this method a single crystal having a [0001] surface perpendicular to a c-axis thereof is formed, subdivided into thin disks each with at least one disk surface to be coated, the at least one disk surface is smoothed and the thin disks are tempered at a temperature above 1770 K. Preferably the tempering occurs for at least 10 minutes at temperatures greater than 1770 K in a dust-poor atmosphere with a reduced oxygen partial pressure. Al₂O₃ is a preferred material for the single crystal.

The invention relates to a method for measuring the diameter of a ring groove, which comprises an installing method and a detecting method. The measuring method comprises the following steps: placing the lower surface of the body of a vernier caliper on the top surface of a sizing block positioned on a flat plate, and making two outside tips vertically hang at two sides of the sizing block; fitting the bottom surface of the lower flanges of the measuring tips sleeved on the tips with the flat plate, and tightly screwing fastening bolts; when detecting, inserting the flanges of the two measuring tips from two sides of a measured ring groove until the flanges touch the bottom of the groove; finding the maximum value D2 generated when the shaft axis of the two measuring tips and the shaft axis of the measured ring groove are in the same plane; comparing the reading D2 with the standard value D1 of a block gage which is previously measured; and then, judging whether the measured value is within the tolerance limit or not. Each measuring tip comprises a column shaft provided with an axial through groove, and a coaxial thin disc-shaped flange positioned at the bottom end of the column shaft. The invention can accurately and conveniently detect the diameters of inner ring grooves and outer ring grooves of different sizes to meet the detection requirements of various workpieces.

The invention belongs to the field of rotating machinery experimental mechanics, and specifically relates to an optical measuring method and apparatus for deformation and strain of a high speed rotating structural member. The optical measuring apparatus comprises a high speed rotating system for a thin disk-shaped axisymmetric structural member, an image acquisition and signal processing system and an auxiliary test system, wherein the surface of a test member of the thin disk-shaped axisymmetric structure is coated with a pattern of concentric circles and a vertical ultra high-speed rotating axis is formed; a disk type variable frequency motor is used to drive the single-point supported vertical ultra high-speed rotating axis in a vacuum chamber; a common low-speed digital camera is used to acquire the surface pattern of concentric circles of the high-speed rotating thin disc-shaped axisymmetric structure test member under the irradiation of a stroboscopic light source; and the image identification technology is used to acquire the pattern change information and obtain deformation and strain of the high speed rotating test member after processing the pattern change information. The optical measuring method and apparatus for deformation and strain of a high speed rotating structural member can acquire the stress information by measuring changes of the radius of the concentric circles, and are suitable for the mechanical robustness testing field of high speed and ultra high-speed rotating structural member, wherein the rotating speed is greater than 10000rpm.

A sealing ring structure of a sinkhole, which is inlaid in the sinkhole to achieve bugproof and odorproof effects. The sealing ring structure includes a base seat, a diaphragm and a gum ring. The base is a ring body having a screen section formed with multiple perforations. The center and other portions of the screen section are respectively formed with holders. An upper end and a lower end of the base seat are respectively formed with a flange and a stepped skirt. The diaphragm is a gum-made thin disc having chucking bosses inserted in the holders to connect the diaphragm under the base seat with outer circumference of the diaphragm tightly attaching to the stepped skirt of the base seat. The gum ring is fitted around the base seat under the flange thereof. A middle portion of the gum ring is formed with a bight section. When the base seat is placed in the sinkhole, the gum ring is snugly watertight fitted in the sinkhole. The sealing ring can be directly placed in the sinkhole on a stepped shoulder section thereof instead of the conventional petal-type plastic ring to achieve a bugproof and odorproof effect.

The invention provides an annular Tesla turbine which is characterized in that a rotor is in a ring shape, a stator is cylindrical and is arranged in the rotor, airflow rings are fully distributed inside the rotor, the space between the airflow rings adjacent to a nozzle is smaller, the space between the airflow rings far away from the nozzle is larger, and the nozzle is used for spraying air to the rotor along the tangential direction of the ring of the rotor. Since the airflow rings fully distributed inside the ring can be used for greatly increasing the contact area between the ring of the rotor and airflow; according to a boundary layer effect, the ring of the rotor can be driven to rotate by the airflow, so that the rotation of the rotor is realized; the airflow rings inside the ring of the rotor of the annular Tesla turbine are used for replacing the thin disc of a traditional Tesla turbine, the airflow rings and the ring of the rotor can be manufactured into a whole, or the airflow rings are supported and fixed on the ring, so that the airflow rings have rigidity better than that of the thin disc and have less possibility of deformation, and thus the rotor with a greater diameter and less possibility of deformation can be manufactured; and the power is increased, the efficiency is improved, and the operation is stable and reliable.

A series of elongated oval wire windings bent into open C-shaped or other loop shape coils are positioned around a flywheel. Magnets, mating the loop opening shape, extend from the outer edge of the flywheel on a thin disc to pass through the coils to generate electricity with the spin of the flywheel. With no magnetic material is the coils there is no magnetic resistance created thereby providing more efficient electricity generation.

A disc filter includes several triangular sectors that are connected from their neck section to the body of the disc filter. The sectors form a relatively thin disc that is rotated during filtration in a basin that contains a suspension to be filtered. The side surfaces of the sector have openings through which liquid in the suspension passes into several essentially radial flow channels inside the sector to flow on to the neck section and away from the sector. A separating wall is formed between two adjacent radial flow channels. Furthermore, the sector is made of two side elements which are of plastic material and the mating surfaces of which are placed against each other.

The invention discloses a low-temperature-resistance and compact-type magnetofluid sealing device. The low-temperature-resistance and compact-type magnetofluid sealing device comprises a boss-shaped disc and a thin-disc-shaped rotary shaft, the disc is coaxial to the rotary shaft, the two ends of the disc are flush with the two ends of the rotary shaft, a bearing and an annular magnetofluid sealing structure which achieves the sealing effect are arranged between the rotary shaft and the disc, and the magnetofluid sealing structure comprises magnetic liquid and a magnetic pole, and is providedwith a heater used for heating the magnetic liquid. The invention aims at providing the low-temperature-resistance and compact-type magnetofluid sealing device which can guarantee that the magnetic liquid cannot get frozen, and the problems in the prior art are solved that the magnetofluid sealing device is under large resistance at low temperature, gets stuck, causes product deformation, and is not compact in structural design, inconvenient to install, and low in assembling efficiency.